[Scan]
initial_time=2016-01-28T16:31:52
final_time=2016-01-28T16:32:12
ip_count=19
run=1026
dataset=2
scan=112
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.16703E-1
ql1_imon=1.38705E-8
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=1.94719E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=5.64921E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-1.04284E-10
mult1=-9.29489E-9
mult2=-2.71462E-9
rf_tmon=-4.95704E-3
rf_agc=3.29731E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=1.71037E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64451E0
bslens_imon=2.55578E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20373E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.04967E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53508E1
cs_ef1b_imon=3.11244E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.01937E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04772E1
cs_ea1_imon=1.25559E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44286E0
lens1_imon=2.33227E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.96612E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03576E1
cs_ea2_imon=1.42322E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84256E1
cs_ef1a_imon=3.00577E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.25865E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.2931E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15336E1
os_ea1_imon=2.41206E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63833E1
os_ef1bup_imon=3.07352E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24729E0
cs_ionrep_imon=9.90267E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=2.06873E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.22172E-8
tplens_vset=1.4E-1
tplens_vmon=1.62641E0
tplens_imon=-1.44333E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25191E1
iondef3_imon=1.48379E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26404E1
iondef2_imon=1.5685E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98202E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=3.92076E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24909E0
ionrepsh_imon=9.38716E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33892E1
lens5b_imon=2.18387E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.11821E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3957E0
os_ea2_imon=-8.76138E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00291E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7133E1
cs_ef2a_imon=3.18668E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0894E0
os_ef2alow_imon=-2.73843E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.97424E-1
os_ef2bup_imon=-5.42339E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=3.39716E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23009E2
cs_ionfoca_imon=6.31118E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.09901E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72937E1
iondef1_imon=1.0739E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68022E1
iondef4_imon=1.07764E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=6.36431E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.83117E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-1.05178E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47363E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56195E1
einzel_imon=7.54729E-6
window_vset=0.0E0
window_vmon=1.6929E-1
window_imon=-1.05899E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86494E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=8.41022E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93689E3
defgrida_imon=6.32295E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=6.69787E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38653E0
defgridb_imon=6.10305E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33238E1
os_fil1_imon=9.45712E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07221E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62138E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30623E1
cs_fil1_imon=9.23373E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32806E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64216E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37035E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.13123E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.5999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17826E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2182E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.16689E-2
chamber_ion_pmon=2.15706E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.67101E-1
res40_imon=-2.42129E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.17299E-1	-7.98583E-1	-9.13143E0	-9.14228E0	5.00679E-3	9.34839E-2	2.72909E1	-3.26673E1	-3.28631E1	2.67908E1	2.15613E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.18201E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.17299E-1	-7.98678E-1	-9.13134E0	-9.14218E0	5.00679E-3	9.34601E-2	2.73027E1	-3.2656E1	-3.26774E1	2.68038E1	2.15808E-9	2.52707E-3	2.52707E-3	6.32896E-3	2.16806E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.17418E-1	-7.98726E-1	-9.13131E0	-9.14214E0	4.93526E-3	9.32455E-2	2.72945E1	-3.26461E1	-3.25039E1	2.67885E1	2.156E-9	2.5147E-3	2.5147E-3	6.32418E-3	2.17145E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.17251E-1	-7.98965E-1	-9.13146E0	-9.14202E0	5.05447E-3	9.33886E-2	2.7311E1	-3.26461E1	-3.25346E1	2.68124E1	2.15726E-9	2.51919E-3	2.51919E-3	6.29684E-3	2.17829E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.17347E-1	-7.99036E-1	-9.1315E0	-9.14207E0	4.95911E-3	9.32693E-2	2.73285E1	-3.26549E1	-3.25569E1	2.68046E1	2.16175E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.1839E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.17323E-1	-7.98655E-1	-9.1316E0	-9.14192E0	5.19753E-3	9.34124E-2	2.73016E1	-3.26417E1	-3.26451E1	2.68012E1	2.15257E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.17918E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.16965E-1	-7.98845E-1	-9.13136E0	-9.14173E0	4.95911E-3	9.35078E-2	2.7291E1	-3.26578E1	-3.27013E1	2.68064E1	2.15992E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.16991E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.17013E-1	-7.98655E-1	-9.13146E0	-9.14187E0	4.8399E-3	9.3174E-2	2.72727E1	-3.26434E1	-3.26284E1	2.68325E1	2.156E-9	2.52139E-3	2.52139E-3	6.31858E-3	2.17529E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.16989E-1	-7.98798E-1	-9.13136E0	-9.14185E0	5.05447E-3	9.31025E-2	2.72973E1	-3.26663E1	-3.26621E1	2.68111E1	2.15706E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.17822E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16894E-1	-7.9844E-1	-9.13162E0	-9.14185E0	4.93526E-3	9.30071E-2	2.73454E1	-3.26843E1	-3.26332E1	2.68118E1	2.158E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.16313E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09665E0	-8.16965E-1	-7.98702E-1	-9.13148E0	-9.14209E0	5.126E-3	9.3174E-2	2.73369E1	-3.2653E1	-3.25203E1	2.6789E1	2.15894E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.17444E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09665E0	-8.16894E-1	-7.98678E-1	-9.13122E0	-9.14199E0	4.86374E-3	9.34601E-2	2.73057E1	-3.26699E1	-3.25617E1	2.68034E1	2.15987E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.16313E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16989E-1	-7.98678E-1	-9.13172E0	-9.14152E0	4.52995E-3	9.33647E-2	2.73151E1	-3.26502E1	-3.26325E1	2.6801E1	2.158E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.16125E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.17132E-1	-7.98917E-1	-9.13169E0	-9.14195E0	4.57764E-3	9.35793E-2	2.73257E1	-3.26561E1	-3.27522E1	2.68146E1	2.15441E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.16067E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.17084E-1	-7.98893E-1	-9.13146E0	-9.14235E0	4.95911E-3	9.31501E-2	2.72624E1	-3.26747E1	-3.26669E1	2.68238E1	2.15533E-9	2.51525E-3	2.51525E-3	6.29128E-3	2.17176E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.1687E-1	-7.98869E-1	-9.13143E0	-9.14176E0	4.95911E-3	9.30786E-2	2.73387E1	-3.26408E1	-3.25517E1	2.67932E1	2.158E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.17255E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09371E0	-8.16703E-1	-7.9875E-1	-9.13172E0	-9.14187E0	4.76837E-3	9.32693E-2	2.73129E1	-3.26783E1	-3.26933E1	2.6804E1	2.15441E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.17732E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.16822E-1	-7.98774E-1	-9.13148E0	-9.14195E0	5.07832E-3	9.3317E-2	2.72802E1	-3.26729E1	-3.25374E1	2.67926E1	2.15987E-9	2.52099E-3	2.52099E-3	6.29098E-3	2.17444E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16488E-1	-7.98559E-1	-9.13105E0	-9.1419E0	5.00679E-3	9.31978E-2	2.72925E1	-3.26759E1	-3.24566E1	2.68136E1	2.15907E-9	2.51498E-3	2.51498E-3	6.32328E-3	2.18194E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16703E-1	-7.98488E-1	-9.13129E0	-9.14192E0	4.74453E-3	9.34839E-2	2.72937E1	-3.26404E1	-3.25191E1	2.68022E1	2.15706E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.16689E-2