[Scan]
initial_time=2016-01-28T16:25:12
final_time=2016-01-28T16:25:32
ip_count=19
run=1026
dataset=2
scan=97
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08816E-4
ql1_vset=
ql1_vmon=-8.17585E-1
ql1_imon=1.37737E-8
ql2_vset=
ql2_vmon=-7.99346E-1
ql2_imon=2.02146E-9
ql3_vset=
ql3_vmon=-9.13119E0
ql3_imon=8.2171E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=-1.11544E-10
mult1=-9.66815E-9
mult2=-2.68468E-9
rf_tmon=-4.21201E-3
rf_agc=3.37722E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=1.70771E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67215E0
bslens_imon=2.48728E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19562E1
lens5a_imon=1.97154E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12455E2
lens4a_imon=2.04996E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5379E1
cs_ef1b_imon=3.11028E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02168E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=1.25199E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41221E0
lens1_imon=2.56659E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64969E1
os_ef1alow_imon=2.95351E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03937E1
cs_ea2_imon=1.41277E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=3.01189E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.24485E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.29851E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.40053E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64404E1
os_ef1bup_imon=3.08397E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23948E0
cs_ionrep_imon=9.75847E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=2.05576E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.21301E-8
tplens_vset=1.4E-1
tplens_vmon=1.58736E0
tplens_imon=-2.88531E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26693E1
iondef3_imon=1.51443E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26753E1
iondef2_imon=1.55805E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98313E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=3.9261E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=9.30786E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.337E1
lens5b_imon=2.17053E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74615E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3284E0
os_ea2_imon=-9.30213E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00453E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.17551E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05516E0
os_ef2alow_imon=-2.69519E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04632E-1
os_ef2bup_imon=-5.44501E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10985E1
os_restr2_imon=3.40725E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.29856E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.10045E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.07859E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68184E1
iondef4_imon=1.0726E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.32662E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.78807E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-1.12746E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56117E1
einzel_imon=7.50043E-6
window_vset=0.0E0
window_vmon=1.55475E-1
window_imon=-1.08782E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39019E-4
mask2_vset=0.0E0
mask2_vmon=-1.86212E1
mask2_imon=-7.67065E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=6.87091E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.56088E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50194E3
multb_neg_imon=6.78078E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36547E0
defgridb_imon=6.04177E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33265E1
os_fil1_imon=9.42817E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07413E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6214E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30785E1
cs_fil1_imon=9.221E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35449E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64228E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37035E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88104E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.13639E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.5158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24434E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22083E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.17444E-2
chamber_ion_pmon=2.15987E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.43985E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.17513E-1	-7.99274E-1	-9.1315E0	-9.14218E0	5.17368E-3	9.31978E-2	2.73039E1	-3.2688E1	-3.26579E1	2.68124E1	2.16081E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.16125E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.17204E-1	-7.99155E-1	-9.13155E0	-9.14202E0	5.36442E-3	9.3174E-2	2.72789E1	-3.2636E1	-3.25461E1	2.68169E1	2.15546E-9	2.51603E-3	2.51603E-3	6.3074E-3	2.16011E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.17847E-1	-7.99274E-1	-9.13157E0	-9.14187E0	5.34058E-3	9.32217E-2	2.72856E1	-3.26307E1	-3.27104E1	2.68215E1	2.15843E-9	2.52783E-3	2.52783E-3	6.31847E-3	2.17581E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.1768E-1	-7.99417E-1	-9.13141E0	-9.14218E0	5.45979E-3	9.3627E-2	2.73147E1	-3.26699E1	-3.26164E1	2.6813E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.17537E-1	-7.9937E-1	-9.13119E0	-9.14159E0	4.95911E-3	9.31978E-2	2.73309E1	-3.26729E1	-3.26597E1	2.67908E1	2.158E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.16125E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.17704E-1	-7.98774E-1	-9.13126E0	-9.14178E0	5.29289E-3	9.29356E-2	2.73134E1	-3.26708E1	-3.26579E1	2.6803E1	2.15624E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.17732E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.17752E-1	-7.98821E-1	-9.13105E0	-9.14207E0	5.14984E-3	9.35316E-2	2.72564E1	-3.26404E1	-3.26032E1	2.68144E1	2.15706E-9	2.51443E-3	2.51443E-3	6.34037E-3	2.16689E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.17943E-1	-7.98965E-1	-9.13122E0	-9.14214E0	5.17368E-3	9.35078E-2	2.73297E1	-3.2617E1	-3.25948E1	2.68064E1	2.15987E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.16125E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.17871E-1	-7.99036E-1	-9.13105E0	-9.14185E0	5.10216E-3	9.32693E-2	2.73237E1	-3.26615E1	-3.26975E1	2.68001E1	2.15613E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.17066E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-8.17871E-1	-7.99036E-1	-9.1311E0	-9.14199E0	5.126E-3	9.32217E-2	2.72567E1	-3.27133E1	-3.26213E1	2.68028E1	2.16081E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.16313E-2
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.17847E-1	-7.98941E-1	-9.13112E0	-9.1423E0	5.03063E-3	9.33409E-2	2.73375E1	-3.26837E1	-3.26416E1	2.67926E1	2.15758E-9	2.52134E-3	2.52134E-3	6.32099E-3	2.17402E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.17895E-1	-7.98941E-1	-9.13136E0	-9.14209E0	4.91142E-3	9.34362E-2	2.73249E1	-3.26476E1	-3.26597E1	2.67932E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.17513E-1	-7.9906E-1	-9.1315E0	-9.14187E0	4.86374E-3	9.30548E-2	2.7266E1	-3.26747E1	-3.26585E1	2.6813E1	2.158E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.18201E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.17561E-1	-7.98965E-1	-9.13136E0	-9.14166E0	5.00679E-3	9.32693E-2	2.72835E1	-3.26464E1	-3.2644E1	2.68034E1	2.15238E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.17066E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.1768E-1	-7.98678E-1	-9.13148E0	-9.14202E0	4.93526E-3	9.31501E-2	2.73093E1	-3.26645E1	-3.2626E1	2.68202E1	2.15613E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.1575E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.17561E-1	-7.99012E-1	-9.13134E0	-9.14218E0	5.05447E-3	9.3174E-2	2.72588E1	-3.265E1	-3.26675E1	2.67914E1	2.16081E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.17633E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09379E0	-8.17752E-1	-7.99155E-1	-9.13134E0	-9.1419E0	4.72069E-3	9.34124E-2	2.72997E1	-3.26753E1	-3.26314E1	2.68124E1	2.15613E-9	2.51771E-3	2.51771E-3	6.34588E-3	2.17444E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.17966E-1	-7.99084E-1	-9.13122E0	-9.1418E0	4.95911E-3	9.33647E-2	2.72842E1	-3.26596E1	-3.26231E1	2.68053E1	2.15894E-9	2.51443E-3	2.51443E-3	6.33486E-3	2.16878E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.17633E-1	-7.99108E-1	-9.13117E0	-9.14161E0	4.79221E-3	9.32455E-2	2.72967E1	-3.26885E1	-3.26116E1	2.6822E1	2.15907E-9	2.51919E-3	2.51919E-3	6.33388E-3	2.18011E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.17585E-1	-7.99346E-1	-9.13119E0	-9.14197E0	4.93526E-3	9.32217E-2	2.73057E1	-3.26753E1	-3.26693E1	2.68184E1	2.15987E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.17444E-2