[Scan]
initial_time=2016-01-28T16:25:39
final_time=2016-01-28T16:25:59
ip_count=19
run=1026
dataset=2
scan=98
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08866E-4
ql1_vset=
ql1_vmon=-8.17394E-1
ql1_imon=1.38928E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=2.03897E-9
ql3_vset=
ql3_vmon=-9.13084E0
ql3_imon=7.47108E-10
ql4_vset=
ql4_vmon=-9.14237E0
ql4_imon=-1.30761E-10
mult1=-9.77651E-9
mult2=-2.57888E-9
rf_tmon=-5.71408E-3
rf_agc=3.28409E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=1.69516E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64726E0
bslens_imon=2.48493E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19894E1
lens5a_imon=1.96868E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05036E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53487E1
cs_ef1b_imon=3.09704E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.01908E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05163E1
cs_ea1_imon=1.23905E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43059E0
lens1_imon=2.61221E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64091E1
os_ef1alow_imon=2.97653E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04052E1
cs_ea2_imon=1.39067E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84188E1
cs_ef1a_imon=2.99337E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.25525E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11211E1
os_restr1_imon=4.30066E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15431E1
os_ea1_imon=2.39957E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6381E1
os_ef1bup_imon=3.08918E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25584E0
cs_ionrep_imon=9.56783E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93311E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=2.05361E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=3.2278E-8
tplens_vset=1.4E-1
tplens_vmon=1.60337E0
tplens_imon=-3.19035E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26524E1
iondef3_imon=1.48313E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2641E1
iondef2_imon=1.55464E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02895E2
lens6_imon=2.98297E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=3.96808E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25459E0
ionrepsh_imon=9.38065E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33539E1
lens5b_imon=2.1742E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74875E1
cs_ef2b_imon=3.11613E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.34132E0
os_ea2_imon=-7.04626E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00458E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71202E1
cs_ef2a_imon=3.18013E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06017E0
os_ef2alow_imon=-2.64542E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89523E-1
os_ef2bup_imon=-5.42242E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10724E1
os_restr2_imon=3.38971E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.30902E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01865E1
cs_anode2_imon=2.09291E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72961E1
iondef1_imon=1.0908E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68229E1
iondef4_imon=1.09851E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.3496E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.79384E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1264E0
cs_ionaccel_imon=-1.12594E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.4708E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56418E1
einzel_imon=7.73275E-6
window_vset=0.0E0
window_vmon=1.8329E-1
window_imon=-1.11845E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39043E-4
mask2_vset=0.0E0
mask2_vmon=-1.86325E1
mask2_imon=-7.03025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92674E3
multa_neg_imon=7.07833E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.79756E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.57249E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28068E0
defgridb_imon=6.17612E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3326E1
os_fil1_imon=9.44734E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07142E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61944E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30786E1
cs_fil1_imon=9.23189E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32256E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6424E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.29098E-2
os_fil2_imon=-2.66874E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80988E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.28447E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3503E-1
