[Scan]
initial_time=2016-01-28T16:22:59
final_time=2016-01-28T16:23:19
ip_count=19
run=1026
dataset=2
scan=92
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08785E-4
ql1_vset=
ql1_vmon=-8.18181E-1
ql1_imon=1.35519E-8
ql2_vset=
ql2_vmon=-7.99108E-1
ql2_imon=1.99066E-9
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=1.03731E-9
ql4_vset=
ql4_vmon=-9.14221E0
ql4_imon=-1.37019E-10
mult1=-9.29839E-9
mult2=-2.75069E-9
rf_tmon=-3.93137E-3
rf_agc=3.43414E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=1.67687E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65265E0
bslens_imon=2.58573E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19689E1
lens5a_imon=1.96492E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05125E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5367E1
cs_ef1b_imon=3.111E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02086E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05053E1
cs_ea1_imon=1.24748E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41267E0
lens1_imon=2.745E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65029E1
os_ef1alow_imon=2.96937E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03903E1
cs_ea2_imon=1.4064E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8449E1
cs_ef1a_imon=3.00937E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.25726E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.28986E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1517E1
os_ea1_imon=2.39885E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6465E1
os_ef1bup_imon=3.08758E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25387E0
cs_ionrep_imon=9.69994E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.93399E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=2.0345E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.22953E-8
tplens_vset=1.4E-1
tplens_vmon=1.60899E0
tplens_imon=-3.87372E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26667E1
iondef3_imon=1.47719E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26537E1
iondef2_imon=1.57488E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98254E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=3.90663E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24266E0
ionrepsh_imon=9.35308E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33781E1
lens5b_imon=2.17906E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.32053E0
os_ea2_imon=-6.9884E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00396E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.17587E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07919E0
os_ef2alow_imon=-2.63392E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85411E-1
os_ef2bup_imon=-5.38014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11009E1
os_restr2_imon=3.404E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.29751E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01671E1
cs_anode2_imon=2.09648E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.09175E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.07836E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.32075E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=7.80875E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13675E0
cs_ionaccel_imon=-1.19594E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=7.54729E-6
window_vset=0.0E0
window_vmon=1.75897E-1
window_imon=-1.03736E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.38998E-4
mask2_vset=0.0E0
mask2_vmon=-1.86308E1
mask2_imon=-6.55342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92678E3
multa_neg_imon=6.85426E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.72684E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.25067E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26972E0
defgridb_imon=6.15699E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33243E1
os_fil1_imon=9.45195E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07173E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62415E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30817E1
cs_fil1_imon=9.23956E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31304E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65125E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35722E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.02905E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.66597E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.47859E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22077E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.18201E-2
