[Scan]
initial_time=2016-01-28T16:29:12
final_time=2016-01-28T16:29:32
ip_count=19
run=1026
dataset=2
scan=106
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08785E-4
ql1_vset=
ql1_vmon=-8.17108E-1
ql1_imon=1.38922E-8
ql2_vset=
ql2_vmon=-7.99441E-1
ql2_imon=1.98205E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=5.65672E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=-1.08981E-10
mult1=-9.28285E-9
mult2=-2.69067E-9
rf_tmon=-4.86691E-3
rf_agc=3.32134E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=1.69876E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66494E0
bslens_imon=2.32506E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=1.96613E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05205E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53718E1
cs_ef1b_imon=3.09803E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02081E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=1.24658E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44346E0
lens1_imon=2.53415E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.97225E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03943E1
cs_ea2_imon=1.41781E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=3.00793E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.25133E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11316E1
os_restr1_imon=4.29418E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15348E1
os_ea1_imon=2.39548E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21425E0
cs_ionrep_imon=9.65753E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.93543E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=2.04315E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.2155E-8
tplens_vset=1.4E-1
tplens_vmon=1.6162E0
tplens_imon=-4.72384E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25737E1
iondef3_imon=1.50109E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26879E1
iondef2_imon=1.56994E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98461E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=3.97476E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2539E0
ionrepsh_imon=9.15645E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.19685E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37707E0
os_ea2_imon=-8.11249E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00547E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71108E1
cs_ef2a_imon=3.17804E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05696E0
os_ef2alow_imon=-2.77087E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89615E-1
os_ef2bup_imon=-5.4378E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=3.40797E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.29532E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.10622E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.11392E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.07224E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.32261E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=7.7913E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-1.0698E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47194E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56195E1
einzel_imon=7.66261E-6
window_vset=0.0E0
window_vmon=1.77098E-1
window_imon=-1.11305E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82617E2
mask1_imon=2.39062E-4
mask2_vset=0.0E0
mask2_vmon=-1.86254E1
mask2_imon=-6.98589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.7397E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.95382E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=6.96463E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43765E0
defgridb_imon=5.97327E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3325E1
os_fil1_imon=9.40756E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07287E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61949E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30694E1
cs_fil1_imon=9.22977E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32506E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63727E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42194E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88104E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.36969E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.61792E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1182E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21843E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.16067E-2
chamber_ion_pmon=2.15624E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.34665E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.17418E-1	-7.99131E-1	-9.13091E0	-9.14204E0	4.45843E-3	9.3317E-2	2.72825E1	-3.26474E1	-3.24933E1	2.67873E1	2.15238E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.17444E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.1749E-1	-7.99108E-1	-9.1311E0	-9.14156E0	4.72069E-3	9.33647E-2	2.73394E1	-3.26425E1	-3.26083E1	2.67939E1	2.15726E-9	2.51919E-3	2.51919E-3	6.32328E-3	2.17646E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.17132E-1	-7.99179E-1	-9.13134E0	-9.14178E0	5.10216E-3	9.34362E-2	2.72614E1	-3.26561E1	-3.28219E1	2.68117E1	2.1549E-9	2.52407E-3	2.52407E-3	6.3131E-3	2.18208E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.17132E-1	-7.98869E-1	-9.13131E0	-9.14183E0	5.05447E-3	9.35316E-2	2.72821E1	-3.26767E1	-3.2718E1	2.68184E1	2.15636E-9	2.51393E-3	2.51393E-3	6.32328E-3	2.17829E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.17156E-1	-7.9906E-1	-9.13119E0	-9.14214E0	4.72069E-3	9.33647E-2	2.72824E1	-3.26649E1	-3.27028E1	2.68174E1	2.15987E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.16313E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09356E0	-8.17156E-1	-7.99012E-1	-9.13107E0	-9.14168E0	4.79221E-3	9.34124E-2	2.73165E1	-3.26756E1	-3.26146E1	2.67926E1	2.15688E-9	2.52248E-3	2.52248E-3	6.34145E-3	2.15262E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.17442E-1	-7.98941E-1	-9.131E0	-9.14173E0	5.00679E-3	9.32693E-2	2.73271E1	-3.26634E1	-3.26174E1	2.67986E1	2.15762E-9	2.52029E-3	2.52029E-3	6.31332E-3	2.16584E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.17251E-1	-7.98821E-1	-9.1306E0	-9.14199E0	4.95911E-3	9.33647E-2	2.73087E1	-3.26284E1	-3.25311E1	2.68112E1	2.15982E-9	2.52362E-3	2.52362E-3	6.3074E-3	2.18108E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-8.17323E-1	-7.98988E-1	-9.13103E0	-9.14214E0	4.62532E-3	9.31501E-2	2.73063E1	-3.2639E1	-3.27564E1	2.68023E1	2.1534E-9	2.52026E-3	2.52026E-3	6.3074E-3	2.16189E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.17347E-1	-7.99084E-1	-9.13091E0	-9.14183E0	4.76837E-3	9.34839E-2	2.73141E1	-3.26639E1	-3.26705E1	2.68229E1					
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.17251E-1	-7.98965E-1	-9.13119E0	-9.14197E0	4.72069E-3	9.33886E-2	2.72805E1	-3.26927E1	-3.26825E1	2.68124E1	2.15533E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.15883E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09387E0	-8.17442E-1	-7.98655E-1	-9.13124E0	-9.14199E0	4.64916E-3	9.35316E-2	2.73093E1	-3.26446E1	-3.26585E1	2.68082E1	2.15332E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.17822E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.17442E-1	-7.98917E-1	-9.13117E0	-9.14195E0	5.03063E-3	9.34362E-2	2.73051E1	-3.26856E1	-3.26089E1	2.68118E1	2.15706E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.1839E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.17156E-1	-7.99012E-1	-9.131E0	-9.1419E0	5.07832E-3	9.31978E-2	2.72931E1	-3.26933E1	-3.25665E1	2.68112E1	2.159E-9	2.51417E-3	2.51417E-3	6.31817E-3	2.18104E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.17227E-1	-7.99012E-1	-9.1311E0	-9.14197E0	5.05447E-3	9.32217E-2	2.72678E1	-3.26368E1	-3.25179E1	2.68136E1	2.158E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.15938E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.17657E-1	-7.98726E-1	-9.13081E0	-9.14209E0	5.05447E-3	9.3317E-2	2.73141E1	-3.26681E1	-3.2486E1	2.68154E1	2.15519E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.16878E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.17513E-1	-7.99155E-1	-9.1311E0	-9.14218E0	4.79221E-3	9.32932E-2	2.73417E1	-3.26729E1	-3.27263E1	2.68214E1	2.15238E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.16125E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.17156E-1	-7.9906E-1	-9.13122E0	-9.14202E0	5.10216E-3	9.33409E-2	2.72761E1	-3.26567E1	-3.26805E1	2.6796E1	2.158E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.1575E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.17227E-1	-7.9937E-1	-9.131E0	-9.14192E0	5.03063E-3	9.34362E-2	2.73057E1	-3.26482E1	-3.25912E1	2.68136E1	2.15257E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.16436E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.17108E-1	-7.99441E-1	-9.1311E0	-9.14216E0	5.03063E-3	9.3627E-2	2.73375E1	-3.26879E1	-3.25737E1	2.67974E1	2.15624E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.16067E-2