[Scan]
initial_time=2016-01-28T16:30:59
final_time=2016-01-28T16:31:18
ip_count=19
run=1026
dataset=2
scan=110
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08827E-4
ql1_vset=
ql1_vmon=-8.17466E-1
ql1_imon=1.39014E-8
ql2_vset=
ql2_vmon=-7.98726E-1
ql2_imon=1.9924E-9
ql3_vset=
ql3_vmon=-9.13174E0
ql3_imon=5.74446E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-1.03831E-10
mult1=-9.20236E-9
mult2=-2.65453E-9
rf_tmon=-3.24026E-3
rf_agc=3.45036E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.62741E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63326E0
bslens_imon=2.59425E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19912E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.0506E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53541E1
cs_ef1b_imon=3.11272E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04915E1
cs_ea1_imon=1.24269E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44407E0
lens1_imon=2.55055E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64874E1
os_ef1alow_imon=2.97337E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0371E1
cs_ea2_imon=1.39724E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=3.00801E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.25107E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11389E1
os_restr1_imon=4.30259E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15319E1
os_ea1_imon=2.40792E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63564E1
os_ef1bup_imon=3.07029E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23422E0
cs_ionrep_imon=9.40364E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93293E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01776E1
cs_anode1_imon=2.04818E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.22192E-8
tplens_vset=1.4E-1
tplens_vmon=1.63746E0
tplens_imon=-3.73431E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26522E1
iondef3_imon=1.50649E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26937E1
iondef2_imon=1.56648E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98493E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=3.98309E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29977E0
ionrepsh_imon=9.34802E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33327E1
lens5b_imon=2.16717E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74586E1
cs_ef2b_imon=3.124E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37923E0
os_ea2_imon=-7.46875E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00496E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71219E1
cs_ef2a_imon=3.18667E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0604E0
os_ef2alow_imon=-2.66563E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8099E-1
os_ef2bup_imon=-5.51868E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10857E1
os_restr2_imon=3.38401E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.28935E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01997E1
cs_anode2_imon=2.08944E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7288E1
iondef1_imon=1.07862E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68111E1
iondef4_imon=1.07121E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.34447E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.79345E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13403E0
cs_ionaccel_imon=-1.14764E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47253E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56444E1
einzel_imon=7.59442E-6
window_vset=0.0E0
window_vmon=1.47161E-1
window_imon=-9.95844E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39026E-4
mask2_vset=0.0E0
mask2_vmon=-1.86565E1
mask2_imon=-7.19492E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92585E3
multa_neg_imon=7.34176E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.54322E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50162E3
multb_neg_imon=7.01201E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37253E0
defgridb_imon=6.01484E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33261E1
os_fil1_imon=9.42745E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07394E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62086E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30644E1
cs_fil1_imon=9.23186E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.37306E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64131E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18821E-2
os_fil2_imon=-2.56145E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91467E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.03137E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34406E-1