cs_fil2_imon=-2.7623E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32335E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22114E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28592E-3
inlet_lpb_pmon=2.18104E-2
chamber_ion_pmon=2.15533E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.06167E-1
res40_imon=-2.50321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=181
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.178E-1	-7.98631E-1	-9.13129E0	-9.14183E0	4.93526E-3	9.32455E-2	2.72793E1	-3.26753E1	-3.26182E1	2.68028E1	2.15685E-9	2.52066E-3	2.52066E-3	6.30171E-3	2.1703E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09634E0	-8.1768E-1	-7.98845E-1	-9.13129E0	-9.14221E0	4.57764E-3	9.28164E-2	2.73051E1	-3.26302E1	-3.262E1	2.6795E1	2.158E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.17822E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0965E0	-8.17513E-1	-7.99108E-1	-9.13115E0	-9.1424E0	4.88758E-3	9.3174E-2	2.73063E1	-3.26619E1	-3.26642E1	2.68076E1	2.15613E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.18011E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.1749E-1	-7.98988E-1	-9.13117E0	-9.14187E0	4.95911E-3	9.31501E-2	2.731E1	-3.26842E1	-3.26376E1	2.68178E1	2.15997E-9	2.52236E-3	2.52236E-3	6.30212E-3	2.171E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.17442E-1	-7.99274E-1	-9.13119E0	-9.14197E0	5.17368E-3	9.32932E-2	2.73028E1	-3.26561E1	-3.25826E1	2.68124E1	2.15613E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.1575E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.17633E-1	-7.9906E-1	-9.13134E0	-9.14216E0	5.19753E-3	9.33409E-2	2.73082E1	-3.26585E1	-3.26064E1	2.6807E1	2.16085E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.16806E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.17513E-1	-7.98893E-1	-9.13081E0	-9.14204E0	5.126E-3	9.35316E-2	2.72668E1	-3.2649E1	-3.26927E1	2.68142E1	2.15696E-9	2.51915E-3	2.51915E-3	6.31858E-3	2.17337E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.17537E-1	-7.98726E-1	-9.13098E0	-9.14237E0	5.38826E-3	9.31025E-2	2.72937E1	-3.26639E1	-3.262E1	2.68136E1	2.15808E-9	2.53246E-3	2.53246E-3	6.31817E-3	2.18477E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.1749E-1	-7.98845E-1	-9.13115E0	-9.14202E0	5.50747E-3	9.31501E-2	2.72935E1	-3.26468E1	-3.26046E1	2.68472E1	2.15051E-9	2.52428E-3	2.52428E-3	6.34037E-3	2.15938E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.17251E-1	-7.98726E-1	-9.13129E0	-9.14197E0	5.34058E-3	9.35316E-2	2.72886E1	-3.26443E1	-3.26549E1	2.68196E1	2.15519E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.16689E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.17466E-1	-7.98726E-1	-9.13134E0	-9.14185E0	5.17368E-3	9.32932E-2	2.72947E1	-3.26358E1	-3.25146E1	2.67986E1	2.15987E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.17444E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.1737E-1	-7.98821E-1	-9.13122E0	-9.14207E0	5.14984E-3	9.31501E-2	2.72594E1	-3.26512E1	-3.27846E1	2.681E1	2.15696E-9	2.51581E-3	2.51581E-3	6.32418E-3	2.17337E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.17561E-1	-7.98917E-1	-9.13131E0	-9.14211E0	4.93526E-3	9.32217E-2	2.73094E1	-3.26383E1	-3.26242E1	2.67914E1	2.15894E-9	2.52757E-3	2.52757E-3	6.33486E-3	2.16125E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.17347E-1	-7.98821E-1	-9.13122E0	-9.14207E0	5.126E-3	9.3174E-2	2.72883E1	-3.26702E1	-3.26171E1	2.68322E1	2.15519E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.16689E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09657E0	-8.17513E-1	-7.98702E-1	-9.1316E0	-9.14221E0	5.07832E-3	9.32217E-2	2.73045E1	-3.2675E1	-3.25586E1	2.68296E1	2.15647E-9	2.51886E-3	2.51886E-3	6.2815E-3	2.16491E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09704E0	-8.1768E-1	-7.98774E-1	-9.1311E0	-9.14207E0	4.93526E-3	9.30548E-2	2.72835E1	-3.26717E1	-3.26218E1	2.67998E1	2.15673E-9	2.51874E-3	2.51874E-3	6.32483E-3	2.1751E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.17513E-1	-7.98631E-1	-9.1311E0	-9.14223E0	4.81606E-3	9.29594E-2	2.72702E1	-3.26482E1	-3.27185E1	2.6807E1	2.15987E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.16125E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09665E0	-8.1737E-1	-7.98869E-1	-9.13105E0	-9.14204E0	4.8399E-3	9.30786E-2	2.72915E1	-3.26714E1	-3.26301E1	2.67675E1	2.15613E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.16125E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.17394E-1	-7.98702E-1	-9.131E0	-9.1423E0	4.95911E-3	9.29832E-2	2.73508E1	-3.26741E1	-3.25894E1	2.68141E1	2.16177E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.17547E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.17394E-1	-7.98559E-1	-9.13084E0	-9.14237E0	5.126E-3	9.31025E-2	2.72961E1	-3.2641E1	-3.26524E1	2.68229E1	2.15533E-9	2.51954E-3	2.51954E-3	6.28592E-3	2.18104E-2