[Scan]
initial_time=2016-01-28T16:28:46
final_time=2016-01-28T16:29:05
ip_count=19
run=1026
dataset=2
scan=105
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.0881E-4
ql1_vset=
ql1_vmon=-8.1737E-1
ql1_imon=1.39215E-8
ql2_vset=
ql2_vmon=-7.98965E-1
ql2_imon=2.00509E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=6.35242E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=-1.2008E-10
mult1=-9.07378E-9
mult2=-2.73306E-9
rf_tmon=-5.63619E-3
rf_agc=3.21765E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.67388E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6449E0
bslens_imon=2.52376E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19923E1
lens5a_imon=1.97652E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.04944E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53781E1
cs_ef1b_imon=3.09715E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02068E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04918E1
cs_ea1_imon=1.25281E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39928E0
lens1_imon=2.48559E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64641E1
os_ef1alow_imon=2.96831E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03856E1
cs_ea2_imon=1.40969E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84219E1
cs_ef1a_imon=3.00918E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.24579E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11117E1
os_restr1_imon=4.29169E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15395E1
os_ea1_imon=2.39524E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63486E1
os_ef1bup_imon=3.07691E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25719E0
cs_ionrep_imon=9.55851E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93386E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01997E1
cs_anode1_imon=2.04818E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.2154E-8
tplens_vset=1.4E-1
tplens_vmon=1.62807E0
tplens_imon=-2.70294E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25723E1
iondef3_imon=1.49787E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2662E1
iondef2_imon=1.57726E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02899E2
lens6_imon=2.98357E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=3.97644E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27436E0
ionrepsh_imon=9.31422E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33544E1
lens5b_imon=2.19447E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74696E1
cs_ef2b_imon=3.12439E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35897E0
os_ea2_imon=-8.5048E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00478E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71277E1
cs_ef2a_imon=3.18122E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07272E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78395E-1
os_ef2bup_imon=-5.38245E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10825E1
os_restr2_imon=3.39608E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2309E2
cs_ionfoca_imon=6.30692E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01835E1
cs_anode2_imon=2.09294E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73293E1
iondef1_imon=1.06578E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6816E1
iondef4_imon=1.07861E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.31421E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.7684E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11003E0
cs_ionaccel_imon=-1.21381E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47234E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56301E1
einzel_imon=7.53604E-6
window_vset=0.0E0
window_vmon=1.64677E-1
window_imon=-9.49137E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39065E-4
mask2_vset=0.0E0
mask2_vmon=-1.8637E1
mask2_imon=-7.89553E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.18814E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93766E3
defgrida_imon=6.55452E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.13089E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27719E0
defgridb_imon=6.1919E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33249E1
os_fil1_imon=9.41447E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06979E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62075E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30705E1
cs_fil1_imon=9.23523E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30949E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64416E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39918E-2
os_fil2_imon=-2.6912E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.7979E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.18203E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34965E-1
