[Scan]
initial_time=2016-01-28T16:22:06
final_time=2016-01-28T16:22:26
ip_count=19
run=1026
dataset=2
scan=90
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-8.18396E-1
ql1_imon=1.33541E-8
ql2_vset=
ql2_vmon=-7.99274E-1
ql2_imon=2.03006E-9
ql3_vset=
ql3_vmon=-9.13105E0
ql3_imon=1.22434E-9
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-1.09887E-10
mult1=-9.24672E-9
mult2=-2.81243E-9
rf_tmon=-3.77942E-3
rf_agc=3.41747E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=1.6773E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6361E0
bslens_imon=2.31785E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20205E1
lens5a_imon=1.98848E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12422E2
lens4a_imon=2.04862E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53863E1
cs_ef1b_imon=3.09983E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02305E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=1.22279E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37797E0
lens1_imon=2.74684E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64795E1
os_ef1alow_imon=2.96901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03774E1
cs_ea2_imon=1.39006E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84466E1
cs_ef1a_imon=3.01081E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.25641E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11123E1
os_restr1_imon=4.28409E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15125E1
os_ea1_imon=2.42828E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.07136E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2515E0
cs_ionrep_imon=9.58183E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91839E2
cs_nozzle_imon=1.93377E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=2.04207E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=3.21786E-8
tplens_vset=1.4E-1
tplens_vmon=1.64564E0
tplens_imon=-4.29124E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25749E1
iondef3_imon=1.48991E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26921E1
iondef2_imon=1.56526E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02891E2
lens6_imon=2.984E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.9535E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30137E0
ionrepsh_imon=9.46647E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3355E1
lens5b_imon=2.14493E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.30858E0
os_ea2_imon=-5.48088E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.00032E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.18092E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06597E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81807E-1
os_ef2bup_imon=-5.41618E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10931E1
os_restr2_imon=3.39391E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.30974E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.09576E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73147E1
iondef1_imon=1.04867E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68268E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.3888E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.78924E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11272E0
cs_ionaccel_imon=-1.10944E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47179E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56087E1
einzel_imon=7.5653E-6
window_vset=0.0E0
window_vmon=1.47666E-1
window_imon=-1.10944E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39059E-4
mask2_vset=0.0E0
mask2_vmon=-1.86446E1
mask2_imon=-7.16609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.19175E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93692E3
defgrida_imon=6.34098E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.3035E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.62112E0
defgridb_imon=6.17155E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3327E1
os_fil1_imon=9.42402E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07257E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62056E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30769E1
cs_fil1_imon=9.23812E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.24517E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65474E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44774E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.06549E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.18544E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22278E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.16621E-2
