[Scan]
initial_time=2016-01-28T16:26:06
final_time=2016-01-28T16:26:25
ip_count=19
run=1026
dataset=2
scan=99
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08857E-4
ql1_vset=
ql1_vmon=-8.17299E-1
ql1_imon=1.38992E-8
ql2_vset=
ql2_vmon=-7.99036E-1
ql2_imon=1.95135E-9
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=7.32553E-10
ql4_vset=
ql4_vmon=-9.14164E0
ql4_imon=-1.1102E-10
mult1=-9.19856E-9
mult2=-2.6727E-9
rf_tmon=-5.88832E-3
rf_agc=3.22641E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=1.6969E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62963E0
bslens_imon=2.47795E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2007E1
lens5a_imon=1.96774E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05039E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53509E1
cs_ef1b_imon=3.10727E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02071E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05166E1
cs_ea1_imon=1.24709E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39355E0
lens1_imon=2.51612E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64582E1
os_ef1alow_imon=2.96598E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04078E1
cs_ea2_imon=1.41007E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84206E1
cs_ef1a_imon=3.01035E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.25983E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11584E1
os_restr1_imon=4.30726E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15249E1
os_ea1_imon=2.39181E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.07146E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29345E0
cs_ionrep_imon=9.57377E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93244E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01958E1
cs_anode1_imon=2.06453E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.21624E-8
tplens_vset=1.4E-1
tplens_vmon=1.6109E0
tplens_imon=-2.81745E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25719E1
iondef3_imon=1.49863E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2644E1
iondef2_imon=1.5723E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.98331E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=3.9893E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24383E0
ionrepsh_imon=9.43254E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33531E1
lens5b_imon=2.16737E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74618E1
cs_ef2b_imon=3.10921E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.33671E0
os_ea2_imon=-7.28335E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00516E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71232E1
cs_ef2a_imon=3.19095E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0591E0
os_ef2alow_imon=-2.85246E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.32796E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11091E1
os_restr2_imon=3.39491E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.29432E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01802E1
cs_anode2_imon=2.09488E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72474E1
iondef1_imon=1.11044E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68047E1
iondef4_imon=1.07472E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.32529E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.82214E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1029E0
cs_ionaccel_imon=-1.05034E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47059E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56061E1
einzel_imon=7.76569E-6
window_vset=0.0E0
window_vmon=1.55595E-1
window_imon=-1.12429E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39049E-4
mask2_vset=0.0E0
mask2_vmon=-1.86363E1
mask2_imon=-5.52124E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.8065E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93688E3
defgrida_imon=6.40947E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.08127E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3982E0
defgridb_imon=6.12701E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3325E1
os_fil1_imon=9.45391E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07388E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6193E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30729E1
cs_fil1_imon=9.22595E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.3309E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64756E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37187E-2
os_fil2_imon=-2.7885E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9017E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.41951E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34266E-1