cs_fil2_imon=-2.46415E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.22141E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21973E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35059E-3
inlet_lpb_pmon=2.17176E-2
chamber_ion_pmon=2.15349E-9
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40043E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.21112E-1
res40_imon=-2.49827E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.17204E-1	-7.99298E-1	-9.13112E0	-9.14204E0	4.8399E-3	9.31025E-2	2.72502E1	-3.26343E1	-3.259E1	2.68279E1	2.15574E-9	2.52338E-3	2.52338E-3	6.33648E-3	2.18111E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.1718E-1	-7.98965E-1	-9.13112E0	-9.14199E0	4.74453E-3	9.34124E-2	2.73093E1	-3.26585E1	-3.26206E1	2.68192E1	2.15808E-9	2.52599E-3	2.52599E-3	6.32356E-3	2.17547E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.17299E-1	-7.98798E-1	-9.13093E0	-9.14197E0	4.79221E-3	9.31978E-2	2.73155E1	-3.26272E1	-3.25791E1	2.68259E1	2.15791E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.16952E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.17323E-1	-7.98941E-1	-9.13107E0	-9.14211E0	4.74453E-3	9.32217E-2	2.72793E1	-3.26699E1	-3.27438E1	2.68401E1	2.15546E-9	2.52131E-3	2.52131E-3	6.30212E-3	2.1856E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.17037E-1	-7.98965E-1	-9.13124E0	-9.14202E0	5.22137E-3	9.32217E-2	2.7288E1	-3.26632E1	-3.28089E1	2.6795E1	2.15992E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.16991E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.17084E-1	-7.99036E-1	-9.13124E0	-9.14197E0	5.14984E-3	9.31263E-2	2.73201E1	-3.26549E1	-3.2647E1	2.68064E1	2.15519E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.1839E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09379E0	-8.1687E-1	-7.98965E-1	-9.13088E0	-9.14185E0	5.36442E-3	9.34839E-2	2.73039E1	-3.26431E1	-3.2577E1	2.68094E1	2.15533E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.16252E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.17156E-1	-7.99012E-1	-9.13098E0	-9.14202E0	5.17368E-3	9.34362E-2	2.73159E1	-3.26621E1	-3.26518E1	2.6789E1	2.15349E-9	2.52276E-3	2.52276E-3	6.34518E-3	2.17918E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.17251E-1	-7.99012E-1	-9.131E0	-9.14192E0	5.00679E-3	9.35793E-2	2.72528E1	-3.26446E1	-3.27576E1	2.68076E1	2.15706E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.17822E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.17275E-1	-7.98869E-1	-9.131E0	-9.14218E0	5.17368E-3	9.32932E-2	2.73122E1	-3.2659E1	-3.25564E1	2.68214E1	2.16081E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.17444E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.17204E-1	-7.98917E-1	-9.13112E0	-9.14226E0	5.14984E-3	9.31501E-2	2.73016E1	-3.26815E1	-3.27098E1	2.68123E1	2.159E-9	2.51203E-3	2.51203E-3	6.31817E-3	2.1829E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.1718E-1	-7.98869E-1	-9.13124E0	-9.14195E0	5.17368E-3	9.3317E-2	2.73016E1	-3.26544E1	-3.26422E1	2.68076E1	2.158E-9	2.52647E-3	2.52647E-3	6.31837E-3	2.17633E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.17394E-1	-7.98845E-1	-9.13119E0	-9.14204E0	5.26905E-3	9.33409E-2	2.73331E1	-3.26464E1	-3.25325E1	2.68101E1	2.15365E-9	2.51814E-3	2.51814E-3	6.29684E-3	2.17464E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.17442E-1	-7.98821E-1	-9.13122E0	-9.14192E0	4.93526E-3	9.31978E-2	2.72898E1	-3.26602E1	-3.26136E1	2.68088E1	2.15409E-9	2.51971E-3	2.51971E-3	6.30182E-3	2.1676E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.17442E-1	-7.98965E-1	-9.13129E0	-9.1419E0	4.86374E-3	9.3317E-2	2.73177E1	-3.26567E1	-3.26404E1	2.67926E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.17108E-1	-7.99108E-1	-9.13153E0	-9.1419E0	5.22137E-3	9.3317E-2	2.73269E1	-3.26437E1	-3.28183E1	2.68172E1	2.15441E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.17547E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.16917E-1	-7.98798E-1	-9.13134E0	-9.14187E0	5.05447E-3	9.30309E-2	2.7257E1	-3.26777E1	-3.27275E1	2.6786E1	2.158E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.1858E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.17108E-1	-7.98917E-1	-9.13146E0	-9.14192E0	5.03063E-3	9.34124E-2	2.73424E1	-3.26807E1	-3.26597E1	2.68058E1	2.158E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.16878E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.17323E-1	-7.98821E-1	-9.13131E0	-9.14207E0	4.76837E-3	9.31978E-2	2.72909E1	-3.26815E1	-3.27351E1	2.68012E1	2.15441E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.15515E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.1737E-1	-7.98965E-1	-9.13136E0	-9.14211E0	4.72069E-3	9.31501E-2	2.73293E1	-3.2662E1	-3.25723E1	2.6816E1	2.15349E-9	2.52169E-3	2.52169E-3	6.35059E-3	2.17176E-2