[Scan]
initial_time=2016-01-28T16:22:33
final_time=2016-01-28T16:22:52
ip_count=19
run=1026
dataset=2
scan=91
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08768E-4
ql1_vset=
ql1_vmon=-8.18491E-1
ql1_imon=1.33892E-8
ql2_vset=
ql2_vmon=-7.99179E-1
ql2_imon=1.96269E-9
ql3_vset=
ql3_vmon=-9.13107E0
ql3_imon=1.12772E-9
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=-1.21033E-10
mult1=-1.0334E-8
mult2=-2.72803E-9
rf_tmon=-4.24001E-3
rf_agc=3.40323E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=1.68219E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6609E0
bslens_imon=2.5114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19818E1
lens5a_imon=1.98474E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.04969E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53502E1
cs_ef1b_imon=3.10271E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04829E1
cs_ea1_imon=1.23403E-5
lens1_vset=-5.0E0
lens1_vmon=-5.45161E0
lens1_imon=2.44769E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.9672E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03826E1
cs_ea2_imon=1.42658E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84616E1
cs_ef1a_imon=3.00288E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.25145E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11129E1
os_restr1_imon=4.29202E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1527E1
os_ea1_imon=2.39531E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63839E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23794E0
cs_ionrep_imon=9.7318E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=2.05468E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.22996E-8
tplens_vset=1.4E-1
tplens_vmon=1.60309E0
tplens_imon=-3.83833E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27637E1
iondef3_imon=1.4956E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26811E1
iondef2_imon=1.5724E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98417E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.04702E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26862E0
ionrepsh_imon=9.41325E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33722E1
lens5b_imon=2.16171E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.11677E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3394E0
os_ea2_imon=-7.30695E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00279E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71017E1
cs_ef2a_imon=3.17443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.66275E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78803E-1
os_ef2bup_imon=-5.4306E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=3.41301E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.29857E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.10477E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72959E1
iondef1_imon=1.10024E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6813E1
iondef4_imon=1.08305E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.31649E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.75186E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13375E0
cs_ionaccel_imon=-1.11665E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47129E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.67342E-6
window_vset=0.0E0
window_vmon=1.80102E-1
window_imon=-1.10223E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.86224E1
mask2_imon=-7.77877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.59753E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.30919E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.1091E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42623E0
defgridb_imon=5.94817E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33276E1
os_fil1_imon=9.36846E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07431E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62651E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30792E1
cs_fil1_imon=9.2261E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.2764E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64435E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20526E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.6708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.72912E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.43171E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13021E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21991E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.17547E-2
