[Scan]
initial_time=2016-01-28T16:26:32
final_time=2016-01-28T16:26:52
ip_count=19
run=1026
dataset=2
scan=100
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-8.17752E-1
ql1_imon=1.3925E-8
ql2_vset=
ql2_vmon=-7.98774E-1
ql2_imon=2.00294E-9
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=7.0039E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-1.03283E-10
mult1=-9.94144E-9
mult2=-2.62227E-9
rf_tmon=-4.27062E-3
rf_agc=3.37079E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=1.68535E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66975E0
bslens_imon=2.35921E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19907E1
lens5a_imon=1.97094E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05022E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53808E1
cs_ef1b_imon=3.11425E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04583E2
lens23_imon=1.02071E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05159E1
cs_ea1_imon=1.24784E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40088E0
lens1_imon=2.76624E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.97009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03814E1
cs_ea2_imon=1.41348E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=3.0018E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.24647E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=4.29779E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15199E1
os_ea1_imon=2.38009E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63539E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24561E0
cs_ionrep_imon=9.82382E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93204E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=2.04999E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=3.22064E-8
tplens_vset=1.4E-1
tplens_vmon=1.62138E0
tplens_imon=-1.82087E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25109E1
iondef3_imon=1.49064E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2694E1
iondef2_imon=1.58798E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98385E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.96569E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21375E0
ionrepsh_imon=9.34246E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33569E1
lens5b_imon=2.16844E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7476E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.34294E0
os_ea2_imon=-8.40417E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00743E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.76006E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99827E-1
os_ef2bup_imon=-5.35852E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11033E1
os_restr2_imon=3.38887E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.27486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.10153E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.09989E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6789E1
iondef4_imon=1.08161E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.30702E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.76708E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13915E0
cs_ionaccel_imon=-1.14188E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56207E1
einzel_imon=7.50764E-6
window_vset=0.0E0
window_vmon=1.59078E-1
window_imon=-9.86907E-7
mask1_vset=-4.8E2
mask1_vmon=-4.826E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86416E1
mask2_imon=-6.15698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92672E3
multa_neg_imon=7.58338E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.31627E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50077E3
multb_neg_imon=6.98522E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.15751E0
defgridb_imon=6.28087E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33254E1
os_fil1_imon=9.44643E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07059E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61741E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30822E1
cs_fil1_imon=9.22652E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33407E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64892E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.50917E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.41757E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.53382E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14222E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22164E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.16067E-2
