[Scan]
initial_time=2016-01-28T16:27:52
final_time=2016-01-28T16:28:12
ip_count=19
run=1026
dataset=2
scan=103
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.0884E-4
ql1_vset=
ql1_vmon=-8.17609E-1
ql1_imon=1.39278E-8
ql2_vset=
ql2_vmon=-7.98917E-1
ql2_imon=2.03507E-9
ql3_vset=
ql3_vmon=-9.13105E0
ql3_imon=6.28078E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-1.43921E-10
mult1=-9.31897E-9
mult2=-2.66272E-9
rf_tmon=-4.72271E-3
rf_agc=3.33696E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=1.65341E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64852E0
bslens_imon=2.41938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20167E1
lens5a_imon=1.98085E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12443E2
lens4a_imon=2.04824E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54139E1
cs_ef1b_imon=3.09623E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04905E1
cs_ea1_imon=1.23934E-5
lens1_vset=-5.0E0
lens1_vmon=-5.46399E0
lens1_imon=2.56449E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64038E1
os_ef1alow_imon=2.96432E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03537E1
cs_ea2_imon=1.41136E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=3.0036E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.25176E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11484E1
os_restr1_imon=4.29923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15376E1
os_ea1_imon=2.42292E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.0591E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24502E0
cs_ionrep_imon=9.66455E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91858E2
cs_nozzle_imon=1.93494E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=2.05216E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.21374E-8
tplens_vset=1.4E-1
tplens_vmon=1.5907E0
tplens_imon=-3.34315E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.27173E1
iondef3_imon=1.47507E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26434E1
iondef2_imon=1.56568E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98268E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=3.95362E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26213E0
ionrepsh_imon=9.44864E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.17021E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.11893E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37539E0
os_ea2_imon=-5.74961E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00417E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.18668E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06056E0
os_ef2alow_imon=-2.60148E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84209E-1
os_ef2bup_imon=-5.4306E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10997E1
os_restr2_imon=3.39499E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23009E2
cs_ionfoca_imon=6.30034E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.09721E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73502E1
iondef1_imon=1.07865E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68004E1
iondef4_imon=1.08341E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.3027E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.77397E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12233E0
cs_ionaccel_imon=-1.15269E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56171E1
einzel_imon=7.62657E-6
window_vset=0.0E0
window_vmon=1.77098E-1
window_imon=-1.1671E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.86182E1
mask2_imon=-7.13005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=8.40806E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.51094E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50058E3
multb_neg_imon=7.75681E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28744E0
defgridb_imon=6.26672E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3323E1
os_fil1_imon=9.4257E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07191E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6173E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3079E1
cs_fil1_imon=9.2452E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31424E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64352E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42053E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.36442E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.2395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22046E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29067E-3
inlet_lpb_pmon=2.17145E-2