cs_fil2_imon=-2.61984E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21957E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.18201E-2
chamber_ion_pmon=2.15987E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40078E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.1602E-1
res40_imon=-2.61114E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=181
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09627E0	-8.16917E-1	-7.99274E-1	-9.13126E0	-9.14185E0	4.74453E-3	9.29117E-2	2.73526E1	-3.26648E1	-3.27123E1	2.6795E1	2.15661E-9	2.52502E-3	2.52502E-3	6.27788E-3	2.17195E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.17132E-1	-7.99274E-1	-9.13136E0	-9.14176E0	4.95911E-3	9.3174E-2	2.73027E1	-3.2664E1	-3.25385E1	2.68436E1	2.15441E-9	2.51525E-3	2.51525E-3	6.30202E-3	2.17361E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.17013E-1	-7.98941E-1	-9.13136E0	-9.14192E0	5.22137E-3	9.31025E-2	2.72945E1	-3.26526E1	-3.26938E1	2.68094E1	2.15519E-9	2.51935E-3	2.51935E-3	6.31837E-3	2.17444E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.17013E-1	-7.98869E-1	-9.13112E0	-9.14187E0	5.38826E-3	9.31025E-2	2.72721E1	-3.26543E1	-3.26531E1	2.6807E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.1687E-1	-7.9875E-1	-9.13119E0	-9.14185E0	5.24521E-3	9.32455E-2	2.72276E1	-3.26855E1	-3.26044E1	2.68178E1	2.15441E-9	2.51525E-3	2.51525E-3	6.31278E-3	2.16621E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-8.16894E-1	-7.98607E-1	-9.13153E0	-9.14197E0	5.17368E-3	9.31263E-2	2.73159E1	-3.26452E1	-3.25473E1	2.67878E1	2.15613E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.17444E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.16774E-1	-7.9844E-1	-9.13184E0	-9.14195E0	5.34058E-3	9.32932E-2	2.73003E1	-3.26633E1	-3.25924E1	2.68124E1	2.15519E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.17633E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16965E-1	-7.98535E-1	-9.13205E0	-9.14199E0	5.19753E-3	9.29594E-2	2.73086E1	-3.2662E1	-3.27617E1	2.6794E1	2.15706E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.1858E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.17156E-1	-7.98607E-1	-9.13172E0	-9.14202E0	4.74453E-3	9.3174E-2	2.72953E1	-3.26652E1	-3.26346E1	2.67984E1	2.15808E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.17361E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-8.17013E-1	-7.98488E-1	-9.13167E0	-9.14216E0	4.8399E-3	9.32932E-2	2.73027E1	-3.26729E1	-3.26164E1	2.68016E1	2.15505E-9	2.52139E-3	2.52139E-3	6.34099E-3	2.16377E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.17084E-1	-7.98273E-1	-9.13157E0	-9.14187E0	4.95911E-3	9.33647E-2	2.72809E1	-3.26803E1	-3.24756E1	2.68347E1	2.15894E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.16313E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.17108E-1	-7.98821E-1	-9.13134E0	-9.14168E0	5.10216E-3	9.35316E-2	2.72922E1	-3.26542E1	-3.27129E1	2.67672E1	2.15808E-9	2.5131E-3	2.5131E-3	6.31278E-3	2.16991E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.17275E-1	-7.98678E-1	-9.13122E0	-9.14216E0	4.69685E-3	9.34362E-2	2.73069E1	-3.26508E1	-3.25187E1	2.6796E1	2.15505E-9	2.51915E-3	2.51915E-3	6.3074E-3	2.18494E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.17156E-1	-7.98941E-1	-9.13129E0	-9.14204E0	4.76837E-3	9.31978E-2	2.73523E1	-3.27039E1	-3.27157E1	2.68484E1	2.15624E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.18104E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.17323E-1	-7.98845E-1	-9.13157E0	-9.1419E0	4.8399E-3	9.33647E-2	2.73375E1	-3.26719E1	-3.26138E1	2.6816E1	2.15441E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.17547E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.17466E-1	-7.98774E-1	-9.1316E0	-9.14166E0	4.8399E-3	9.31501E-2	2.73139E1	-3.26797E1	-3.25971E1	2.6828E1	2.15696E-9	2.52362E-3	2.52362E-3	6.31858E-3	2.18301E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.17227E-1	-7.99084E-1	-9.13167E0	-9.14176E0	5.05447E-3	9.35316E-2	2.72991E1	-3.2653E1	-3.26603E1	2.68064E1	2.15257E-9	2.51417E-3	2.51417E-3	6.31817E-3	2.17732E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.17347E-1	-7.98535E-1	-9.1316E0	-9.14185E0	5.03063E-3	9.30786E-2	2.7311E1	-3.26602E1	-3.25623E1	2.6797E1	2.15987E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.19151E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.17537E-1	-7.98845E-1	-9.13186E0	-9.14159E0	5.17368E-3	9.32217E-2	2.72871E1	-3.26789E1	-3.25635E1	2.67905E1	2.159E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.17732E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.17466E-1	-7.98726E-1	-9.13174E0	-9.14199E0	4.62532E-3	9.31978E-2	2.7288E1	-3.26937E1	-3.26522E1	2.68111E1	2.15987E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.18201E-2