[Scan]
initial_time=2016-01-28T16:28:19
final_time=2016-01-28T16:28:38
ip_count=19
run=1026
dataset=2
scan=104
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08823E-4
ql1_vset=
ql1_vmon=-8.17132E-1
ql1_imon=1.39201E-8
ql2_vset=
ql2_vmon=-7.98845E-1
ql2_imon=1.95819E-9
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=6.33729E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-1.1245E-10
mult1=-9.80059E-9
mult2=-2.69067E-9
rf_tmon=-5.45572E-3
rf_agc=3.33696E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=1.71585E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66831E0
bslens_imon=2.07812E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19815E1
lens5a_imon=1.9878E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.04922E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53833E1
cs_ef1b_imon=3.10454E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02267E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0513E1
cs_ea1_imon=1.22252E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39554E0
lens1_imon=2.81218E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64952E1
os_ef1alow_imon=2.97026E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04028E1
cs_ea2_imon=1.40502E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8442E1
cs_ef1a_imon=3.00373E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.24373E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11214E1
os_restr1_imon=4.30843E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15131E1
os_ea1_imon=2.42824E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63862E1
os_ef1bup_imon=3.08547E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2548E0
cs_ionrep_imon=9.51604E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9185E2
cs_nozzle_imon=1.93485E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01997E1
cs_anode1_imon=2.05207E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=3.20441E-8
tplens_vset=1.4E-1
tplens_vmon=1.62791E0
tplens_imon=-4.48501E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26386E1
iondef3_imon=1.51736E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26717E1
iondef2_imon=1.56197E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.9863E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.9555E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27778E0
ionrepsh_imon=9.19971E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33672E1
lens5b_imon=2.20478E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74638E1
cs_ef2b_imon=3.12478E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35484E0
os_ea2_imon=-8.7028E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00631E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71284E1
cs_ef2a_imon=3.18472E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08635E0
os_ef2alow_imon=-2.65396E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79044E-1
os_ef2bup_imon=-5.45251E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11065E1
os_restr2_imon=3.39296E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22998E2
cs_ionfoca_imon=6.2786E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.10384E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7263E1
iondef1_imon=1.09679E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.09262E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.31E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.73801E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12625E0
cs_ionaccel_imon=-1.0698E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.473E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55925E1
einzel_imon=7.61389E-6
window_vset=0.0E0
window_vmon=1.69218E-1
window_imon=-1.08537E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86351E1
mask2_imon=-6.96139E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92701E3
multa_neg_imon=7.67887E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.44192E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50067E3
multb_neg_imon=7.54098E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.17449E0
defgridb_imon=6.29997E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33253E1
os_fil1_imon=9.43062E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07414E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61675E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30757E1
cs_fil1_imon=9.25048E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.22905E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6455E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35907E-2
os_fil2_imon=-2.76904E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92116E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.35519E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34546E-1