chamber_ion_pmon=2.15519E-9
chamber_cvt_pmon=2.52757E-3
foreline_cvt_pmon=2.52757E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.36177E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=220
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.18086E-1	-7.99346E-1	-9.13093E0	-9.14199E0	5.57899E-3	9.31501E-2	2.73063E1	-3.26514E1	-3.25629E1	2.67876E1	2.16081E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.17822E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.18157E-1	-7.99131E-1	-9.13107E0	-9.14202E0	5.26905E-3	9.29832E-2	2.73455E1	-3.26456E1	-3.25226E1	2.67886E1	2.15636E-9	2.51287E-3	2.51287E-3	6.2863E-3	2.18194E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.18038E-1	-7.9906E-1	-9.13107E0	-9.14185E0	5.34058E-3	9.29356E-2	2.7279E1	-3.26399E1	-3.25559E1	2.67966E1	2.15879E-9	2.51725E-3	2.51725E-3	6.3245E-3	2.16834E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.17823E-1	-7.9875E-1	-9.13091E0	-9.14192E0	5.19753E-3	9.29594E-2	2.73141E1	-3.26374E1	-3.26074E1	2.67782E1	2.15455E-9	2.52131E-3	2.52131E-3	6.29157E-3	2.16555E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.17752E-1	-7.98917E-1	-9.13107E0	-9.14221E0	5.22137E-3	9.32217E-2	2.73234E1	-3.26661E1	-3.25971E1	2.68076E1	2.158E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.16689E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.18086E-1	-7.99108E-1	-9.13107E0	-9.14185E0	4.93526E-3	9.31025E-2	2.72782E1	-3.26511E1	-3.25972E1	2.6777E1	2.15533E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.16991E-2
7.0E0	3.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.18253E-1	-7.99203E-1	-9.13107E0	-9.14202E0	5.05447E-3	9.31025E-2	2.73339E1	-3.26663E1	-3.25942E1	2.68208E1	2.15847E-9	2.52154E-3	2.52154E-3	6.3074E-3	2.18201E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.18062E-1	-7.98869E-1	-9.13107E0	-9.14211E0	5.29289E-3	9.32693E-2	2.73316E1	-3.2639E1	-3.25877E1	2.68047E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.18372E-1	-7.99131E-1	-9.13112E0	-9.14218E0	5.24521E-3	9.32932E-2	2.72839E1	-3.26803E1	-3.25806E1	2.67893E1	2.15716E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.17732E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.183E-1	-7.98869E-1	-9.13112E0	-9.14216E0	5.22137E-3	9.33886E-2	2.72925E1	-3.26338E1	-3.27095E1	2.68112E1	2.16085E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.18104E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.18086E-1	-7.99108E-1	-9.13079E0	-9.14216E0	4.81606E-3	9.34124E-2	2.73015E1	-3.26855E1	-3.25485E1	2.67956E1	2.15696E-9	2.5225E-3	2.5225E-3	6.31299E-3	2.18108E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.18348E-1	-7.98917E-1	-9.13081E0	-9.14226E0	5.07832E-3	9.35078E-2	2.73315E1	-3.26993E1	-3.26482E1	2.67896E1	2.15533E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.17361E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.18229E-1	-7.98917E-1	-9.13098E0	-9.1424E0	5.126E-3	9.32932E-2	2.73105E1	-3.26567E1	-3.26428E1	2.68112E1	2.15696E-9	2.52362E-3	2.52362E-3	6.34099E-3	2.16952E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.18038E-1	-7.98965E-1	-9.131E0	-9.14235E0	5.03063E-3	9.35793E-2	2.72862E1	-3.26555E1	-3.26095E1	2.68112E1	2.15808E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.16067E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.18133E-1	-7.99489E-1	-9.13119E0	-9.14204E0	5.00679E-3	9.32693E-2	2.73086E1	-3.26567E1	-3.26236E1	2.67856E1	2.159E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.15515E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.17895E-1	-7.99322E-1	-9.13098E0	-9.14221E0	5.45979E-3	9.30786E-2	2.73095E1	-3.26365E1	-3.26365E1	2.68624E1	2.15624E-9	2.52169E-3	2.52169E-3	6.29665E-3	2.16621E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.18038E-1	-7.99203E-1	-9.13105E0	-9.14214E0	4.86374E-3	9.30548E-2	2.73166E1	-3.26706E1	-3.26922E1	2.68136E1	2.15497E-9	2.52023E-3	2.52023E-3	6.31744E-3	2.17405E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.18229E-1	-7.99298E-1	-9.13124E0	-9.14228E0	5.00679E-3	9.35078E-2	2.73195E1	-3.26549E1	-3.25593E1	2.68178E1	2.15622E-9	2.51655E-3	2.51655E-3	6.3137E-3	2.16385E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.18419E-1	-7.99274E-1	-9.13093E0	-9.14187E0	5.24521E-3	9.35078E-2	2.73093E1	-3.26561E1	-3.26651E1	2.68233E1	2.159E-9	2.52169E-3	2.52169E-3	6.33977E-3	2.16067E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.18181E-1	-7.99108E-1	-9.13103E0	-9.14221E0	5.50747E-3	9.32932E-2	2.73051E1	-3.26537E1	-3.26667E1	2.68052E1	2.15519E-9	2.52757E-3	2.52757E-3	6.3074E-3	2.18201E-2