[Scan]
initial_time=2016-01-28T16:27:26
final_time=2016-01-28T16:27:45
ip_count=19
run=1026
dataset=2
scan=102
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08887E-4
ql1_vset=
ql1_vmon=-8.1687E-1
ql1_imon=1.39485E-8
ql2_vset=
ql2_vmon=-7.98965E-1
ql2_imon=1.97843E-9
ql3_vset=
ql3_vmon=-9.13177E0
ql3_imon=6.6433E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-1.3442E-10
mult1=-9.89692E-9
mult2=-2.65873E-9
rf_tmon=-4.3502E-3
rf_agc=3.39104E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=1.68464E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6379E0
bslens_imon=2.34839E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19988E1
lens5a_imon=1.99272E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.04847E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=3.12253E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.01978E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05037E1
cs_ea1_imon=1.23132E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41357E0
lens1_imon=2.60183E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.96973E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03721E1
cs_ea2_imon=1.42341E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=3.01766E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.24972E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11075E1
os_restr1_imon=4.27761E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15287E1
os_ea1_imon=2.42613E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63876E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22149E0
cs_ionrep_imon=9.52538E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93332E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=2.04603E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.21706E-8
tplens_vset=1.4E-1
tplens_vmon=1.62919E0
tplens_imon=-3.87973E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25046E1
iondef3_imon=1.48769E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.5696E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98136E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=3.90289E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2423E0
ionrepsh_imon=9.22419E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33468E1
lens5b_imon=2.16131E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7482E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.34086E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06055E2
lens4b_imon=2.00513E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.18524E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0882E0
os_ef2alow_imon=-2.6123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8481E-1
os_ef2bup_imon=-5.45943E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.39391E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.30589E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01665E1
cs_anode2_imon=2.09865E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72967E1
iondef1_imon=1.0664E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68134E1
iondef4_imon=1.08053E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=6.30662E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.79342E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12714E0
cs_ionaccel_imon=-1.1671E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47334E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=1.6088E-1
window_imon=-1.17792E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39041E-4
mask2_vset=0.0E0
mask2_vmon=-1.86536E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.33261E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.46946E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50104E3
multb_neg_imon=7.37301E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40661E0
defgridb_imon=6.05075E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33218E1
os_fil1_imon=9.38936E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07167E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61996E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30785E1
cs_fil1_imon=9.22466E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.24096E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6393E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.43654E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.08755E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3742E-1
cs_fil2_imon=-2.6059E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.83939E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2198E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.17361E-2
chamber_ion_pmon=2.15533E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.62896E-1
res40_imon=-2.45372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09696E0	-8.17204E-1	-7.99155E-1	-9.13098E0	-9.14199E0	5.60284E-3	9.3317E-2	2.72544E1	-3.26762E1	-3.26815E1	2.6816E1	2.15894E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.1839E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09642E0	-8.1737E-1	-7.98655E-1	-9.13093E0	-9.14197E0	5.62668E-3	9.32455E-2	2.73029E1	-3.26747E1	-3.27625E1	2.67948E1	2.15706E-9	2.52209E-3	2.52209E-3	6.34037E-3	2.1858E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09665E0	-8.17537E-1	-7.98821E-1	-9.1311E0	-9.1419E0	5.50747E-3	9.3174E-2	2.72797E1	-3.26915E1	-3.26139E1	2.67738E1	2.15483E-9	2.51447E-3	2.51447E-3	6.32273E-3	2.17659E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.17251E-1	-7.98392E-1	-9.13134E0	-9.14171E0	5.55515E-3	9.33409E-2	2.73448E1	-3.26452E1	-3.2462E1	2.68046E1	2.15772E-9	2.52454E-3	2.52454E-3	6.31902E-3	2.17711E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.17299E-1	-7.98798E-1	-9.13122E0	-9.14187E0	5.14984E-3	9.31978E-2	2.72721E1	-3.26585E1	-3.2495E1	2.67949E1	2.15425E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.16689E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.17442E-1	-7.98726E-1	-9.13117E0	-9.14197E0	4.98295E-3	9.3317E-2	2.73387E1	-3.26639E1	-3.25455E1	2.68328E1	2.15894E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.16125E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.17728E-1	-7.98702E-1	-9.13138E0	-9.1419E0	4.88758E-3	9.31025E-2	2.72624E1	-3.26651E1	-3.27029E1	2.68113E1	2.15624E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.16806E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.17585E-1	-7.98631E-1	-9.13165E0	-9.1419E0	5.05447E-3	9.32693E-2	2.72877E1	-3.26903E1	-3.26693E1	2.6818E1	2.15887E-9	2.51915E-3	2.51915E-3	6.32978E-3	2.17722E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.17394E-1	-7.98845E-1	-9.13181E0	-9.14192E0	5.24521E-3	9.33886E-2	2.73128E1	-3.26573E1	-3.25304E1	2.67938E1	2.15533E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.17361E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.17633E-1	-7.98321E-1	-9.13136E0	-9.1418E0	4.74453E-3	9.35555E-2	2.73177E1	-3.26747E1	-3.26663E1	2.6804E1	2.158E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.1858E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.17275E-1	-7.98535E-1	-9.13107E0	-9.14192E0	4.88758E-3	9.35078E-2	2.73275E1	-3.26543E1	-3.26455E1	2.681E1	2.15613E-9	2.51771E-3	2.51771E-3	6.28552E-3	2.16313E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.17323E-1	-7.98655E-1	-9.13103E0	-9.14207E0	5.00679E-3	9.3317E-2	2.73171E1	-3.26729E1	-3.25948E1	2.68047E1	2.15624E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.16436E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.17299E-1	-7.98726E-1	-9.13084E0	-9.14171E0	4.76837E-3	9.34124E-2	2.73027E1	-3.26526E1	-3.26968E1	2.67956E1	2.15706E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.17066E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09379E0	-8.17323E-1	-7.98607E-1	-9.13088E0	-9.14168E0	4.98295E-3	9.3174E-2	2.73159E1	-3.26506E1	-3.2599E1	2.68076E1	2.15726E-9	2.52131E-3	2.52131E-3	6.33388E-3	2.15831E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.17513E-1	-7.98726E-1	-9.1315E0	-9.14187E0	5.126E-3	9.32693E-2	2.73237E1	-3.26356E1	-3.25809E1	2.68088E1	2.15795E-9	2.51787E-3	2.51787E-3	6.30187E-3	2.17391E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.17513E-1	-7.99084E-1	-9.13136E0	-9.14216E0	5.24521E-3	9.32217E-2	2.72829E1	-3.26741E1	-3.26759E1	2.68244E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.17418E-1	-7.99179E-1	-9.13146E0	-9.14214E0	5.22137E-3	9.35793E-2	2.72991E1	-3.26152E1	-3.25858E1	2.6813E1	2.15613E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.18201E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16965E-1	-7.98965E-1	-9.13105E0	-9.14216E0	5.26905E-3	9.32693E-2	2.72467E1	-3.26679E1	-3.26874E1	2.68111E1	2.15624E-9	2.52492E-3	2.52492E-3	6.32896E-3	2.16621E-2
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.16989E-1	-7.98965E-1	-9.13119E0	-9.14235E0	5.126E-3	9.35555E-2	2.72987E1	-3.26451E1	-3.26202E1	2.68196E1	2.15073E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.17176E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.1687E-1	-7.98965E-1	-9.13177E0	-9.14202E0	5.05447E-3	9.3174E-2	2.72967E1	-3.26573E1	-3.25046E1	2.68134E1	2.15533E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.17361E-2