chamber_ion_pmon=2.159E-9
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.31061E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.18253E-1	-7.99227E-1	-9.13112E0	-9.14197E0	5.07832E-3	9.33647E-2	2.72516E1	-3.26825E1	-3.26795E1	2.68214E1	2.15716E-9	2.52599E-3	2.52599E-3	6.31278E-3	2.17547E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.1811E-1	-7.99179E-1	-9.13095E0	-9.14211E0	5.00679E-3	9.31501E-2	2.72973E1	-3.26488E1	-3.26074E1	2.6804E1	2.15706E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.17066E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.18014E-1	-7.99155E-1	-9.13105E0	-9.14211E0	5.05447E-3	9.31501E-2	2.72779E1	-3.26816E1	-3.26202E1	2.68001E1	2.15619E-9	2.51918E-3	2.51918E-3	6.32099E-3	2.17028E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.18133E-1	-7.99322E-1	-9.131E0	-9.14202E0	5.17368E-3	9.3174E-2	2.72835E1	-3.26771E1	-3.26579E1	2.68094E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.18253E-1	-7.98988E-1	-9.13117E0	-9.14156E0	5.57899E-3	9.31025E-2	2.73123E1	-3.26392E1	-3.26296E1	2.67836E1	2.158E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.16501E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.18276E-1	-7.99203E-1	-9.1311E0	-9.1418E0	5.55515E-3	9.2864E-2	2.72355E1	-3.2649E1	-3.26962E1	2.67938E1	2.15441E-9	2.51739E-3	2.51739E-3	6.34518E-3	2.16067E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09627E0	-8.1811E-1	-7.99203E-1	-9.13107E0	-9.14245E0	5.26905E-3	9.30786E-2	2.7269E1	-3.26646E1	-3.25532E1	2.68256E1	2.15706E-9	2.52538E-3	2.52538E-3	6.29098E-3	2.17633E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.18062E-1	-7.99036E-1	-9.13124E0	-9.14207E0	5.26905E-3	9.31978E-2	2.73303E1	-3.26639E1	-3.27011E1	2.68172E1	2.15706E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.18011E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.1799E-1	-7.98917E-1	-9.13115E0	-9.14202E0	4.88758E-3	9.30548E-2	2.7298E1	-3.26443E1	-3.25405E1	2.67937E1	2.16081E-9	2.52867E-3	2.52867E-3	6.31837E-3	2.17822E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.18157E-1	-7.99012E-1	-9.13074E0	-9.14221E0	5.126E-3	9.32455E-2	2.73003E1	-3.26909E1	-3.27798E1	2.6807E1	2.15624E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.18104E-2
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.18491E-1	-7.99108E-1	-9.13117E0	-9.14209E0	5.38826E-3	9.3317E-2	2.73393E1	-3.26543E1	-3.25605E1	2.68112E1	2.15706E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.16313E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.18324E-1	-7.99155E-1	-9.13093E0	-9.14183E0	5.19753E-3	9.31263E-2	2.73478E1	-3.26657E1	-3.26669E1	2.6801E1	2.15613E-9	2.52867E-3	2.52867E-3	6.3074E-3	2.16878E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.17966E-1	-7.99012E-1	-9.13107E0	-9.14214E0	5.34058E-3	9.3174E-2	2.72461E1	-3.26573E1	-3.25947E1	2.67897E1	2.159E-9	2.51954E-3	2.51954E-3	6.29128E-3	2.17918E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.18014E-1	-7.99203E-1	-9.13103E0	-9.14192E0	5.45979E-3	9.3317E-2	2.72913E1	-3.26981E1	-3.27155E1	2.68118E1	2.15808E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.16991E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.17895E-1	-7.99322E-1	-9.131E0	-9.14199E0	5.88894E-3	9.31263E-2	2.73075E1	-3.26242E1	-3.2611E1	2.68094E1	2.15706E-9	2.52538E-3	2.52538E-3	6.32936E-3	2.18011E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.18086E-1	-7.99084E-1	-9.13105E0	-9.14199E0	5.84126E-3	9.34362E-2	2.73357E1	-3.26609E1	-3.27149E1	2.68154E1	2.15613E-9	2.52647E-3	2.52647E-3	6.32936E-3	2.1877E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.1811E-1	-7.99322E-1	-9.13081E0	-9.14207E0	5.24521E-3	9.33647E-2	2.72957E1	-3.26986E1	-3.25069E1	2.68124E1	2.15987E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.17822E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.18253E-1	-7.99322E-1	-9.13088E0	-9.14207E0	5.4121E-3	9.33647E-2	2.73063E1	-3.26795E1	-3.2653E1	2.67938E1	2.15706E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.18201E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.18133E-1	-7.99298E-1	-9.13079E0	-9.14171E0	5.29289E-3	9.33647E-2	2.72961E1	-3.26314E1	-3.27348E1	2.68016E1	2.158E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.17822E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.18396E-1	-7.99274E-1	-9.13105E0	-9.14204E0	5.31673E-3	9.33886E-2	2.73147E1	-3.26921E1	-3.25749E1	2.68268E1	2.159E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.16621E-2