[Scan]
initial_time=2016-01-28T16:23:53
final_time=2016-01-28T16:24:12
ip_count=19
run=1026
dataset=2
scan=94
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08844E-4
ql1_vset=
ql1_vmon=-8.17919E-1
ql1_imon=1.35405E-8
ql2_vset=
ql2_vmon=-7.99417E-1
ql2_imon=2.02042E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=9.36675E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-1.06943E-10
mult1=-9.51162E-9
mult2=-2.74256E-9
rf_tmon=-5.5098E-3
rf_agc=3.23963E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=1.68509E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6483E0
bslens_imon=2.53204E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19829E1
lens5a_imon=1.96628E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.04946E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5343E1
cs_ef1b_imon=3.10163E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02202E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04915E1
cs_ea1_imon=1.24931E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3744E0
lens1_imon=2.46593E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.97189E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03592E1
cs_ea2_imon=1.40652E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=3.00072E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.25419E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.30319E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15526E1
os_ea1_imon=2.38757E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25944E0
cs_ionrep_imon=9.78248E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93306E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=2.0417E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.22128E-8
tplens_vset=1.4E-1
tplens_vmon=1.6096E0
tplens_imon=-3.43898E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25353E1
iondef3_imon=1.49687E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26615E1
iondef2_imon=1.57768E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.9828E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=3.99814E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27475E0
ionrepsh_imon=9.60618E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33493E1
lens5b_imon=2.17454E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.33596E0
os_ea2_imon=-7.36906E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.17515E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05035E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78803E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=3.40292E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.28496E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.0954E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72979E1
iondef1_imon=1.08293E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68058E1
iondef4_imon=1.08629E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=6.34663E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.8059E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-1.12025E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.60134E-6
window_vset=0.0E0
window_vmon=1.95719E-1
window_imon=-1.15629E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.57136E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.59067E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.18202E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51387E0
defgridb_imon=6.05809E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33253E1
os_fil1_imon=9.39225E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07822E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61802E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30814E1
cs_fil1_imon=9.23187E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31485E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64821E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26571E-2
os_fil2_imon=-2.73204E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80896E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.37122E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.44973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05813E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22142E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34588E-3
inlet_lpb_pmon=2.17255E-2
chamber_ion_pmon=2.15519E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.31662E-1
res40_imon=-2.54742E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.18205E-1	-7.99179E-1	-9.13103E0	-9.14164E0	4.93526E-3	9.33409E-2	2.73177E1	-3.26434E1	-3.26182E1	2.68082E1	2.15987E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.17822E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.18372E-1	-7.99346E-1	-9.13081E0	-9.14228E0	5.126E-3	9.34124E-2	2.7248E1	-3.26392E1	-3.26038E1	2.6828E1	2.15519E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.18011E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.17943E-1	-7.99346E-1	-9.13119E0	-9.14214E0	5.45979E-3	9.32932E-2	2.73293E1	-3.26797E1	-3.26608E1	2.68151E1	2.15696E-9	2.5225E-3	2.5225E-3	6.30182E-3	2.17145E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0968E0	-8.17966E-1	-7.99274E-1	-9.13131E0	-9.14192E0	5.07832E-3	9.29832E-2	2.72883E1	-3.26855E1	-3.25473E1	2.68076E1	2.15907E-9	2.52025E-3	2.52025E-3	6.32328E-3	2.16918E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0968E0	-8.1799E-1	-7.99298E-1	-9.13115E0	-9.14192E0	5.26905E-3	9.32455E-2	2.73252E1	-3.26632E1	-3.26254E1	2.67902E1	2.15613E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.17066E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09719E0	-8.1811E-1	-7.9937E-1	-9.13119E0	-9.1419E0	5.26905E-3	9.34124E-2	2.7351E1	-3.26591E1	-3.26327E1	2.6825E1	2.15613E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.18011E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.18157E-1	-7.99513E-1	-9.13107E0	-9.14195E0	5.03063E-3	9.32455E-2	2.72945E1	-3.26543E1	-3.26048E1	2.67878E1	2.15519E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.18201E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09673E0	-8.1811E-1	-7.99632E-1	-9.13129E0	-9.14195E0	5.19753E-3	9.3317E-2	2.73075E1	-3.26368E1	-3.25918E1	2.67998E1	2.159E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.1829E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.1799E-1	-7.99394E-1	-9.13131E0	-9.1418E0	5.07832E-3	9.32693E-2	2.72874E1	-3.26467E1	-3.26071E1	2.67968E1	2.15425E-9	2.52647E-3	2.52647E-3	6.29645E-3	2.18201E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.178E-1	-7.99251E-1	-9.13126E0	-9.14185E0	4.72069E-3	9.3627E-2	2.72811E1	-3.26512E1	-3.26669E1	2.6798E1	2.15706E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.16313E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.17728E-1	-7.99179E-1	-9.13138E0	-9.14207E0	4.76837E-3	9.36985E-2	2.73057E1	-3.26633E1	-3.25233E1	2.67931E1	2.15706E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.17822E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.17895E-1	-7.99155E-1	-9.13126E0	-9.14207E0	5.07832E-3	9.32932E-2	2.73517E1	-3.26832E1	-3.26992E1	2.68142E1	2.15762E-9	2.51793E-3	2.51793E-3	6.33706E-3	2.18104E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.17847E-1	-7.99203E-1	-9.13134E0	-9.14199E0	5.05447E-3	9.28164E-2	2.73279E1	-3.265E1	-3.25137E1	2.67884E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.17847E-1	-7.99251E-1	-9.13105E0	-9.14211E0	5.43594E-3	9.30548E-2	2.73308E1	-3.26811E1	-3.26725E1	2.68058E1	2.15894E-9	2.52428E-3	2.52428E-3	6.34037E-3	2.17822E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09665E0	-8.17752E-1	-7.99584E-1	-9.13107E0	-9.14207E0	5.48363E-3	9.32932E-2	2.72859E1	-3.26849E1	-3.2492E1	2.67938E1	2.15982E-9	2.52139E-3	2.52139E-3	6.3074E-3	2.17529E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-8.17895E-1	-7.9906E-1	-9.13115E0	-9.14187E0	5.43594E-3	9.31025E-2	2.73122E1	-3.26531E1	-3.26791E1	2.68004E1	2.16081E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.18201E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09673E0	-8.18038E-1	-7.98988E-1	-9.13115E0	-9.14178E0	5.34058E-3	9.29356E-2	2.73287E1	-3.26555E1	-3.26567E1	2.68058E1	2.159E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.16067E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09627E0	-8.18133E-1	-7.99394E-1	-9.13103E0	-9.14202E0	5.17368E-3	9.31263E-2	2.73138E1	-3.26926E1	-3.2586E1	2.68094E1	2.15533E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.15883E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.18038E-1	-7.99251E-1	-9.13126E0	-9.14211E0	5.17368E-3	9.3174E-2	2.72843E1	-3.26615E1	-3.26878E1	2.68166E1	2.15992E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.17918E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.17919E-1	-7.99417E-1	-9.13148E0	-9.14202E0	4.91142E-3	9.31978E-2	2.72979E1	-3.26615E1	-3.25353E1	2.68058E1	2.15519E-9	2.51771E-3	2.51771E-3	6.34588E-3	2.17255E-2