[Scan]
initial_time=2016-01-28T16:35:52
final_time=2016-01-28T16:36:12
ip_count=19
run=1026
dataset=2
scan=121
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08856E-4
ql1_vset=
ql1_vmon=-8.16679E-1
ql1_imon=1.37929E-8
ql2_vset=
ql2_vmon=-7.98988E-1
ql2_imon=1.93487E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=4.33493E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-5.89013E-11
mult1=-9.4262E-9
mult2=-2.76667E-9
rf_tmon=-3.94617E-3
rf_agc=3.35977E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=1.68582E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64617E0
bslens_imon=2.43597E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20165E1
lens5a_imon=1.98644E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.05054E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53626E1
cs_ef1b_imon=3.11544E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05045E1
cs_ea1_imon=1.23831E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43554E0
lens1_imon=2.79095E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64745E1
os_ef1alow_imon=2.97454E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03557E1
cs_ea2_imon=1.41275E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84271E1
cs_ef1a_imon=3.01891E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.27307E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11149E1
os_restr1_imon=4.30025E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15217E1
os_ea1_imon=2.39219E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63772E1
os_ef1bup_imon=3.08314E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23683E0
cs_ionrep_imon=9.56996E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.935E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01822E1
cs_anode1_imon=2.04857E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=3.23863E-8
tplens_vset=1.4E-1
tplens_vmon=1.56827E0
tplens_imon=-2.2449E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27637E1
iondef3_imon=1.49519E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26505E1
iondef2_imon=1.58146E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98315E-4
ql6_vset=1.0E-1
ql6_vmon=9.2864E-2
ql6_imon=3.95415E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23301E0
ionrepsh_imon=9.38674E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33983E1
lens5b_imon=2.17004E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7454E1
cs_ef2b_imon=3.11622E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37106E0
os_ea2_imon=-3.04647E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06048E2
lens4b_imon=2.00367E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71147E1
cs_ef2a_imon=3.19329E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08505E0
os_ef2alow_imon=-2.66563E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91369E-1
os_ef2bup_imon=-5.27736E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10844E1
os_restr2_imon=3.39802E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23018E2
cs_ionfoca_imon=6.34432E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01679E1
cs_anode2_imon=2.1015E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.07685E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68045E1
iondef4_imon=1.07861E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.40159E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=7.88023E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.01531E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5647E1
einzel_imon=7.62556E-6
window_vset=0.0E0
window_vmon=1.97112E-1
window_imon=-9.64706E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.39123E-4
mask2_vset=0.0E0
mask2_vmon=-1.86435E1
mask2_imon=-6.02724E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.15379E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93666E3
defgrida_imon=6.54307E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.14234E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53195E0
defgridb_imon=6.38275E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33243E1
os_fil1_imon=9.434E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06895E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62747E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30731E1
cs_fil1_imon=9.2412E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32376E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65197E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38552E-2
os_fil2_imon=-2.6393E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97306E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.75076E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33707E-1