cs_fil2_imon=-2.6912E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28542E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22106E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28552E-3
inlet_lpb_pmon=2.17066E-2
chamber_ion_pmon=2.15706E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.3214E-1
res40_imon=-2.44377E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.17728E-1	-7.99012E-1	-9.1311E0	-9.14185E0	5.05447E-3	9.36031E-2	2.72579E1	-3.26791E1	-3.26396E1	2.68036E1	2.15864E-9	2.51911E-3	2.51911E-3	6.33112E-3	2.18421E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.17871E-1	-7.99012E-1	-9.13129E0	-9.1419E0	5.29289E-3	9.36031E-2	2.73297E1	-3.26621E1	-3.25557E1	2.67995E1	2.15817E-9	2.52448E-3	2.52448E-3	6.31269E-3	2.171E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.17513E-1	-7.98965E-1	-9.13141E0	-9.14204E0	5.14984E-3	9.35316E-2	2.73028E1	-3.26851E1	-3.27372E1	2.68082E1	2.15887E-9	2.52809E-3	2.52809E-3	6.31299E-3	2.17529E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.17633E-1	-7.99513E-1	-9.13136E0	-9.14192E0	5.29289E-3	9.36747E-2	2.73105E1	-3.26392E1	-3.26026E1	2.6813E1	2.15907E-9	2.51814E-3	2.51814E-3	6.3074E-3	2.16736E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.17704E-1	-7.99274E-1	-9.13129E0	-9.14183E0	4.95911E-3	9.34124E-2	2.72727E1	-3.26705E1	-3.26567E1	2.68028E1	2.15624E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.16621E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.17776E-1	-7.99298E-1	-9.13117E0	-9.14156E0	5.126E-3	9.33886E-2	2.73057E1	-3.26416E1	-3.26026E1	2.68186E1	2.15987E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.16313E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.1768E-1	-7.99179E-1	-9.13143E0	-9.14218E0	5.05447E-3	9.35793E-2	2.73287E1	-3.26366E1	-3.25942E1	2.68052E1	2.15505E-9	2.51915E-3	2.51915E-3	6.30182E-3	2.17529E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.1768E-1	-7.99036E-1	-9.13119E0	-9.1423E0	5.29289E-3	9.35316E-2	2.72672E1	-3.26753E1	-3.26506E1	2.68196E1	2.15624E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.16067E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.17776E-1	-7.98893E-1	-9.1311E0	-9.14197E0	5.19753E-3	9.34601E-2	2.73279E1	-3.26116E1	-3.26807E1	2.68058E1	2.15425E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.17255E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.17704E-1	-7.98941E-1	-9.13129E0	-9.14204E0	5.36442E-3	9.35555E-2	2.73015E1	-3.26524E1	-3.25311E1	2.68082E1	2.16175E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.16689E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.17633E-1	-7.98798E-1	-9.13136E0	-9.14195E0	5.60284E-3	9.35078E-2	2.73198E1	-3.26531E1	-3.27157E1	2.6813E1	2.15894E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.17633E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.17752E-1	-7.99274E-1	-9.13165E0	-9.1418E0	5.26905E-3	9.34839E-2	2.7236E1	-3.26579E1	-3.25816E1	2.67845E1	2.159E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.16621E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.17657E-1	-7.99108E-1	-9.13155E0	-9.14197E0	5.24521E-3	9.34124E-2	2.72931E1	-3.26561E1	-3.26885E1	2.67896E1	2.15716E-9	2.51632E-3	2.51632E-3	6.33436E-3	2.18663E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.17728E-1	-7.99298E-1	-9.13138E0	-9.14202E0	5.126E-3	9.31978E-2	2.72632E1	-3.26431E1	-3.27033E1	2.6813E1	2.15894E-9	2.5188E-3	2.5188E-3	6.34037E-3	2.1575E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.17585E-1	-7.99155E-1	-9.13122E0	-9.14164E0	5.24521E-3	9.3317E-2	2.72841E1	-3.26675E1	-3.25749E1	2.67908E1	2.15613E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.17066E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.17657E-1	-7.99203E-1	-9.13129E0	-9.1419E0	5.14984E-3	9.35316E-2	2.73051E1	-3.26314E1	-3.25323E1	2.67926E1	2.16081E-9	2.52867E-3	2.52867E-3	6.30192E-3	2.16878E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.178E-1	-7.99012E-1	-9.13129E0	-9.14178E0	5.14984E-3	9.33647E-2	2.73111E1	-3.26675E1	-3.25599E1	2.6813E1	2.15987E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.1877E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.17776E-1	-7.9937E-1	-9.13131E0	-9.14171E0	5.07832E-3	9.33409E-2	2.73093E1	-3.26669E1	-3.26536E1	2.67968E1	2.158E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.17444E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.17537E-1	-7.99227E-1	-9.13112E0	-9.1418E0	5.53131E-3	9.32932E-2	2.72915E1	-3.26667E1	-3.27629E1	2.67998E1	2.16085E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.17732E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.17299E-1	-7.99036E-1	-9.13122E0	-9.14164E0	5.24521E-3	9.34601E-2	2.72474E1	-3.2644E1	-3.25719E1	2.68047E1	2.15706E-9	2.52099E-3	2.52099E-3	6.28552E-3	2.17066E-2