[Scan]
initial_time=2016-01-28T16:30:05
final_time=2016-01-28T16:30:25
ip_count=19
run=1026
dataset=2
scan=108
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08784E-4
ql1_vset=
ql1_vmon=-8.17108E-1
ql1_imon=1.38828E-8
ql2_vset=
ql2_vmon=-7.98941E-1
ql2_imon=2.01303E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=5.33187E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-9.16719E-11
mult1=-9.43017E-9
mult2=-2.7839E-9
rf_tmon=-5.7625E-3
rf_agc=3.18064E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=1.68555E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64108E0
bslens_imon=2.42833E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19561E1
lens5a_imon=1.97003E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.05188E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=3.10376E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0457E2
lens23_imon=1.02174E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05128E1
cs_ea1_imon=1.25663E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40437E0
lens1_imon=2.27565E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64518E1
os_ef1alow_imon=2.97999E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04212E1
cs_ea2_imon=1.42038E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84556E1
cs_ef1a_imon=3.00373E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.25155E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11104E1
os_restr1_imon=4.3092E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14969E1
os_ea1_imon=2.38494E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63862E1
os_ef1bup_imon=3.0699E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22792E0
cs_ionrep_imon=9.94021E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93218E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01951E1
cs_anode1_imon=2.04584E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=3.2128E-8
tplens_vset=1.4E-1
tplens_vmon=1.60072E0
tplens_imon=-2.20673E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25125E1
iondef3_imon=1.46657E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26594E1
iondef2_imon=1.58642E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98285E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=3.96577E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25146E0
ionrepsh_imon=9.17299E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3411E1
lens5b_imon=2.18187E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.748E1
cs_ef2b_imon=3.13218E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35198E0
os_ea2_imon=-8.27578E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00508E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71076E1
cs_ef2a_imon=3.18784E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07597E0
os_ef2alow_imon=-2.64228E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69962E-1
os_ef2bup_imon=-5.4564E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10851E1
os_restr2_imon=3.39063E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.2863E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01932E1
cs_anode2_imon=2.10033E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73013E1
iondef1_imon=1.10013E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67687E1
iondef4_imon=1.08056E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.35717E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=7.7737E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12495E0
cs_ionaccel_imon=-1.17489E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56288E1
einzel_imon=7.43873E-6
window_vset=0.0E0
window_vmon=1.69218E-1
window_imon=-1.13986E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.8626E1
mask2_imon=-5.75478E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92697E3
multa_neg_imon=7.066E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.74155E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50102E3
multb_neg_imon=7.68817E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.09568E0
defgridb_imon=6.24152E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33246E1
os_fil1_imon=9.42076E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0683E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62091E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30687E1
cs_fil1_imon=9.24211E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31403E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64178E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35821E-2
os_fil2_imon=-2.58091E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80439E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.12335E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34546E-1
