[Scan]
initial_time=2016-01-28T16:26:59
final_time=2016-01-28T16:27:18
ip_count=19
run=1026
dataset=2
scan=101
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08789E-4
ql1_vset=
ql1_vmon=-8.17275E-1
ql1_imon=1.39342E-8
ql2_vset=
ql2_vmon=-7.9906E-1
ql2_imon=1.97575E-9
ql3_vset=
ql3_vmon=-9.13098E0
ql3_imon=6.76978E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-1.15192E-10
mult1=-9.19856E-9
mult2=-2.7226E-9
rf_tmon=-4.59654E-3
rf_agc=3.26607E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=1.69996E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65088E0
bslens_imon=2.47459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19804E1
lens5a_imon=1.9726E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05069E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53663E1
cs_ef1b_imon=3.09462E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02218E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05014E1
cs_ea1_imon=1.24377E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42447E0
lens1_imon=2.59529E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6436E1
os_ef1alow_imon=2.96832E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03969E1
cs_ea2_imon=1.39717E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84166E1
cs_ef1a_imon=3.00605E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.25452E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11441E1
os_restr1_imon=4.29289E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15215E1
os_ea1_imon=2.4071E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63195E1
os_ef1bup_imon=3.0835E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25404E0
cs_ionrep_imon=9.60332E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93331E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01954E1
cs_anode1_imon=2.05324E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=3.21522E-8
tplens_vset=1.4E-1
tplens_vmon=1.6038E0
tplens_imon=-4.96032E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27053E1
iondef3_imon=1.48165E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26903E1
iondef2_imon=1.58599E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98307E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=3.9325E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28195E0
ionrepsh_imon=9.45537E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33775E1
lens5b_imon=2.18791E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7474E1
cs_ef2b_imon=3.13354E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37279E0
os_ea2_imon=-6.907E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.0056E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71278E1
cs_ef2a_imon=3.17564E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04628E0
os_ef2alow_imon=-2.61082E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.7911E-1
os_ef2bup_imon=-5.43472E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1072E1
os_restr2_imon=3.38773E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.30395E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.09812E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73093E1
iondef1_imon=1.09543E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.0893E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=6.34679E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.78733E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10035E0
cs_ionaccel_imon=-1.18101E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47389E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56173E1
einzel_imon=7.525E-6
window_vset=0.0E0
window_vmon=1.76314E-1
window_imon=-9.18873E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.38997E-4
mask2_vset=0.0E0
mask2_vmon=-1.86311E1
mask2_imon=-7.5206E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.41525E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.6872E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.22059E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37101E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33228E1
os_fil1_imon=9.4248E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07336E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61856E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30826E1
cs_fil1_imon=9.22144E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.3287E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64595E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4142E-2
os_fil2_imon=-2.78255E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91732E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.22445E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3486E-1
