[Scan]
initial_time=2016-01-28T16:30:32
final_time=2016-01-28T16:30:52
ip_count=19
run=1026
dataset=2
scan=109
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08795E-4
ql1_vset=
ql1_vmon=-8.17227E-1
ql1_imon=1.38988E-8
ql2_vset=
ql2_vmon=-7.98774E-1
ql2_imon=1.99648E-9
ql3_vset=
ql3_vmon=-9.13105E0
ql3_imon=6.11103E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-7.52807E-11
mult1=-9.36713E-9
mult2=-2.63677E-9
rf_tmon=-5.3656E-3
rf_agc=3.30993E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=1.67879E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64751E0
bslens_imon=2.60985E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19598E1
lens5a_imon=1.97875E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05035E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53569E1
cs_ef1b_imon=3.09442E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05174E1
cs_ea1_imon=1.25848E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40741E0
lens1_imon=2.46205E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65095E1
os_ef1alow_imon=2.98148E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03636E1
cs_ea2_imon=1.40159E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84446E1
cs_ef1a_imon=2.99851E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.25231E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10961E1
os_restr1_imon=4.29721E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.41098E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63763E1
os_ef1bup_imon=3.08052E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24669E0
cs_ionrep_imon=9.70079E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01798E1
cs_anode1_imon=2.06922E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.2118E-8
tplens_vset=1.4E-1
tplens_vmon=1.6168E0
tplens_imon=-4.29124E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25125E1
iondef3_imon=1.48451E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26717E1
iondef2_imon=1.56273E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.98393E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=3.94859E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28635E0
ionrepsh_imon=9.416E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33814E1
lens5b_imon=2.17594E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.11562E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35424E0
os_ea2_imon=-7.35545E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71182E1
cs_ef2a_imon=3.18617E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09394E0
os_ef2alow_imon=-2.69622E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91439E-1
os_ef2bup_imon=-5.41734E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.39017E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.29207E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01896E1
cs_anode2_imon=2.08347E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.07679E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68364E1
iondef4_imon=1.08086E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.37491E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.75403E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11682E0
cs_ionaccel_imon=-1.13235E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47185E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56208E1
einzel_imon=7.60791E-6
window_vset=0.0E0
window_vmon=1.5571E-1
window_imon=-1.09412E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39126E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-7.36173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=6.97905E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93754E3
defgrida_imon=6.29772E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50179E3
multb_neg_imon=7.28908E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30532E0
defgridb_imon=6.02735E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33216E1
os_fil1_imon=9.437E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06686E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62126E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30642E1
cs_fil1_imon=9.22333E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34185E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64169E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44774E-2
os_fil2_imon=-2.60547E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.93552E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.21244E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32399E-1
