[Scan]
initial_time=2016-01-28T16:34:59
final_time=2016-01-28T16:35:18
ip_count=19
run=1026
dataset=2
scan=119
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.0877E-4
ql1_vset=
ql1_vmon=-8.16965E-1
ql1_imon=1.3844E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=2.02453E-9
ql3_vset=
ql3_vmon=-9.13172E0
ql3_imon=4.78399E-10
ql4_vset=
ql4_vmon=-9.14237E0
ql4_imon=-7.69377E-11
mult1=-9.16244E-9
mult2=-2.76253E-9
rf_tmon=-4.04378E-3
rf_agc=3.29671E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=1.73323E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65029E0
bslens_imon=2.43708E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20084E1
lens5a_imon=1.94899E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05097E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53544E1
cs_ef1b_imon=3.1074E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.01898E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04805E1
cs_ea1_imon=1.23156E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41444E0
lens1_imon=2.71315E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64656E1
os_ef1alow_imon=2.9618E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03602E1
cs_ea2_imon=1.4064E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=3.00865E-5
olens2_vset=9.7E-1
olens2_vmon=9.70769E-1
olens2_imon=1.26933E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11159E1
os_restr1_imon=4.29959E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15488E1
os_ea1_imon=2.39673E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63918E1
os_ef1bup_imon=3.09082E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25092E0
cs_ionrep_imon=9.62208E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02037E1
cs_anode1_imon=2.03954E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.24205E-8
tplens_vset=1.4E-1
tplens_vmon=1.63612E0
tplens_imon=-3.4136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26921E1
iondef3_imon=1.49453E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26212E1
iondef2_imon=1.57276E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98321E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=3.95619E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25564E0
ionrepsh_imon=9.34246E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33669E1
lens5b_imon=2.17729E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40724E0
os_ea2_imon=-8.40417E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00509E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.17407E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08219E0
os_ef2alow_imon=-2.76727E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00427E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.40148E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.28335E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01671E1
cs_anode2_imon=2.09973E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72324E1
iondef1_imon=1.07865E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67902E1
iondef4_imon=1.08305E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.46746E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.89332E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14996E0
cs_ionaccel_imon=-1.09863E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.47172E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56357E1
einzel_imon=7.53287E-6
window_vset=0.0E0
window_vmon=1.93316E-1
window_imon=-1.11665E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39138E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=7.41702E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.07205E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.16219E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.08664E0
defgridb_imon=6.34812E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33262E1
os_fil1_imon=9.41075E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06656E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62074E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30685E1
cs_fil1_imon=9.23661E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.2704E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64917E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30657E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.09233E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16024E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21999E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.17361E-2
chamber_ion_pmon=2.15992E-9
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.25365E-1
res40_imon=-2.62671E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.1706E-1	-7.99012E-1	-9.13126E0	-9.14204E0	5.126E-3	9.33409E-2	2.72921E1	-3.26703E1	-3.27416E1	2.68094E1	2.158E-9	2.52757E-3	2.52757E-3	6.31837E-3	2.16878E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09379E0	-8.1706E-1	-7.98965E-1	-9.13105E0	-9.1419E0	5.05447E-3	9.38177E-2	2.73106E1	-3.26787E1	-3.25819E1	2.68238E1	2.15636E-9	2.51498E-3	2.51498E-3	6.3074E-3	2.18377E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.1706E-1	-7.98798E-1	-9.13141E0	-9.14173E0	5.00679E-3	9.35793E-2	2.72691E1	-3.26573E1	-3.26107E1	2.68076E1	2.15696E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.17722E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.1706E-1	-7.98965E-1	-9.13162E0	-9.14183E0	5.14984E-3	9.377E-2	2.73189E1	-3.26585E1	-3.28321E1	2.6798E1	2.15441E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.17732E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.17013E-1	-7.99084E-1	-9.1315E0	-9.14173E0	5.19753E-3	9.36031E-2	2.72805E1	-3.26464E1	-3.27125E1	2.67902E1	2.15238E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.17444E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.16941E-1	-7.9875E-1	-9.13143E0	-9.14207E0	5.4121E-3	9.377E-2	2.73109E1	-3.26417E1	-3.25327E1	2.68188E1	2.15519E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.16689E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16774E-1	-7.98988E-1	-9.13174E0	-9.14197E0	5.07832E-3	9.35793E-2	2.72775E1	-3.26401E1	-3.2432E1	2.67825E1	2.15441E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.17361E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.16846E-1	-7.98631E-1	-9.13124E0	-9.14161E0	5.17368E-3	9.36985E-2	2.73129E1	-3.26693E1	-3.25299E1	2.67806E1	2.15238E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.16125E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.16488E-1	-7.98607E-1	-9.13124E0	-9.14216E0	5.38826E-3	9.34839E-2	2.73176E1	-3.26402E1	-3.27011E1	2.68255E1	2.15706E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.17444E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16464E-1	-7.98464E-1	-9.13134E0	-9.14195E0	5.57899E-3	9.35316E-2	2.73153E1	-3.26655E1	-3.2787E1	2.68205E1	2.15647E-9	2.51472E-3	2.51472E-3	6.33341E-3	2.18281E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.16727E-1	-7.98512E-1	-9.13126E0	-9.14216E0	4.95911E-3	9.32932E-2	2.73021E1	-3.26915E1	-3.27121E1	2.67839E1	2.15574E-9	2.52222E-3	2.52222E-3	6.31321E-3	2.1751E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.16727E-1	-7.98631E-1	-9.13115E0	-9.1423E0	5.34058E-3	9.36031E-2	2.72727E1	-3.26315E1	-3.24454E1	2.68294E1	2.15706E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.16501E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.16774E-1	-7.98726E-1	-9.1315E0	-9.14185E0	4.88758E-3	9.34124E-2	2.72829E1	-3.26543E1	-3.25101E1	2.67908E1	2.158E-9	2.52757E-3	2.52757E-3	6.32386E-3	2.17633E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16679E-1	-7.98631E-1	-9.13136E0	-9.14235E0	5.17368E-3	9.33647E-2	2.73654E1	-3.26869E1	-3.25241E1	2.67965E1	2.159E-9	2.519E-3	2.519E-3	6.33436E-3	2.17918E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.1687E-1	-7.98678E-1	-9.13143E0	-9.14223E0	5.00679E-3	9.33647E-2	2.72984E1	-3.26578E1	-3.27839E1	2.68294E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.17084E-1	-7.98559E-1	-9.13138E0	-9.14228E0	4.81606E-3	9.33409E-2	2.72769E1	-3.26597E1	-3.26074E1	2.68034E1	2.15887E-9	2.52921E-3	2.52921E-3	6.31858E-3	2.17722E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.17227E-1	-7.98631E-1	-9.1316E0	-9.14197E0	4.86374E-3	9.33409E-2	2.72886E1	-3.26472E1	-3.25605E1	2.68128E1	2.15425E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.18011E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16989E-1	-7.98416E-1	-9.13134E0	-9.14214E0	5.126E-3	9.34601E-2	2.73135E1	-3.27035E1	-3.26434E1	2.67962E1	2.15636E-9	2.52342E-3	2.52342E-3	6.33919E-3	2.16736E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.16965E-1	-7.98607E-1	-9.13153E0	-9.14218E0	5.03063E-3	9.3317E-2	2.72957E1	-3.26602E1	-3.27835E1	2.68172E1	2.15425E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.17255E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.16965E-1	-7.98249E-1	-9.13172E0	-9.14237E0	4.8399E-3	9.35078E-2	2.72324E1	-3.26212E1	-3.26921E1	2.67902E1	2.15992E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.17361E-2