[Scan]
initial_time=2016-01-28T16:32:19
final_time=2016-01-28T16:32:38
ip_count=19
run=1026
dataset=2
scan=113
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08843E-4
ql1_vset=
ql1_vmon=-8.1656E-1
ql1_imon=1.38966E-8
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=1.98971E-9
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=5.30672E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-8.82149E-11
mult1=-8.87415E-9
mult2=-2.7809E-9
rf_tmon=-5.40312E-3
rf_agc=3.26734E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=1.70391E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67875E0
bslens_imon=2.28901E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19827E1
lens5a_imon=1.97478E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53869E1
cs_ef1b_imon=3.09623E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0527E1
cs_ea1_imon=1.23324E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41822E0
lens1_imon=2.76126E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.39799E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83926E1
cs_ef1a_imon=2.99495E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.2533E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.2949E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15173E1
os_ea1_imon=2.41098E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63779E1
os_ef1bup_imon=3.08758E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23888E0
cs_ionrep_imon=9.57823E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93535E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=2.04675E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.22384E-8
tplens_vset=1.4E-1
tplens_vmon=1.61079E0
tplens_imon=-4.25519E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26432E1
iondef3_imon=1.49424E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26927E1
iondef2_imon=1.55913E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98335E-4
ql6_vset=1.0E-1
ql6_vmon=9.28879E-2
ql6_imon=3.97978E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2509E0
ionrepsh_imon=9.25378E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33886E1
lens5b_imon=2.17197E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.36625E0
os_ea2_imon=-8.04039E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0613E2
lens4b_imon=2.00504E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.18164E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07378E0
os_ef2alow_imon=-2.63752E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78803E-1
os_ef2bup_imon=-5.46664E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=3.39896E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02025E1
cs_anode2_imon=2.09288E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73357E1
iondef1_imon=1.07138E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67866E1
iondef4_imon=1.08377E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=6.37729E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.78311E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12173E0
cs_ionaccel_imon=-1.15629E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47316E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56135E1
einzel_imon=7.66982E-6
window_vset=0.0E0
window_vmon=1.44663E-1
window_imon=-1.19233E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86656E1
mask2_imon=-7.88688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92673E3
multa_neg_imon=7.40804E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.66182E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.43688E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41059E0
defgridb_imon=6.13189E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33233E1
os_fil1_imon=9.4406E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0647E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6197E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30676E1
cs_fil1_imon=9.23391E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31965E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64797E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21558E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.2872E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-2.28154E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25635E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22075E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.17444E-2
chamber_ion_pmon=2.15753E-9
chamber_cvt_pmon=2.51935E-3
foreline_cvt_pmon=2.51935E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.27167E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.16703E-1	-7.9906E-1	-9.13143E0	-9.14185E0	4.88758E-3	9.32217E-2	2.73057E1	-3.26838E1	-3.2708E1	2.67944E1	2.158E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.18011E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.16941E-1	-7.9906E-1	-9.13131E0	-9.14202E0	4.98295E-3	9.33886E-2	2.73099E1	-3.26657E1	-3.25113E1	2.6831E1	2.15349E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.16806E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.16917E-1	-7.98774E-1	-9.13134E0	-9.14185E0	5.14984E-3	9.33647E-2	2.73111E1	-3.26494E1	-3.25215E1	2.68148E1	2.15613E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.18011E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.17108E-1	-7.98869E-1	-9.13146E0	-9.14173E0	4.95911E-3	9.31501E-2	2.72817E1	-3.26843E1	-3.24157E1	2.68112E1	2.15987E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.1858E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.16774E-1	-7.98941E-1	-9.13155E0	-9.14211E0	4.673E-3	9.31263E-2	2.7301E1	-3.26744E1	-3.25694E1	2.68064E1	2.15716E-9	2.52492E-3	2.52492E-3	6.30202E-3	2.17732E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.1687E-1	-7.98774E-1	-9.13141E0	-9.1423E0	4.76837E-3	9.33647E-2	2.73118E1	-3.2648E1	-3.26083E1	2.67966E1	2.15425E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.16125E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.1706E-1	-7.98774E-1	-9.13124E0	-9.14202E0	4.93526E-3	9.33647E-2	2.72492E1	-3.26422E1	-3.24578E1	2.68136E1	2.15613E-9	2.52318E-3	2.52318E-3	6.30466E-3	2.17444E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16846E-1	-7.98917E-1	-9.13117E0	-9.14178E0	5.10216E-3	9.29117E-2	2.7266E1	-3.26795E1	-3.25936E1	2.68124E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.16631E-1	-7.98893E-1	-9.13157E0	-9.14176E0	4.8399E-3	9.32217E-2	2.73021E1	-3.26777E1	-3.2745E1	2.68346E1	2.156E-9	2.51804E-3	2.51804E-3	6.32978E-3	2.18108E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09634E0	-8.16774E-1	-7.98917E-1	-9.13141E0	-9.14185E0	4.93526E-3	9.29356E-2	2.72739E1	-3.26861E1	-3.27486E1	2.68142E1	2.15987E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.17255E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.16822E-1	-7.98893E-1	-9.13119E0	-9.14183E0	4.98295E-3	9.33409E-2	2.72921E1	-3.2672E1	-3.26478E1	2.68117E1	2.15716E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.18104E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16917E-1	-7.9875E-1	-9.13131E0	-9.14199E0	4.98295E-3	9.30309E-2	2.73141E1	-3.26512E1	-3.25539E1	2.68069E1	2.15716E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.15699E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.16989E-1	-7.98655E-1	-9.13103E0	-9.14168E0	5.14984E-3	9.31501E-2	2.73556E1	-3.26458E1	-3.27221E1	2.68209E1	2.15314E-9	2.52139E-3	2.52139E-3	6.29624E-3	2.16569E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.1718E-1	-7.98726E-1	-9.13098E0	-9.14166E0	4.88758E-3	9.31501E-2	2.73147E1	-3.26621E1	-3.25659E1	2.68034E1	2.158E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.17727E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16655E-1	-7.98798E-1	-9.13107E0	-9.14173E0	4.98295E-3	9.31501E-2	2.72594E1	-3.26843E1	-3.26939E1	2.68226E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16917E-1	-7.98917E-1	-9.13134E0	-9.14183E0	5.10216E-3	9.27687E-2	2.73772E1	-3.26645E1	-3.25215E1	2.67836E1	2.15425E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.18011E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.16917E-1	-7.98845E-1	-9.13129E0	-9.14176E0	5.38826E-3	9.29356E-2	2.73488E1	-3.2652E1	-3.25782E1	2.68004E1	2.15987E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.17822E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16989E-1	-7.9875E-1	-9.13129E0	-9.14183E0	4.88758E-3	9.30548E-2	2.72666E1	-3.26663E1	-3.2644E1	2.6819E1	2.15533E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.17361E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16655E-1	-7.98726E-1	-9.13119E0	-9.14183E0	5.26905E-3	9.30071E-2	2.72974E1	-3.26614E1	-3.2721E1	2.67866E1	2.158E-9	2.51443E-3	2.51443E-3	6.29098E-3	2.17444E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.1656E-1	-7.98678E-1	-9.13122E0	-9.14185E0	5.22137E-3	9.28879E-2	2.73357E1	-3.26927E1	-3.26432E1	2.67866E1	2.15753E-9	2.51935E-3	2.51935E-3	6.32386E-3	2.17444E-2