chamber_ion_pmon=2.15624E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.50282E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.17442E-1	-7.98941E-1	-9.13115E0	-9.14214E0	5.29289E-3	9.28879E-2	2.73249E1	-3.26579E1	-3.25089E1	2.68082E1	2.15987E-9	2.52647E-3	2.52647E-3	6.30192E-3	2.17822E-2
2.0E0	5.0E0	0.0E0	3.16E2	1.6E2	-2.09611E0	-8.17466E-1	-7.99203E-1	-9.13134E0	-9.1423E0	5.29289E-3	9.34601E-2	2.72702E1	-3.26861E1	-3.24247E1	2.67938E1	2.15519E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.17444E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.17704E-1	-7.98869E-1	-9.13129E0	-9.14211E0	5.17368E-3	9.37223E-2	2.73193E1	-3.2688E1	-3.24715E1	2.68059E1	2.15613E-9	2.51662E-3	2.51662E-3	6.28006E-3	2.17822E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.17776E-1	-7.98965E-1	-9.13136E0	-9.14223E0	4.91142E-3	9.3317E-2	2.72799E1	-3.26362E1	-3.26002E1	2.6774E1	2.15624E-9	2.52707E-3	2.52707E-3	6.31817E-3	2.17361E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.17633E-1	-7.99084E-1	-9.13138E0	-9.14228E0	5.07832E-3	9.32217E-2	2.72871E1	-3.26681E1	-3.26897E1	2.67992E1	2.15519E-9	2.52538E-3	2.52538E-3	6.30192E-3	2.1839E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.17657E-1	-7.98917E-1	-9.13141E0	-9.14214E0	5.31673E-3	9.32217E-2	2.73135E1	-3.26567E1	-3.27612E1	2.68226E1	2.16085E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.17361E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.17871E-1	-7.98965E-1	-9.13141E0	-9.14204E0	5.22137E-3	9.32217E-2	2.72853E1	-3.2647E1	-3.26807E1	2.68213E1	2.15409E-9	2.52139E-3	2.52139E-3	6.29067E-3	2.18688E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.17728E-1	-7.99084E-1	-9.13138E0	-9.14209E0	5.22137E-3	9.33886E-2	2.73297E1	-3.26783E1	-3.25635E1	2.68151E1	2.15613E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.17444E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.17704E-1	-7.99227E-1	-9.13105E0	-9.14235E0	5.24521E-3	9.30548E-2	2.72496E1	-3.2662E1	-3.27204E1	2.6795E1	2.15519E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.17633E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.17657E-1	-7.99108E-1	-9.13115E0	-9.14235E0	5.26905E-3	9.34839E-2	2.73544E1	-3.26464E1	-3.25767E1	2.68082E1	2.16085E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.17176E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.17633E-1	-7.98821E-1	-9.131E0	-9.1424E0	4.95911E-3	9.35078E-2	2.73222E1	-3.2652E1	-3.25098E1	2.68117E1	2.15706E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.16313E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.1749E-1	-7.98941E-1	-9.13124E0	-9.14216E0	5.19753E-3	9.38654E-2	2.73315E1	-3.26561E1	-3.26987E1	2.68148E1	2.15726E-9	2.52236E-3	2.52236E-3	6.32328E-3	2.16555E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.1768E-1	-7.99131E-1	-9.131E0	-9.14192E0	5.26905E-3	9.32932E-2	2.72892E1	-3.26767E1	-3.2593E1	2.68154E1	2.15791E-9	2.51693E-3	2.51693E-3	6.3074E-3	2.18301E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.1768E-1	-7.99084E-1	-9.131E0	-9.14185E0	5.34058E-3	9.33409E-2	2.73177E1	-3.26771E1	-3.27372E1	2.68088E1	2.15441E-9	2.52707E-3	2.52707E-3	6.30202E-3	2.17732E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.17275E-1	-7.98941E-1	-9.13112E0	-9.14218E0	5.36442E-3	9.34124E-2	2.73255E1	-3.26386E1	-3.25864E1	2.6813E1	2.15808E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.17547E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.17418E-1	-7.98845E-1	-9.13098E0	-9.14187E0	5.48363E-3	9.3317E-2	2.72943E1	-3.26627E1	-3.26915E1	2.68004E1	2.15696E-9	2.51804E-3	2.51804E-3	6.33538E-3	2.17145E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09634E0	-8.17299E-1	-7.9906E-1	-9.1311E0	-9.14207E0	5.03063E-3	9.35793E-2	2.73075E1	-3.26543E1	-3.2638E1	2.67998E1	2.159E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.1885E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09642E0	-8.17585E-1	-7.98845E-1	-9.13107E0	-9.14185E0	5.126E-3	9.35555E-2	2.73364E1	-3.26461E1	-3.26413E1	2.68016E1	2.15696E-9	2.5225E-3	2.5225E-3	6.31299E-3	2.17145E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.17728E-1	-7.99274E-1	-9.131E0	-9.14187E0	4.76837E-3	9.31978E-2	2.72968E1	-3.26903E1	-3.2616E1	2.68076E1	2.15533E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.17547E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.17752E-1	-7.98774E-1	-9.13115E0	-9.14187E0	5.10216E-3	9.33886E-2	2.73069E1	-3.2694E1	-3.25109E1	2.6789E1	2.15624E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.16067E-2