chamber_ion_pmon=2.15533E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.80315E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.183E-1	-7.98917E-1	-9.13062E0	-9.14228E0	5.126E-3	9.31025E-2	2.72991E1	-3.26747E1	-3.26549E1	2.6804E1	2.15894E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.17255E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.18372E-1	-7.98869E-1	-9.13067E0	-9.1418E0	5.53131E-3	9.29832E-2	2.72512E1	-3.2667E1	-3.25189E1	2.67932E1	2.15992E-9	2.51417E-3	2.51417E-3	6.30202E-3	2.17547E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.18658E-1	-7.98798E-1	-9.13081E0	-9.1419E0	5.26905E-3	9.32217E-2	2.72976E1	-3.26718E1	-3.271E1	2.68036E1	2.15879E-9	2.51952E-3	2.51952E-3	6.3131E-3	2.16639E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.18539E-1	-7.98798E-1	-9.13074E0	-9.14185E0	5.50747E-3	9.31501E-2	2.72955E1	-3.2626E1	-3.25731E1	2.6807E1	2.15817E-9	2.51498E-3	2.51498E-3	6.32858E-3	2.16918E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.18682E-1	-7.98965E-1	-9.1306E0	-9.14199E0	5.38826E-3	9.32217E-2	2.73183E1	-3.262E1	-3.26645E1	2.67932E1	2.16081E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.17633E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.18563E-1	-7.99227E-1	-9.13057E0	-9.14209E0	5.45979E-3	9.34839E-2	2.73016E1	-3.26585E1	-3.26065E1	2.6807E1	2.15987E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.18011E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.18324E-1	-7.98917E-1	-9.13095E0	-9.14187E0	5.34058E-3	9.30786E-2	2.73143E1	-3.26444E1	-3.26811E1	2.67962E1	2.15546E-9	2.52131E-3	2.52131E-3	6.31798E-3	2.17646E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09627E0	-8.18467E-1	-7.99012E-1	-9.13119E0	-9.14228E0	5.14984E-3	9.34362E-2	2.73045E1	-3.26579E1	-3.25828E1	2.68615E1	2.15791E-9	2.52362E-3	2.52362E-3	6.30182E-3	2.16952E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09657E0	-8.18396E-1	-7.99155E-1	-9.13091E0	-9.14168E0	5.29289E-3	9.32932E-2	2.72908E1	-3.26487E1	-3.25916E1	2.68212E1	2.15825E-9	2.5199E-3	2.5199E-3	6.33341E-3	2.17563E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.18324E-1	-7.99108E-1	-9.13095E0	-9.14161E0	5.05447E-3	9.29832E-2	2.73163E1	-3.26567E1	-3.27051E1	2.67926E1	2.15864E-9	2.51911E-3	2.51911E-3	6.31332E-3	2.17602E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.18372E-1	-7.99108E-1	-9.13076E0	-9.14171E0	5.14984E-3	9.29832E-2	2.73375E1	-3.26561E1	-3.24886E1	2.68202E1	2.15992E-9	2.52599E-3	2.52599E-3	6.31278E-3	2.17361E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.18229E-1	-7.99179E-1	-9.13098E0	-9.14185E0	4.81606E-3	9.33647E-2	2.72871E1	-3.26951E1	-3.2623E1	2.68064E1	2.15808E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.17361E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.18491E-1	-7.99155E-1	-9.131E0	-9.14185E0	4.91142E-3	9.30309E-2	2.7321E1	-3.26885E1	-3.2754E1	2.67944E1	2.15332E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.17822E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.18658E-1	-7.99394E-1	-9.13091E0	-9.14183E0	4.98295E-3	9.32932E-2	2.73045E1	-3.26338E1	-3.2781E1	2.68215E1	2.15425E-9	2.52647E-3	2.52647E-3	6.32386E-3	2.17255E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.18563E-1	-7.99084E-1	-9.13072E0	-9.14178E0	5.05447E-3	9.32455E-2	2.72809E1	-3.26461E1	-3.25906E1	2.6816E1	2.15992E-9	2.52276E-3	2.52276E-3	6.32896E-3	2.16621E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.1861E-1	-7.99084E-1	-9.13086E0	-9.14183E0	5.38826E-3	9.32217E-2	2.7318E1	-3.26517E1	-3.2776E1	2.68064E1	2.15533E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.16991E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.18801E-1	-7.9906E-1	-9.13086E0	-9.14173E0	5.22137E-3	9.3317E-2	2.72756E1	-3.26667E1	-3.27015E1	2.68124E1	2.15505E-9	2.52362E-3	2.52362E-3	6.31858E-3	2.18301E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.18586E-1	-7.98941E-1	-9.1311E0	-9.14195E0	5.24521E-3	9.32217E-2	2.7319E1	-3.26799E1	-3.2575E1	2.67955E1	2.159E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.17547E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.18372E-1	-7.99108E-1	-9.13105E0	-9.14185E0	5.34058E-3	9.30548E-2	2.73246E1	-3.26514E1	-3.24886E1	2.68076E1	2.16085E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.17547E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.18491E-1	-7.99179E-1	-9.13107E0	-9.14178E0	5.29289E-3	9.31978E-2	2.72959E1	-3.26811E1	-3.27637E1	2.6813E1	2.15533E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.17547E-2