[Scan]
initial_time=2016-01-28T16:34:05
final_time=2016-01-28T16:34:25
ip_count=19
run=1026
dataset=2
scan=117
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09379E0
qbias_imon=-1.08802E-4
ql1_vset=
ql1_vmon=-8.1687E-1
ql1_imon=1.38612E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=1.94938E-9
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=4.94444E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-6.70433E-11
mult1=-9.51162E-9
mult2=-2.72061E-9
rf_tmon=-4.84288E-3
rf_agc=3.27207E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=1.69747E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66253E0
bslens_imon=2.41518E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19713E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12429E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5346E1
cs_ef1b_imon=3.10632E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02063E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04922E1
cs_ea1_imon=1.25956E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4044E0
lens1_imon=2.35029E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.97081E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.40303E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=3.00541E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.2614E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11051E1
os_restr1_imon=4.28914E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15179E1
os_ea1_imon=2.40305E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.07424E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20283E0
cs_ionrep_imon=9.58183E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91911E2
cs_nozzle_imon=1.93398E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=2.04351E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.23368E-8
tplens_vset=1.4E-1
tplens_vmon=1.59817E0
tplens_imon=-2.27247E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27552E1
iondef3_imon=1.49352E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26771E1
iondef2_imon=1.59265E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98277E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=3.98686E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25811E0
ionrepsh_imon=9.43042E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33988E1
lens5b_imon=2.17449E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37166E0
os_ea2_imon=-5.58903E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00432E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.17804E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06477E0
os_ef2alow_imon=-2.63392E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96823E-1
os_ef2bup_imon=-5.33329E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10859E1
os_restr2_imon=3.3867E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.28991E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01965E1
cs_anode2_imon=2.08928E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72979E1
iondef1_imon=1.10238E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.07728E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.39577E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=7.85946E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-1.22837E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.5581E-6
window_vset=0.0E0
window_vmon=1.71092E-1
window_imon=-1.00493E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39062E-4
mask2_vset=0.0E0
mask2_vmon=-1.86386E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.16651E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.80962E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.19175E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42262E0
defgridb_imon=6.24364E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33233E1
os_fil1_imon=9.42847E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07323E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62274E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30693E1
cs_fil1_imon=9.23091E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.37611E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64273E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31876E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.08869E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.5999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09417E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21865E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.17547E-2
chamber_ion_pmon=2.15808E-9
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.97134E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.17132E-1	-7.98678E-1	-9.13122E0	-9.14199E0	5.05447E-3	9.34124E-2	2.72915E1	-3.26638E1	-3.25133E1	2.68047E1	2.15894E-9	2.5199E-3	2.5199E-3	6.29098E-3	2.16125E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.17347E-1	-7.98678E-1	-9.13119E0	-9.14214E0	5.07832E-3	9.34124E-2	2.72831E1	-3.26554E1	-3.26603E1	2.6792E1	2.15894E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.16501E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.16989E-1	-7.98821E-1	-9.13124E0	-9.14187E0	5.36442E-3	9.35555E-2	2.73207E1	-3.26619E1	-3.27042E1	2.6814E1	2.15519E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.16125E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.16727E-1	-7.98845E-1	-9.13093E0	-9.14187E0	5.14984E-3	9.35316E-2	2.72931E1	-3.26723E1	-3.25425E1	2.67902E1	2.15716E-9	2.52492E-3	2.52492E-3	6.32896E-3	2.15515E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.17108E-1	-7.98535E-1	-9.13143E0	-9.14202E0	5.24521E-3	9.37462E-2	2.73322E1	-3.26579E1	-3.2744E1	2.68059E1	2.15992E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.17361E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.16774E-1	-7.98845E-1	-9.13107E0	-9.14199E0	5.36442E-3	9.32693E-2	2.72714E1	-3.26756E1	-3.25525E1	2.68307E1	2.15332E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.17255E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16965E-1	-7.98917E-1	-9.13112E0	-9.14197E0	5.38826E-3	9.31263E-2	2.72927E1	-3.26691E1	-3.26573E1	2.68059E1	2.15706E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.16501E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.17037E-1	-7.98678E-1	-9.1316E0	-9.14176E0	5.34058E-3	9.29356E-2	2.73117E1	-3.26579E1	-3.24836E1	2.68112E1	2.15441E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.16806E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.16822E-1	-7.98678E-1	-9.13141E0	-9.14171E0	5.22137E-3	9.28879E-2	2.73057E1	-3.26567E1	-3.25527E1	2.68118E1	2.15519E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.17444E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.16965E-1	-7.98774E-1	-9.13136E0	-9.14187E0	5.10216E-3	9.30786E-2	2.72654E1	-3.26627E1	-3.26266E1	2.68076E1	2.15706E-9	2.5199E-3	2.5199E-3	6.3514E-3	2.17822E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.17013E-1	-7.98702E-1	-9.13157E0	-9.14164E0	5.50747E-3	9.33409E-2	2.73562E1	-3.2647E1	-3.26236E1	2.68094E1	2.15425E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.1858E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.16894E-1	-7.98702E-1	-9.13181E0	-9.14185E0	4.93526E-3	9.30786E-2	2.72666E1	-3.26068E1	-3.26488E1	2.6804E1	2.15332E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.16878E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.16822E-1	-7.98845E-1	-9.13165E0	-9.14197E0	5.17368E-3	9.29594E-2	2.73051E1	-3.26585E1	-3.25936E1	2.68064E1	2.156E-9	2.52027E-3	2.52027E-3	6.32418E-3	2.1676E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.17013E-1	-7.98917E-1	-9.13155E0	-9.14185E0	5.36442E-3	9.31025E-2	2.73261E1	-3.26915E1	-3.26194E1	2.68124E1	2.15441E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.17361E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.17108E-1	-7.9906E-1	-9.13162E0	-9.1419E0	5.29289E-3	9.29832E-2	2.72786E1	-3.26679E1	-3.26248E1	2.67896E1	2.15425E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.17633E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.16607E-1	-7.99108E-1	-9.13184E0	-9.14156E0	5.29289E-3	9.30309E-2	2.72973E1	-3.2644E1	-3.25563E1	2.68016E1	2.15624E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.17918E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.16631E-1	-7.98774E-1	-9.13155E0	-9.14207E0	5.26905E-3	9.31501E-2	2.72995E1	-3.26484E1	-3.25975E1	2.67965E1	2.15706E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.17444E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-8.16774E-1	-7.98869E-1	-9.13153E0	-9.14214E0	5.29289E-3	9.32455E-2	2.73261E1	-3.26642E1	-3.26521E1	2.68001E1	2.15658E-9	2.52058E-3	2.52058E-3	6.27179E-3	2.17483E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16798E-1	-7.98488E-1	-9.13169E0	-9.14197E0	5.34058E-3	9.30786E-2	2.7301E1	-3.26838E1	-3.25635E1	2.68082E1	2.15872E-9	2.53151E-3	2.53151E-3	6.3074E-3	2.18513E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09379E0	-8.1687E-1	-7.98655E-1	-9.13143E0	-9.14187E0	5.03063E-3	9.32217E-2	2.72979E1	-3.26771E1	-3.27552E1	2.68154E1	2.15808E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.17547E-2