cs_fil2_imon=-2.23478E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.72122E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21941E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.17361E-2
chamber_ion_pmon=2.15716E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.43771E-1
res40_imon=-2.55373E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.1706E-1	-7.98869E-1	-9.131E0	-9.14195E0	5.4121E-3	9.3174E-2	2.73263E1	-3.26673E1	-3.28089E1	2.67938E1	2.16081E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.15563E-2
2.0E0	4.0E0	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.17084E-1	-7.99084E-1	-9.13112E0	-9.14195E0	4.98295E-3	9.32217E-2	2.72976E1	-3.26735E1	-3.26561E1	2.68007E1	2.15533E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.16806E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.17204E-1	-7.99012E-1	-9.13112E0	-9.14216E0	4.91142E-3	9.34124E-2	2.72909E1	-3.26579E1	-3.24956E1	2.68146E1	2.15726E-9	2.51919E-3	2.51919E-3	6.32328E-3	2.16918E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.17204E-1	-7.99108E-1	-9.13141E0	-9.14207E0	5.19753E-3	9.31025E-2	2.72642E1	-3.26434E1	-3.27444E1	2.67926E1	2.15619E-9	2.51918E-3	2.51918E-3	6.30197E-3	2.17683E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.17299E-1	-7.99084E-1	-9.13141E0	-9.14218E0	4.91142E-3	9.33886E-2	2.72877E1	-3.26597E1	-3.26188E1	2.68154E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.17013E-1	-7.9906E-1	-9.13179E0	-9.14216E0	5.19753E-3	9.3317E-2	2.73261E1	-3.26176E1	-3.2626E1	2.68106E1	2.15706E-9	2.51552E-3	2.51552E-3	6.29645E-3	2.17255E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.16989E-1	-7.98941E-1	-9.1315E0	-9.14202E0	4.98295E-3	9.34601E-2	2.72839E1	-3.26537E1	-3.26933E1	2.68334E1	2.15894E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.17066E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.16894E-1	-7.98965E-1	-9.13122E0	-9.14223E0	4.95911E-3	9.3317E-2	2.7334E1	-3.26815E1	-3.25829E1	2.68151E1	2.15349E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.15515E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.17156E-1	-7.99084E-1	-9.13138E0	-9.14211E0	5.126E-3	9.3174E-2	2.72585E1	-3.26071E1	-3.25759E1	2.68034E1	2.15073E-9	2.52384E-3	2.52384E-3	6.34518E-3	2.17732E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.17275E-1	-7.9875E-1	-9.13193E0	-9.14195E0	4.64916E-3	9.34362E-2	2.72805E1	-3.26699E1	-3.276E1	2.68286E1	2.15624E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.17547E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.17132E-1	-7.99155E-1	-9.13165E0	-9.14171E0	4.673E-3	9.3317E-2	2.73784E1	-3.26993E1	-3.27924E1	2.68082E1	2.15238E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.1839E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09294E0	-8.17251E-1	-7.99298E-1	-9.13148E0	-9.14192E0	5.24521E-3	9.3317E-2	2.72609E1	-3.26419E1	-3.27694E1	2.68163E1	2.15665E-9	2.51484E-3	2.51484E-3	6.32371E-3	2.18152E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09309E0	-8.17275E-1	-7.98845E-1	-9.13134E0	-9.14171E0	5.03063E-3	9.29832E-2	2.73111E1	-3.26783E1	-3.2653E1	2.68226E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09248E0	-8.17108E-1	-7.98988E-1	-9.13155E0	-9.14199E0	4.93526E-3	9.32217E-2	2.72751E1	-3.26837E1	-3.2638E1	2.68046E1	2.15706E-9	2.52099E-3	2.52099E-3	6.29098E-3	2.17633E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09356E0	-8.16965E-1	-7.98893E-1	-9.1315E0	-9.14204E0	4.98295E-3	9.32217E-2	2.73099E1	-3.26344E1	-3.25743E1	2.6813E1	2.15145E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.17066E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09356E0	-8.1718E-1	-7.98965E-1	-9.13131E0	-9.14228E0	4.86374E-3	9.30071E-2	2.72868E1	-3.26809E1	-3.26449E1	2.68016E1	2.15716E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.17547E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.17251E-1	-7.98941E-1	-9.13131E0	-9.14233E0	5.22137E-3	9.3174E-2	2.73069E1	-3.26646E1	-3.27264E1	2.67914E1	2.15425E-9	2.52757E-3	2.52757E-3	6.33486E-3	2.17066E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.17037E-1	-7.98845E-1	-9.13129E0	-9.14199E0	4.98295E-3	9.31501E-2	2.72744E1	-3.2652E1	-3.26815E1	2.68142E1	2.15124E-9	2.51915E-3	2.51915E-3	6.30182E-3	2.17529E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.17037E-1	-7.98798E-1	-9.13141E0	-9.14199E0	5.10216E-3	9.32455E-2	2.7324E1	-3.26472E1	-3.24455E1	2.67613E1	2.15533E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.17176E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.17227E-1	-7.98774E-1	-9.13105E0	-9.14199E0	4.98295E-3	9.31501E-2	2.73069E1	-3.26717E1	-3.25125E1	2.68364E1	2.15716E-9	2.51739E-3	2.51739E-3	6.33436E-3	2.17361E-2