cs_fil2_imon=-2.67173E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.41516E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22014E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.18477E-2
chamber_ion_pmon=2.15624E-9
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.7181E-1
res40_imon=-2.5333E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.17299E-1	-7.98893E-1	-9.13115E0	-9.14187E0	5.126E-3	9.31501E-2	2.72367E1	-3.26437E1	-3.24461E1	2.67896E1	2.15752E-9	2.5207E-3	2.5207E-3	6.33161E-3	2.17074E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.17585E-1	-7.98798E-1	-9.1311E0	-9.14202E0	5.17368E-3	9.31978E-2	2.73865E1	-3.26536E1	-3.24093E1	2.67962E1	2.15624E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.17918E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.17609E-1	-7.98941E-1	-9.13105E0	-9.14226E0	5.24521E-3	9.3174E-2	2.73086E1	-3.26057E1	-3.24592E1	2.67908E1	2.15696E-9	2.52362E-3	2.52362E-3	6.3074E-3	2.15803E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.17585E-1	-7.99155E-1	-9.13129E0	-9.14214E0	5.126E-3	9.31501E-2	2.72981E1	-3.26411E1	-3.25918E1	2.67974E1	2.15907E-9	2.52448E-3	2.52448E-3	6.33388E-3	2.16918E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.17633E-1	-7.99012E-1	-9.13119E0	-9.14204E0	5.05447E-3	9.29356E-2	2.73314E1	-3.26438E1	-3.27056E1	2.68166E1	2.15992E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.17361E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.17132E-1	-7.98941E-1	-9.13107E0	-9.14223E0	4.79221E-3	9.31978E-2	2.73141E1	-3.26482E1	-3.27372E1	2.67944E1	2.156E-9	2.52027E-3	2.52027E-3	6.32418E-3	2.16952E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.17037E-1	-7.9875E-1	-9.13088E0	-9.14218E0	5.126E-3	9.3317E-2	2.73175E1	-3.26626E1	-3.24744E1	2.68314E1	2.15808E-9	2.52276E-3	2.52276E-3	6.33977E-3	2.17732E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.17227E-1	-7.98845E-1	-9.13091E0	-9.14207E0	5.24521E-3	9.32455E-2	2.72817E1	-3.26332E1	-3.26801E1	2.67974E1	2.15349E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.17732E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.17275E-1	-7.99036E-1	-9.13138E0	-9.14221E0	4.88758E-3	9.32693E-2	2.73564E1	-3.26343E1	-3.25328E1	2.6822E1	2.15519E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.17633E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.17394E-1	-7.99131E-1	-9.13126E0	-9.14221E0	5.17368E-3	9.30071E-2	2.72935E1	-3.26863E1	-3.26299E1	2.68005E1	2.158E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.1858E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.17108E-1	-7.98845E-1	-9.1311E0	-9.14209E0	4.72069E-3	9.32932E-2	2.72692E1	-3.26712E1	-3.25837E1	2.68123E1	2.15911E-9	2.52454E-3	2.52454E-3	6.32134E-3	2.1747E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.17084E-1	-7.99012E-1	-9.13093E0	-9.1418E0	4.74453E-3	9.32217E-2	2.72853E1	-3.26579E1	-3.26152E1	2.6804E1	2.15907E-9	2.51814E-3	2.51814E-3	6.3445E-3	2.1856E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16965E-1	-7.98774E-1	-9.13122E0	-9.14202E0	4.98295E-3	9.33886E-2	2.72909E1	-3.26744E1	-3.26638E1	2.68267E1	2.158E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.17822E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.16917E-1	-7.98774E-1	-9.13117E0	-9.14195E0	5.29289E-3	9.33886E-2	2.73204E1	-3.26561E1	-3.26113E1	2.68154E1	2.15992E-9	2.52276E-3	2.52276E-3	6.28592E-3	2.17732E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.1687E-1	-7.98941E-1	-9.13112E0	-9.14202E0	5.03063E-3	9.33647E-2	2.72847E1	-3.26801E1	-3.26945E1	2.6813E1	2.158E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.17633E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16822E-1	-7.99155E-1	-9.13124E0	-9.14216E0	5.05447E-3	9.3317E-2	2.73147E1	-3.26561E1	-3.25803E1	2.6819E1	2.16085E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.16806E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.16917E-1	-7.98869E-1	-9.13141E0	-9.14209E0	5.17368E-3	9.34124E-2	2.73128E1	-3.26543E1	-3.26868E1	2.68047E1	2.15145E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.15938E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.1687E-1	-7.98678E-1	-9.13138E0	-9.14199E0	5.19753E-3	9.32932E-2	2.72659E1	-3.26719E1	-3.25146E1	2.67689E1	2.15808E-9	2.52276E-3	2.52276E-3	6.30202E-3	2.15883E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16989E-1	-7.98941E-1	-9.13126E0	-9.14183E0	5.03063E-3	9.31025E-2	2.72992E1	-3.26284E1	-3.26791E1	2.68198E1	2.15696E-9	2.51804E-3	2.51804E-3	6.32418E-3	2.1676E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.17132E-1	-7.98845E-1	-9.13131E0	-9.14187E0	5.07832E-3	9.32693E-2	2.7263E1	-3.26717E1	-3.26386E1	2.6801E1	2.15624E-9	2.51525E-3	2.51525E-3	6.31817E-3	2.18477E-2