[Scan]
initial_time=2016-01-28T16:35:25
final_time=2016-01-28T16:35:45
ip_count=19
run=1026
dataset=2
scan=120
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08794E-4
ql1_vset=
ql1_vmon=-8.16774E-1
ql1_imon=1.3823E-8
ql2_vset=
ql2_vmon=-7.98845E-1
ql2_imon=2.01464E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=4.79734E-10
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=-7.08699E-11
mult1=-9.6016E-9
mult2=-2.84174E-9
rf_tmon=-3.41671E-3
rf_agc=3.57729E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=1.67551E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65352E0
bslens_imon=2.53415E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19737E1
lens5a_imon=1.95964E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.05086E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53622E1
cs_ef1b_imon=3.11316E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02258E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05072E1
cs_ea1_imon=1.24766E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40921E0
lens1_imon=2.61706E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03949E1
cs_ea2_imon=1.42286E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=3.01802E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.26815E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.29743E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14819E1
os_ea1_imon=2.42215E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23648E0
cs_ionrep_imon=9.8486E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93265E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.05468E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.24252E-8
tplens_vset=1.4E-1
tplens_vmon=1.63182E0
tplens_imon=-3.8226E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25201E1
iondef3_imon=1.48523E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26818E1
iondef2_imon=1.59085E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98299E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=3.9577E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30016E0
ionrepsh_imon=9.24297E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.18495E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.12181E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40351E0
os_ea2_imon=-6.70656E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00406E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.18957E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06357E0
os_ef2alow_imon=-2.63392E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95021E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10997E1
os_restr2_imon=3.41265E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.3E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01773E1
cs_anode2_imon=2.10405E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73074E1
iondef1_imon=1.09625E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67713E1
iondef4_imon=1.08197E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.41506E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=7.88245E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-9.58075E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.60134E-6
window_vset=0.0E0
window_vmon=1.83105E-1
window_imon=-1.10944E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39102E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.46572E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.53925E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=6.98987E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38051E0
defgridb_imon=6.20038E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3325E1
os_fil1_imon=9.44246E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08044E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6242E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30626E1
cs_fil1_imon=9.22947E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31064E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64437E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31876E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82698E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.9598E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.84617E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.83939E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21923E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.17255E-2
chamber_ion_pmon=2.15706E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.44586E-1
res40_imon=-2.5258E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.16774E-1	-7.98655E-1	-9.13174E0	-9.14202E0	5.126E-3	9.32217E-2	2.73181E1	-3.27045E1	-3.26296E1	2.68064E1	2.15425E-9	2.51662E-3	2.51662E-3	6.29645E-3	2.16878E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.16822E-1	-7.98941E-1	-9.13157E0	-9.14185E0	4.76837E-3	9.31501E-2	2.73388E1	-3.26487E1	-3.25605E1	2.6795E1	2.15349E-9	2.52599E-3	2.52599E-3	6.31817E-3	2.1829E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.16774E-1	-7.9875E-1	-9.13165E0	-9.14223E0	5.31673E-3	9.31978E-2	2.73461E1	-3.26351E1	-3.24456E1	2.68128E1	2.16078E-9	2.52139E-3	2.52139E-3	6.30182E-3	2.16186E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.17108E-1	-7.9875E-1	-9.13181E0	-9.1424E0	5.38826E-3	9.31501E-2	2.72931E1	-3.26567E1	-3.2614E1	2.6822E1	2.1618E-9	2.52613E-3	2.52613E-3	6.29185E-3	2.17027E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.17037E-1	-7.98631E-1	-9.13155E0	-9.14252E0	5.24521E-3	9.31501E-2	2.73093E1	-3.26549E1	-3.26536E1	2.68022E1	2.15519E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.17822E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.1687E-1	-7.98416E-1	-9.13138E0	-9.14216E0	5.22137E-3	9.30071E-2	2.73069E1	-3.26566E1	-3.27901E1	2.67908E1	2.15409E-9	2.52362E-3	2.52362E-3	6.31858E-3	2.17529E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.16846E-1	-7.9844E-1	-9.13165E0	-9.14195E0	5.36442E-3	9.32932E-2	2.72781E1	-3.26597E1	-3.28225E1	2.6822E1	2.15613E-9	2.51662E-3	2.51662E-3	6.29645E-3	2.16689E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.16822E-1	-7.98488E-1	-9.13169E0	-9.14187E0	4.86374E-3	9.3317E-2	2.73411E1	-3.26708E1	-3.27558E1	2.68286E1	2.15944E-9	2.52243E-3	2.52243E-3	6.31012E-3	2.16282E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.16631E-1	-7.98202E-1	-9.13134E0	-9.14183E0	4.8399E-3	9.32217E-2	2.72889E1	-3.26597E1	-3.2647E1	2.68256E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16441E-1	-7.98726E-1	-9.13141E0	-9.14211E0	5.24521E-3	9.32455E-2	2.72986E1	-3.26579E1	-3.26885E1	2.68209E1	2.15987E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.16501E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.1656E-1	-7.98678E-1	-9.13153E0	-9.14173E0	5.03063E-3	9.32932E-2	2.72949E1	-3.26615E1	-3.26446E1	2.67806E1	2.15716E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.16067E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.16774E-1	-7.98917E-1	-9.13146E0	-9.14216E0	5.31673E-3	9.33409E-2	2.73694E1	-3.26597E1	-3.26315E1	2.68051E1	2.15613E-9	2.52867E-3	2.52867E-3	6.33486E-3	2.17255E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09387E0	-8.16703E-1	-7.98583E-1	-9.13157E0	-9.14226E0	5.29289E-3	9.32693E-2	2.73428E1	-3.2675E1	-3.2754E1	2.68099E1	2.15887E-9	2.51804E-3	2.51804E-3	6.31299E-3	2.17915E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.16441E-1	-7.98941E-1	-9.13148E0	-9.14202E0	5.36442E-3	9.3174E-2	2.73033E1	-3.26476E1	-3.25431E1	2.67998E1	2.15624E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.1829E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16798E-1	-7.98607E-1	-9.13177E0	-9.14171E0	5.31673E-3	9.32217E-2	2.73092E1	-3.26225E1	-3.24939E1	2.68076E1	2.158E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.18201E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.16655E-1	-7.98893E-1	-9.13162E0	-9.14176E0	5.26905E-3	9.35316E-2	2.7265E1	-3.26561E1	-3.26649E1	2.67798E1	2.15533E-9	2.51417E-3	2.51417E-3	6.3074E-3	2.18477E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09356E0	-8.16584E-1	-7.98655E-1	-9.13136E0	-9.14202E0	5.07832E-3	9.31978E-2	2.73496E1	-3.26506E1	-3.27684E1	2.6802E1	2.15808E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.17176E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.16679E-1	-7.98821E-1	-9.1315E0	-9.14226E0	5.14984E-3	9.30309E-2	2.7275E1	-3.26903E1	-3.25629E1	2.67862E1	2.15124E-9	2.52362E-3	2.52362E-3	6.3074E-3	2.17722E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.16703E-1	-7.98655E-1	-9.13141E0	-9.14221E0	4.95911E-3	9.34601E-2	2.72955E1	-3.26687E1	-3.27209E1	2.68016E1	2.15636E-9	2.51919E-3	2.51919E-3	6.32328E-3	2.16736E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.16774E-1	-7.98845E-1	-9.13148E0	-9.14207E0	4.81606E-3	9.35078E-2	2.73074E1	-3.26818E1	-3.25201E1	2.67713E1	2.15706E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.17255E-2