cs_fil2_imon=-2.21763E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15568E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21891E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31974E-3
inlet_lpb_pmon=2.16102E-2
chamber_ion_pmon=2.1532E-9
chamber_cvt_pmon=2.52113E-3
foreline_cvt_pmon=2.52113E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.0285E-1
res40_imon=-2.54887E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.1737E-1	-7.99131E-1	-9.13153E0	-9.14159E0	4.88758E-3	9.33886E-2	2.72703E1	-3.26431E1	-3.28077E1	2.67972E1	2.15971E-9	2.52454E-3	2.52454E-3	6.31321E-3	2.16911E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.17251E-1	-7.98893E-1	-9.13157E0	-9.14166E0	4.79221E-3	9.3174E-2	2.73151E1	-3.26691E1	-3.28013E1	2.68057E1	2.15716E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.16067E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.17394E-1	-7.98845E-1	-9.13143E0	-9.14173E0	4.93526E-3	9.30309E-2	2.73086E1	-3.2637E1	-3.27784E1	2.68018E1	2.15685E-9	2.52749E-3	2.52749E-3	6.34164E-3	2.16443E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.17299E-1	-7.98893E-1	-9.13119E0	-9.1419E0	4.98295E-3	9.31978E-2	2.73051E1	-3.26915E1	-3.26868E1	2.68322E1	2.15817E-9	2.52025E-3	2.52025E-3	6.31269E-3	2.18011E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.17347E-1	-7.98941E-1	-9.13115E0	-9.1419E0	5.07832E-3	9.29832E-2	2.72564E1	-3.26771E1	-3.26657E1	2.68052E1	2.159E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.17176E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.17251E-1	-7.99036E-1	-9.13117E0	-9.14209E0	5.03063E-3	9.29356E-2	2.73135E1	-3.26615E1	-3.27137E1	2.6813E1	2.15706E-9	2.53087E-3	2.53087E-3	6.31288E-3	2.17822E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.17323E-1	-7.98965E-1	-9.13138E0	-9.14187E0	5.03063E-3	9.30071E-2	2.73297E1	-3.26368E1	-3.26062E1	2.67932E1	2.158E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.17444E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.16989E-1	-7.98726E-1	-9.13153E0	-9.14178E0	5.4121E-3	9.28879E-2	2.73252E1	-3.2649E1	-3.26396E1	2.6825E1	2.15706E-9	2.51771E-3	2.51771E-3	6.34588E-3	2.17444E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.16917E-1	-7.98845E-1	-9.1315E0	-9.14195E0	4.98295E-3	9.32932E-2	2.72829E1	-3.26494E1	-3.26723E1	2.68214E1	2.15624E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.16991E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.16894E-1	-7.98941E-1	-9.13129E0	-9.14192E0	5.126E-3	9.31978E-2	2.72967E1	-3.26549E1	-3.25371E1	2.68262E1	2.15613E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.17255E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.17108E-1	-7.98607E-1	-9.13126E0	-9.14209E0	4.98295E-3	9.3174E-2	2.72937E1	-3.26603E1	-3.27618E1	2.67935E1	2.15987E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.17255E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.17227E-1	-7.99012E-1	-9.13129E0	-9.14214E0	5.07832E-3	9.29356E-2	2.73514E1	-3.26771E1	-3.25894E1	2.68058E1	2.15613E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.18011E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.1706E-1	-7.98607E-1	-9.13129E0	-9.14173E0	5.14984E-3	9.35316E-2	2.73136E1	-3.26846E1	-3.26072E1	2.68065E1	2.15613E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.18201E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09394E0	-8.16965E-1	-7.98559E-1	-9.13141E0	-9.14178E0	4.93526E-3	9.3174E-2	2.7282E1	-3.26597E1	-3.26734E1	2.67814E1	2.15558E-9	2.52197E-3	2.52197E-3	6.3074E-3	2.1667E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.17084E-1	-7.98869E-1	-9.13134E0	-9.14197E0	5.00679E-3	9.3174E-2	2.73051E1	-3.26679E1	-3.25057E1	2.67998E1	2.15977E-9	2.51838E-3	2.51838E-3	6.29603E-3	2.17618E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.17156E-1	-7.98726E-1	-9.13155E0	-9.14178E0	5.24521E-3	9.33409E-2	2.73541E1	-3.26572E1	-3.25942E1	2.68034E1	2.15519E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.15938E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.17132E-1	-7.98702E-1	-9.13148E0	-9.14154E0	5.36442E-3	9.31501E-2	2.72936E1	-3.26444E1	-3.28218E1	2.68064E1	2.15519E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.16313E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.17108E-1	-7.9875E-1	-9.13136E0	-9.14161E0	5.31673E-3	9.30548E-2	2.72769E1	-3.26652E1	-3.27105E1	2.67945E1	2.15586E-9	2.51879E-3	2.51879E-3	6.33406E-3	2.17037E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.17132E-1	-7.98845E-1	-9.13157E0	-9.14154E0	5.126E-3	9.30548E-2	2.72598E1	-3.26841E1	-3.24996E1	2.67797E1	2.15238E-9	2.51334E-3	2.51334E-3	6.31288E-3	2.16689E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.17108E-1	-7.98941E-1	-9.13146E0	-9.14185E0	5.14984E-3	9.3317E-2	2.73013E1	-3.26594E1	-3.25125E1	2.67687E1	2.1532E-9	2.52113E-3	2.52113E-3	6.31974E-3	2.16102E-2