[Scan]
initial_time=2016-01-28T16:32:45
final_time=2016-01-28T16:33:05
ip_count=19
run=1026
dataset=2
scan=114
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08792E-4
ql1_vset=
ql1_vmon=-8.1706E-1
ql1_imon=1.38421E-8
ql2_vset=
ql2_vmon=-7.98702E-1
ql2_imon=2.01224E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=4.83561E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=-8.14319E-11
mult1=-9.54888E-9
mult2=-2.67312E-9
rf_tmon=-4.80932E-3
rf_agc=3.29733E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=1.72156E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63984E0
bslens_imon=2.63422E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19954E1
lens5a_imon=1.98584E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12445E2
lens4a_imon=2.05022E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53918E1
cs_ef1b_imon=3.10649E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02078E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04501E1
cs_ea1_imon=1.24299E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42188E0
lens1_imon=2.56025E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.97259E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03852E1
cs_ea2_imon=1.40301E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84511E1
cs_ef1a_imon=3.00295E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.25283E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11422E1
os_restr1_imon=4.28507E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15618E1
os_ea1_imon=2.39308E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6346E1
os_ef1bup_imon=3.08236E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23068E0
cs_ionrep_imon=9.80188E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93218E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01841E1
cs_anode1_imon=2.04779E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=3.21886E-8
tplens_vset=1.4E-1
tplens_vmon=1.60055E0
tplens_imon=-9.50172E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.27331E1
iondef3_imon=1.48126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26682E1
iondef2_imon=1.58483E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02898E2
lens6_imon=2.98307E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=3.98054E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29492E0
ionrepsh_imon=9.41644E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3358E1
lens5b_imon=2.18168E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74624E1
cs_ef2b_imon=3.12439E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40459E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00436E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7131E1
cs_ef2a_imon=3.18511E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07013E0
os_ef2alow_imon=-2.66174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83585E-1
os_ef2bup_imon=-5.45251E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=3.39997E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.31563E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.09605E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73002E1
iondef1_imon=1.0709E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6786E1
iondef4_imon=1.08289E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.37697E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.80608E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11198E0
cs_ionaccel_imon=-1.14764E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47168E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56087E1
einzel_imon=7.75012E-6
window_vset=0.0E0
window_vmon=1.68569E-1
window_imon=-1.16321E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86318E1
mask2_imon=-7.42846E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=6.95584E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.60544E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.72283E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5594E0
defgridb_imon=6.04869E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33235E1
os_fil1_imon=9.40772E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0742E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61977E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30651E1
cs_fil1_imon=9.24542E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30754E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64152E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.09383E-2
os_fil2_imon=-2.60686E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96657E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.21331E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35245E-1