cs_fil2_imon=-2.54848E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22055E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21984E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28592E-3
inlet_lpb_pmon=2.17547E-2
chamber_ion_pmon=2.15716E-9
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.8154E-1
res40_imon=-2.49437E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.16464E-1	-7.98631E-1	-9.13136E0	-9.14197E0	5.19753E-3	9.31263E-2	2.73222E1	-3.26891E1	-3.26915E1	2.68099E1	2.15277E-9	2.52222E-3	2.52222E-3	6.31321E-3	2.17711E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.16584E-1	-7.98535E-1	-9.13165E0	-9.14178E0	5.29289E-3	9.31978E-2	2.73201E1	-3.26362E1	-3.25485E1	2.67896E1	2.15992E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.17918E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.16965E-1	-7.98583E-1	-9.13165E0	-9.14187E0	5.03063E-3	9.34601E-2	2.73157E1	-3.26337E1	-3.25228E1	2.67938E1	2.15613E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.17444E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16703E-1	-7.9875E-1	-9.13146E0	-9.14214E0	4.88758E-3	9.35793E-2	2.72991E1	-3.26771E1	-3.25731E1	2.68082E1	2.15441E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.17547E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.16941E-1	-7.98631E-1	-9.13086E0	-9.14226E0	4.91142E-3	9.34601E-2	2.73111E1	-3.26422E1	-3.26807E1	2.68016E1	2.15894E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.18011E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16607E-1	-7.98821E-1	-9.13122E0	-9.14199E0	4.8399E-3	9.33886E-2	2.72998E1	-3.2652E1	-3.27351E1	2.68117E1	2.15238E-9	2.5188E-3	2.5188E-3	6.34037E-3	2.17822E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16917E-1	-7.98917E-1	-9.13143E0	-9.14207E0	5.10216E-3	9.36031E-2	2.73E1	-3.26619E1	-3.256E1	2.67931E1	2.159E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.18477E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16607E-1	-7.9875E-1	-9.13169E0	-9.14237E0	5.34058E-3	9.36747E-2	2.73015E1	-3.26338E1	-3.27281E1	2.67926E1	2.15381E-9	2.52301E-3	2.52301E-3	6.3126E-3	2.16135E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-8.16727E-1	-7.98583E-1	-9.1316E0	-9.14211E0	5.17368E-3	9.32455E-2	2.72931E1	-3.26289E1	-3.26408E1	2.68325E1	2.15425E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.17066E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.16846E-1	-7.98559E-1	-9.13146E0	-9.14226E0	5.03063E-3	9.36031E-2	2.731E1	-3.26909E1	-3.25856E1	2.68136E1	2.15332E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.18011E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.1687E-1	-7.98535E-1	-9.13138E0	-9.14183E0	5.29289E-3	9.32932E-2	2.73405E1	-3.27113E1	-3.25347E1	2.67878E1	2.15455E-9	2.51919E-3	2.51919E-3	6.3074E-3	2.17464E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-8.17084E-1	-7.98559E-1	-9.13162E0	-9.14216E0	4.95911E-3	9.35078E-2	2.72935E1	-3.26634E1	-3.26884E1	2.67794E1	2.15706E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.18011E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16917E-1	-7.98678E-1	-9.13162E0	-9.14235E0	4.88758E-3	9.3174E-2	2.72895E1	-3.26284E1	-3.2614E1	2.68088E1	2.15982E-9	2.52027E-3	2.52027E-3	6.28511E-3	2.17915E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.16846E-1	-7.98678E-1	-9.13174E0	-9.14226E0	5.07832E-3	9.3174E-2	2.72865E1	-3.26639E1	-3.2754E1	2.68094E1	2.15417E-9	2.52561E-3	2.52561E-3	6.31294E-3	2.17677E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16822E-1	-7.98869E-1	-9.13179E0	-9.14195E0	5.24521E-3	9.30071E-2	2.73387E1	-3.26921E1	-3.26813E1	2.67902E1					
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16774E-1	-7.98988E-1	-9.13126E0	-9.14202E0	5.29289E-3	9.3174E-2	2.73207E1	-3.26631E1	-3.26892E1	2.6814E1	2.15441E-9	2.52169E-3	2.52169E-3	6.33977E-3	2.17547E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.16727E-1	-7.99012E-1	-9.13138E0	-9.14228E0	5.17368E-3	9.32455E-2	2.72867E1	-3.26793E1	-3.28213E1	2.67926E1	2.15711E-9	2.51701E-3	2.51701E-3	6.32099E-3	2.17964E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.16655E-1	-7.98965E-1	-9.13136E0	-9.14195E0	5.34058E-3	9.31978E-2	2.73682E1	-3.26536E1	-3.27203E1	2.68136E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.16512E-1	-7.98774E-1	-9.13138E0	-9.14187E0	5.19753E-3	9.3174E-2	2.73098E1	-3.26596E1	-3.26354E1	2.6803E1	2.15987E-9	2.52099E-3	2.52099E-3	6.29098E-3	2.17822E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.16679E-1	-7.98988E-1	-9.13124E0	-9.1419E0	5.07832E-3	9.2864E-2	2.73069E1	-3.26505E1	-3.27637E1	2.68045E1	2.15716E-9	2.51847E-3	2.51847E-3	6.28592E-3	2.17547E-2