[Scan]
initial_time=2016-01-28T16:34:32
final_time=2016-01-28T16:34:51
ip_count=19
run=1026
dataset=2
scan=118
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08725E-4
ql1_vset=
ql1_vmon=-8.16894E-1
ql1_imon=1.38774E-8
ql2_vset=
ql2_vmon=-7.98965E-1
ql2_imon=2.02755E-9
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=4.93634E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=-7.27773E-11
mult1=-1.021E-8
mult2=-2.84636E-9
rf_tmon=-4.65662E-3
rf_agc=3.367E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=1.69145E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66554E0
bslens_imon=2.43681E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19797E1
lens5a_imon=1.99064E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12439E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53394E1
cs_ef1b_imon=3.09623E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04363E1
cs_ea1_imon=1.23252E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41342E0
lens1_imon=2.58101E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64915E1
os_ef1alow_imon=2.96937E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03726E1
cs_ea2_imon=1.43043E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=3.01117E-5
olens2_vset=9.7E-1
olens2_vmon=9.70745E-1
olens2_imon=1.26661E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11466E1
os_restr1_imon=4.29238E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15516E1
os_ea1_imon=2.39908E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23948E0
cs_ionrep_imon=9.69719E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93124E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=2.04639E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=3.23295E-8
tplens_vset=1.4E-1
tplens_vmon=1.6162E0
tplens_imon=-3.5342E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27744E1
iondef3_imon=1.5202E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26482E1
iondef2_imon=1.57499E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98422E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=3.99344E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27553E0
ionrepsh_imon=9.23215E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3355E1
lens5b_imon=2.18387E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7491E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38849E0
os_ea2_imon=-8.90558E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00522E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71023E1
cs_ef2a_imon=3.17335E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07498E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78203E-1
os_ef2bup_imon=-5.41978E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11015E1
os_restr2_imon=3.40328E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23005E2
cs_ionfoca_imon=6.28991E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.10333E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73562E1
iondef1_imon=1.08147E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68172E1
iondef4_imon=1.08053E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.4206E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.82284E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14456E0
cs_ionaccel_imon=-1.06259E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.49683E-6
window_vset=0.0E0
window_vmon=1.66887E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.38965E-4
mask2_vset=0.0E0
mask2_vmon=-1.86476E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.372E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.40226E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50096E3
multb_neg_imon=7.36839E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.21209E0
defgridb_imon=6.3554E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33249E1
os_fil1_imon=9.41207E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06897E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62225E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30671E1
cs_fil1_imon=9.23109E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29022E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6485E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31876E-2
os_fil2_imon=-2.67197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.16474E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38586E-1
cs_fil2_imon=-2.22749E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33443E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22026E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.17444E-2