chamber_ion_pmon=2.15696E-9
chamber_cvt_pmon=2.51136E-3
foreline_cvt_pmon=2.51136E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.77912E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.1706E-1	-7.99108E-1	-9.13103E0	-9.14192E0	5.07832E-3	9.34839E-2	2.72921E1	-3.26762E1	-3.27009E1	2.68557E1	2.15808E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.17732E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.17466E-1	-7.98988E-1	-9.13146E0	-9.14226E0	5.26905E-3	9.37223E-2	2.73241E1	-3.26487E1	-3.27117E1	2.6782E1	2.15365E-9	2.51814E-3	2.51814E-3	6.31798E-3	2.16555E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.17657E-1	-7.99227E-1	-9.13131E0	-9.14204E0	4.95911E-3	9.31501E-2	2.72819E1	-3.26718E1	-3.25692E1	2.68256E1	2.15696E-9	2.51804E-3	2.51804E-3	6.33538E-3	2.17145E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.17585E-1	-7.98941E-1	-9.13129E0	-9.14199E0	4.62532E-3	9.32693E-2	2.72841E1	-3.26452E1	-3.25305E1	2.68298E1	2.15636E-9	2.52236E-3	2.52236E-3	6.31798E-3	2.15831E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.17418E-1	-7.98988E-1	-9.13126E0	-9.14211E0	4.95911E-3	9.31978E-2	2.73057E1	-3.26783E1	-3.2474E1	2.6777E1	2.15145E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.17633E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.1718E-1	-7.99036E-1	-9.13153E0	-9.14178E0	5.17368E-3	9.32455E-2	2.72986E1	-3.26579E1	-3.26502E1	2.68124E1	2.15613E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.17822E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16846E-1	-7.98702E-1	-9.13119E0	-9.14216E0	4.43459E-3	9.33647E-2	2.72817E1	-3.26591E1	-3.26579E1	2.68215E1	2.15519E-9	2.52977E-3	2.52977E-3	6.29098E-3	2.17444E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.17251E-1	-7.9875E-1	-9.13112E0	-9.14192E0	4.88758E-3	9.33647E-2	2.73267E1	-3.26687E1	-3.27522E1	2.67995E1	2.15349E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.17918E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.17037E-1	-7.99084E-1	-9.13143E0	-9.14202E0	4.64916E-3	9.34362E-2	2.72943E1	-3.26579E1	-3.27107E1	2.6792E1	2.15505E-9	2.52139E-3	2.52139E-3	6.29067E-3	2.16952E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.17227E-1	-7.99322E-1	-9.13103E0	-9.14161E0	4.88758E-3	9.31263E-2	2.72823E1	-3.26549E1	-3.26699E1	2.67884E1	2.15519E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.16689E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.17347E-1	-7.98917E-1	-9.13103E0	-9.14178E0	4.74453E-3	9.31501E-2	2.72732E1	-3.26815E1	-3.26012E1	2.67992E1	2.15257E-9	2.51417E-3	2.51417E-3	6.31278E-3	2.16621E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.1749E-1	-7.98488E-1	-9.13122E0	-9.14195E0	4.52995E-3	9.3174E-2	2.72588E1	-3.26458E1	-3.26164E1	2.68202E1	2.15613E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.1575E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.17347E-1	-7.9875E-1	-9.131E0	-9.14176E0	4.81606E-3	9.31978E-2	2.72931E1	-3.26422E1	-3.25647E1	2.68226E1	2.158E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.17255E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.17561E-1	-7.98821E-1	-9.13115E0	-9.14176E0	4.76837E-3	9.32932E-2	2.72318E1	-3.26777E1	-3.27137E1	2.68148E1	2.15716E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.17547E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.17609E-1	-7.98416E-1	-9.13119E0	-9.14176E0	4.72069E-3	9.32932E-2	2.7288E1	-3.26726E1	-3.2547E1	2.68076E1	2.15706E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.17822E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.1718E-1	-7.99036E-1	-9.13122E0	-9.14187E0	4.74453E-3	9.29594E-2	2.73314E1	-3.26621E1	-3.28084E1	2.67872E1	2.15894E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.1858E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.17513E-1	-7.98774E-1	-9.13134E0	-9.14204E0	4.69685E-3	9.31025E-2	2.72791E1	-3.26661E1	-3.27564E1	2.68215E1	2.15519E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.17066E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.17895E-1	-7.98917E-1	-9.13129E0	-9.14187E0	4.95911E-3	9.30309E-2	2.73759E1	-3.2652E1	-3.26614E1	2.68316E1	2.15441E-9	2.53031E-3	2.53031E-3	6.3074E-3	2.16436E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.1768E-1	-7.98988E-1	-9.13134E0	-9.14204E0	4.72069E-3	9.31501E-2	2.72757E1	-3.26452E1	-3.25395E1	2.68334E1	2.15716E-9	2.52815E-3	2.52815E-3	6.31817E-3	2.18104E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.17609E-1	-7.98917E-1	-9.13105E0	-9.1419E0	4.79221E-3	9.30548E-2	2.73502E1	-3.26434E1	-3.27173E1	2.68004E1	2.15696E-9	2.51136E-3	2.51136E-3	6.29067E-3	2.17145E-2