cs_fil2_imon=-2.58091E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.85911E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2192E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.17732E-2
chamber_ion_pmon=2.15992E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.43817E-1
res40_imon=-2.56833E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.16917E-1	-7.99012E-1	-9.13124E0	-9.14192E0	5.24521E-3	9.32217E-2	2.7285E1	-3.26549E1	-3.25163E1	2.68053E1	2.15782E-9	2.51952E-3	2.51952E-3	6.29035E-3	2.17226E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.17013E-1	-7.98631E-1	-9.13117E0	-9.14195E0	5.38826E-3	9.32693E-2	2.73204E1	-3.26627E1	-3.26634E1	2.67963E1	2.15624E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.17547E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.1718E-1	-7.98893E-1	-9.1311E0	-9.14226E0	5.07832E-3	9.31025E-2	2.73045E1	-3.26596E1	-3.25468E1	2.6792E1	2.15587E-9	2.51952E-3	2.51952E-3	6.30171E-3	2.18405E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.17347E-1	-7.98941E-1	-9.13105E0	-9.14233E0	5.126E-3	9.35078E-2	2.72987E1	-3.26578E1	-3.25828E1	2.68121E1	2.15668E-9	2.51323E-3	2.51323E-3	6.32247E-3	2.17578E-2
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.17132E-1	-7.98678E-1	-9.13103E0	-9.14202E0	4.93526E-3	9.33647E-2	2.72859E1	-3.26759E1	-3.27804E1	2.68118E1	2.15475E-9	2.51874E-3	2.51874E-3	6.31321E-3	2.1731E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.1718E-1	-7.98655E-1	-9.13138E0	-9.14216E0	5.03063E-3	9.34839E-2	2.731E1	-3.26462E1	-3.25158E1	2.68178E1	2.15425E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.16878E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.1718E-1	-7.98965E-1	-9.13141E0	-9.14214E0	4.93526E-3	9.33409E-2	2.72673E1	-3.26626E1	-3.2593E1	2.67986E1	2.158E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.17633E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.17132E-1	-7.98488E-1	-9.13138E0	-9.14195E0	4.8399E-3	9.34124E-2	2.73189E1	-3.26422E1	-3.2775E1	2.68058E1	2.15894E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.18011E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0965E0	-8.17108E-1	-7.98774E-1	-9.13117E0	-9.14204E0	5.05447E-3	9.32455E-2	2.72898E1	-3.26621E1	-3.27368E1	2.67998E1	2.15894E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.17255E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.1737E-1	-7.98988E-1	-9.13103E0	-9.14211E0	5.10216E-3	9.33886E-2	2.73086E1	-3.26632E1	-3.26797E1	2.68106E1	2.15706E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.15938E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.17299E-1	-7.98988E-1	-9.13131E0	-9.14207E0	4.8399E-3	9.35555E-2	2.72971E1	-3.26499E1	-3.28237E1	2.67992E1	2.16081E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.15938E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16822E-1	-7.98583E-1	-9.13107E0	-9.14204E0	4.8399E-3	9.32693E-2	2.73098E1	-3.26868E1	-3.28319E1	2.6789E1	2.15706E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.17444E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16798E-1	-7.98774E-1	-9.1311E0	-9.14207E0	4.79221E-3	9.33647E-2	2.73257E1	-3.2685E1	-3.27127E1	2.67908E1	2.15519E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.1839E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.17156E-1	-7.98869E-1	-9.13126E0	-9.14176E0	4.673E-3	9.35078E-2	2.73117E1	-3.2647E1	-3.25834E1	2.6798E1	2.15636E-9	2.51919E-3	2.51919E-3	6.32328E-3	2.17829E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.17084E-1	-7.98893E-1	-9.13126E0	-9.14185E0	4.86374E-3	9.3317E-2	2.73334E1	-3.26655E1	-3.24532E1	2.6801E1	2.15238E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.17066E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09634E0	-8.17132E-1	-7.98631E-1	-9.13141E0	-9.14192E0	4.79221E-3	9.3317E-2	2.72889E1	-3.26464E1	-3.25016E1	2.68034E1	2.16175E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.16878E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.16846E-1	-7.98702E-1	-9.13155E0	-9.14209E0	4.98295E-3	9.34601E-2	2.72859E1	-3.26657E1	-3.26975E1	2.67818E1	2.15894E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.17822E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.16941E-1	-7.98941E-1	-9.13138E0	-9.14176E0	5.03063E-3	9.3317E-2	2.73045E1	-3.26649E1	-3.25511E1	2.67885E1	2.15716E-9	2.52276E-3	2.52276E-3	6.29128E-3	2.16806E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.17013E-1	-7.98821E-1	-9.1316E0	-9.14185E0	5.26905E-3	9.35555E-2	2.72933E1	-3.26549E1	-3.26012E1	2.68322E1	2.15613E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.16313E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.1706E-1	-7.98702E-1	-9.13136E0	-9.1418E0	5.03063E-3	9.33409E-2	2.73002E1	-3.26682E1	-3.27331E1	2.6786E1	2.15992E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.17732E-2