cs_fil2_imon=-2.5641E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0303E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22074E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28592E-3
inlet_lpb_pmon=2.17547E-2
chamber_ion_pmon=2.16085E-9
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.53249E-1
res40_imon=-2.46387E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.17537E-1	-7.9875E-1	-9.13136E0	-9.14199E0	5.126E-3	9.32932E-2	2.73181E1	-3.26832E1	-3.27475E1	2.68082E1	2.15855E-9	2.5207E-3	2.5207E-3	6.33767E-3	2.16451E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.17633E-1	-7.98893E-1	-9.13136E0	-9.14185E0	5.14984E-3	9.34124E-2	2.72949E1	-3.2653E1	-3.259E1	2.68004E1	2.15257E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.15883E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.178E-1	-7.99179E-1	-9.13134E0	-9.14185E0	5.26905E-3	9.32932E-2	2.73207E1	-3.26669E1	-3.26206E1	2.68088E1	2.15519E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.16501E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09665E0	-8.17513E-1	-7.98965E-1	-9.13129E0	-9.14178E0	5.126E-3	9.34601E-2	2.73617E1	-3.2616E1	-3.26148E1	2.68082E1	2.16085E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.18104E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.17609E-1	-7.99012E-1	-9.13105E0	-9.14202E0	5.26905E-3	9.33886E-2	2.73195E1	-3.2647E1	-3.26609E1	2.68213E1	2.15533E-9	2.51417E-3	2.51417E-3	6.32896E-3	2.17176E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-8.17394E-1	-7.98917E-1	-9.13129E0	-9.1419E0	5.36442E-3	9.34601E-2	2.72546E1	-3.26681E1	-3.259E1	2.6818E1	2.15696E-9	2.52921E-3	2.52921E-3	6.32978E-3	2.15612E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.1749E-1	-7.99274E-1	-9.131E0	-9.14154E0	5.03063E-3	9.3317E-2	2.73039E1	-3.26512E1	-3.26633E1	2.6813E1	2.15808E-9	2.52815E-3	2.52815E-3	6.32356E-3	2.16252E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.1737E-1	-7.98869E-1	-9.1311E0	-9.14209E0	5.05447E-3	9.31025E-2	2.73279E1	-3.26248E1	-3.25329E1	2.6801E1	2.158E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.17255E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.17275E-1	-7.98869E-1	-9.13131E0	-9.1418E0	5.29289E-3	9.32932E-2	2.72444E1	-3.26524E1	-3.26945E1	2.6804E1	2.15894E-9	2.5199E-3	2.5199E-3	6.34588E-3	2.18011E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09665E0	-8.17537E-1	-7.98774E-1	-9.13124E0	-9.14197E0	5.34058E-3	9.31025E-2	2.73287E1	-3.26579E1	-3.25257E1	2.68232E1	2.15519E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.17444E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.17347E-1	-7.98607E-1	-9.13107E0	-9.14211E0	5.38826E-3	9.29832E-2	2.72793E1	-3.26873E1	-3.26536E1	2.68202E1	2.15894E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.17633E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.17275E-1	-7.98774E-1	-9.13117E0	-9.14187E0	5.07832E-3	9.32217E-2	2.73165E1	-3.26332E1	-3.25263E1	2.68046E1	2.16081E-9	2.5199E-3	2.5199E-3	6.29098E-3	2.16125E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.17728E-1	-7.98965E-1	-9.13138E0	-9.14199E0	5.55515E-3	9.29356E-2	2.72809E1	-3.26573E1	-3.26944E1	2.68022E1	2.15441E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.17361E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.17537E-1	-7.98726E-1	-9.13112E0	-9.14204E0	5.29289E-3	9.31263E-2	2.73093E1	-3.26464E1	-3.25311E1	2.67926E1	2.15987E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.18201E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.17633E-1	-7.98845E-1	-9.13126E0	-9.14202E0	5.14984E-3	9.3174E-2	2.7278E1	-3.26685E1	-3.2695E1	2.68064E1	2.15425E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.1839E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.17299E-1	-7.9875E-1	-9.13126E0	-9.14176E0	5.26905E-3	9.30548E-2	2.73198E1	-3.26572E1	-3.27466E1	2.67577E1	2.15441E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.17732E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.1737E-1	-7.98655E-1	-9.13136E0	-9.1419E0	5.55515E-3	9.30071E-2	2.73081E1	-3.26897E1	-3.26645E1	2.68094E1	2.15409E-9	2.52362E-3	2.52362E-3	6.31299E-3	2.17337E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09665E0	-8.17108E-1	-7.9906E-1	-9.13134E0	-9.14185E0	5.76973E-3	9.29594E-2	2.72685E1	-3.26626E1	-3.26844E1	2.67926E1	2.15613E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.15938E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09627E0	-8.17251E-1	-7.98845E-1	-9.13112E0	-9.14204E0	5.50747E-3	9.32932E-2	2.73452E1	-3.26366E1	-3.24933E1	2.6807E1	2.15455E-9	2.51603E-3	2.51603E-3	6.31269E-3	2.18011E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.17275E-1	-7.9906E-1	-9.13098E0	-9.14204E0	5.4121E-3	9.34601E-2	2.73093E1	-3.26903E1	-3.27053E1	2.67926E1	2.16085E-9	2.52492E-3	2.52492E-3	6.28592E-3	2.17547E-2