chamber_ion_pmon=2.15051E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.17556E-1
res40_imon=-2.50418E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.16727E-1	-7.98726E-1	-9.13179E0	-9.14207E0	5.4121E-3	9.31501E-2	2.7288E1	-3.26508E1	-3.26732E1	2.6804E1	2.15894E-9	2.53196E-3	2.53196E-3	6.32386E-3	2.1839E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.16894E-1	-7.98368E-1	-9.13188E0	-9.14207E0	5.19753E-3	9.31978E-2	2.73461E1	-3.26774E1	-3.26309E1	2.67992E1	2.15808E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.17547E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.16751E-1	-7.98631E-1	-9.13186E0	-9.14211E0	5.24521E-3	9.31501E-2	2.73126E1	-3.26585E1	-3.25217E1	2.67917E1	2.15587E-9	2.51725E-3	2.51725E-3	6.3245E-3	2.17815E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.17204E-1	-7.98798E-1	-9.1315E0	-9.14185E0	4.98295E-3	9.34839E-2	2.73339E1	-3.26825E1	-3.25281E1	2.68176E1	2.15365E-9	2.52025E-3	2.52025E-3	6.31269E-3	2.18011E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09371E0	-8.17084E-1	-7.98488E-1	-9.13138E0	-9.14185E0	5.22137E-3	9.34839E-2	2.72957E1	-3.26626E1	-3.25729E1	2.68034E1	2.15894E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.17444E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09356E0	-8.16441E-1	-7.98464E-1	-9.13148E0	-9.14214E0	5.24521E-3	9.3627E-2	2.73099E1	-3.26512E1	-3.26458E1	2.67962E1	2.15349E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.17547E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09348E0	-8.16679E-1	-7.98678E-1	-9.13148E0	-9.14185E0	5.36442E-3	9.34124E-2	2.73213E1	-3.26747E1	-3.26943E1	2.68239E1	2.15992E-9	2.52599E-3	2.52599E-3	6.31817E-3	2.17547E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09333E0	-8.1687E-1	-7.98416E-1	-9.13138E0	-9.14192E0	5.67436E-3	9.34124E-2	2.72889E1	-3.26543E1	-3.26711E1	2.6813E1	2.15658E-9	2.51956E-3	2.51956E-3	6.3074E-3	2.17835E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.16751E-1	-7.98631E-1	-9.13181E0	-9.14202E0	5.38826E-3	9.34124E-2	2.73261E1	-3.26368E1	-3.25251E1	2.6819E1	2.15505E-9	2.51359E-3	2.51359E-3	6.31858E-3	2.17337E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-8.16989E-1	-7.99036E-1	-9.13169E0	-9.14204E0	5.126E-3	9.28879E-2	2.73086E1	-3.2675E1	-3.25263E1	2.68314E1	2.15808E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.18104E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.16822E-1	-7.98798E-1	-9.13165E0	-9.14216E0	5.19753E-3	9.3174E-2	2.72847E1	-3.26705E1	-3.26116E1	2.67974E1	2.15519E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.1877E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09387E0	-8.1737E-1	-7.98345E-1	-9.13141E0	-9.14221E0	5.17368E-3	9.34839E-2	2.73157E1	-3.26874E1	-3.26585E1	2.68226E1	2.15624E-9	2.5131E-3	2.5131E-3	6.32356E-3	2.17361E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.17585E-1	-7.9844E-1	-9.13148E0	-9.14228E0	5.29289E-3	9.34601E-2	2.72727E1	-3.26425E1	-3.27564E1	2.67818E1	2.15519E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.18201E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.17299E-1	-7.98845E-1	-9.1316E0	-9.14187E0	5.38826E-3	9.34601E-2	2.72931E1	-3.26543E1	-3.25918E1	2.6813E1	2.15613E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.18201E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.1687E-1	-7.98726E-1	-9.13148E0	-9.14185E0	5.34058E-3	9.34124E-2	2.73027E1	-3.26464E1	-3.25942E1	2.67998E1	2.15332E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.17066E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16846E-1	-7.98821E-1	-9.13115E0	-9.14192E0	5.31673E-3	9.33409E-2	2.73305E1	-3.2682E1	-3.26602E1	2.67932E1	2.158E-9	2.5199E-3	2.5199E-3	6.29098E-3	2.17822E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.1718E-1	-7.98893E-1	-9.13148E0	-9.14195E0	5.34058E-3	9.34124E-2	2.73135E1	-3.26837E1	-3.25954E1	2.67842E1	2.15624E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.17547E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.1687E-1	-7.98702E-1	-9.13134E0	-9.14183E0	5.34058E-3	9.35555E-2	2.73219E1	-3.26498E1	-3.26283E1	2.68076E1	2.15425E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.17822E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.1656E-1	-7.98678E-1	-9.13115E0	-9.14209E0	5.50747E-3	9.34124E-2	2.73002E1	-3.26646E1	-3.27252E1	2.68088E1	2.15624E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.18104E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.16894E-1	-7.98965E-1	-9.13115E0	-9.14211E0	5.17368E-3	9.32455E-2	2.73562E1	-3.26482E1	-3.27744E1	2.68172E1	2.15051E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.17444E-2