[Scan]
initial_time=2016-01-28T16:36:45
final_time=2016-01-28T16:37:05
ip_count=19
run=1026
dataset=2
scan=123
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08819E-4
ql1_vset=
ql1_vmon=-8.16798E-1
ql1_imon=1.37912E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=2.02613E-9
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=4.21143E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=-7.09295E-11
mult1=-9.99587E-9
mult2=-2.69778E-9
rf_tmon=-5.78366E-3
rf_agc=3.20172E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=1.68632E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63465E0
bslens_imon=2.37726E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19467E1
lens5a_imon=1.96949E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.05112E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53619E1
cs_ef1b_imon=3.10805E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02179E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04625E1
cs_ea1_imon=1.24532E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44394E0
lens1_imon=2.59529E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64582E1
os_ef1alow_imon=2.97727E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03522E1
cs_ea2_imon=1.39483E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84271E1
cs_ef1a_imon=2.99595E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.26647E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11331E1
os_restr1_imon=4.29364E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15423E1
os_ea1_imon=2.41839E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6359E1
os_ef1bup_imon=3.08664E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23328E0
cs_ionrep_imon=9.59164E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93525E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01692E1
cs_anode1_imon=2.06219E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.23886E-8
tplens_vset=1.4E-1
tplens_vmon=1.62975E0
tplens_imon=-2.39071E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26496E1
iondef3_imon=1.49606E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26608E1
iondef2_imon=1.55757E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98326E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.02818E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23328E0
ionrepsh_imon=9.25292E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33892E1
lens5b_imon=2.1844E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74754E1
cs_ef2b_imon=3.12712E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41497E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00389E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71323E1
cs_ef2a_imon=3.18667E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07272E0
os_ef2alow_imon=-2.69677E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86828E-1
os_ef2bup_imon=-5.30071E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1076E1
os_restr2_imon=3.3988E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.3133E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01951E1
cs_anode2_imon=2.10345E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72933E1
iondef1_imon=1.06117E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.08289E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.42987E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=7.88983E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13987E0
cs_ionaccel_imon=-9.68598E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47183E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56262E1
einzel_imon=7.60221E-6
window_vset=0.0E0
window_vmon=1.94517E-1
window_imon=-1.10483E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39092E-4
mask2_vset=0.0E0
mask2_vmon=-1.86383E1
mask2_imon=-7.93446E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.05317E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.60154E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.42693E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.57239E0
defgridb_imon=6.32122E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33244E1
os_fil1_imon=9.39533E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07154E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62537E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30763E1
cs_fil1_imon=9.23653E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32895E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65167E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.27491E-2
os_fil2_imon=-2.71714E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80439E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.92376E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34126E-1
cs_fil2_imon=-2.13979E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.27245E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22148E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.17633E-2
chamber_ion_pmon=2.15987E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40044E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.01002E-1
res40_imon=-2.48659E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16679E-1	-7.98726E-1	-9.13167E0	-9.14209E0	5.62668E-3	9.35316E-2	2.73202E1	-3.26167E1	-3.25727E1	2.6825E1	2.16168E-9	2.52029E-3	2.52029E-3	6.28967E-3	2.17195E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09611E0	-8.16989E-1	-7.98821E-1	-9.13138E0	-9.14192E0	5.36442E-3	9.31501E-2	2.7299E1	-3.26476E1	-3.24822E1	2.67967E1	2.15726E-9	2.51709E-3	2.51709E-3	6.32328E-3	2.18194E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16965E-1	-7.98488E-1	-9.13122E0	-9.14161E0	5.03063E-3	9.35316E-2	2.73115E1	-3.26382E1	-3.25698E1	2.68001E1	2.15601E-9	2.52163E-3	2.52163E-3	6.29765E-3	2.17618E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.17108E-1	-7.98607E-1	-9.13146E0	-9.14199E0	4.91142E-3	9.34601E-2	2.72788E1	-3.26523E1	-3.27356E1	2.68112E1	2.159E-9	2.52384E-3	2.52384E-3	6.29665E-3	2.16621E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.17132E-1	-7.98702E-1	-9.13174E0	-9.1419E0	5.24521E-3	9.34124E-2	2.73293E1	-3.26384E1	-3.27918E1	2.6813E1	2.15505E-9	2.51693E-3	2.51693E-3	6.29624E-3	2.17145E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.17227E-1	-7.98702E-1	-9.13172E0	-9.14164E0	4.81606E-3	9.34124E-2	2.72998E1	-3.26502E1	-3.26579E1	2.6825E1	2.15808E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.18477E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.17108E-1	-7.98631E-1	-9.13162E0	-9.14202E0	5.17368E-3	9.35316E-2	2.72294E1	-3.26795E1	-3.27936E1	2.6786E1	2.15716E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.17176E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.17013E-1	-7.98702E-1	-9.13172E0	-9.14171E0	5.126E-3	9.3317E-2	2.73309E1	-3.26711E1	-3.27942E1	2.68004E1	2.158E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.17066E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.16965E-1	-7.98869E-1	-9.13155E0	-9.14218E0	5.38826E-3	9.32693E-2	2.72781E1	-3.26374E1	-3.27738E1	2.68076E1	2.158E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.17822E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.17156E-1	-7.98726E-1	-9.13169E0	-9.14183E0	5.17368E-3	9.3317E-2	2.73104E1	-3.26301E1	-3.27829E1	2.67998E1	2.158E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.1839E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.17132E-1	-7.98512E-1	-9.13167E0	-9.14216E0	5.53131E-3	9.32217E-2	2.72943E1	-3.26711E1	-3.25305E1	2.67896E1	2.15624E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.17176E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16989E-1	-7.98655E-1	-9.13136E0	-9.14204E0	5.29289E-3	9.34362E-2	2.72907E1	-3.2647E1	-3.2739E1	2.67848E1	2.15987E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.1839E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.16917E-1	-7.98702E-1	-9.13148E0	-9.14216E0	4.91142E-3	9.34839E-2	2.73658E1	-3.26482E1	-3.26723E1	2.67824E1	2.158E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.17444E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.17108E-1	-7.9844E-1	-9.13167E0	-9.14197E0	5.05447E-3	9.33409E-2	2.72937E1	-3.27029E1	-3.2644E1	2.67998E1	2.15051E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.17822E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.16965E-1	-7.98488E-1	-9.13117E0	-9.14207E0	5.17368E-3	9.32455E-2	2.72915E1	-3.2685E1	-3.26543E1	2.68012E1	2.15706E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.17822E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16894E-1	-7.98535E-1	-9.13115E0	-9.14204E0	5.36442E-3	9.35793E-2	2.72861E1	-3.26358E1	-3.28005E1	2.67957E1	2.15624E-9	2.51096E-3	2.51096E-3	6.3074E-3	2.17547E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.1706E-1	-7.98512E-1	-9.13141E0	-9.14195E0	5.05447E-3	9.34601E-2	2.72763E1	-3.26567E1	-3.25653E1	2.6807E1	2.15409E-9	2.52027E-3	2.52027E-3	6.30182E-3	2.17337E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.16894E-1	-7.98702E-1	-9.13143E0	-9.14159E0	4.57764E-3	9.33886E-2	2.73305E1	-3.26738E1	-3.25369E1	2.67984E1	2.15519E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.1839E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.16774E-1	-7.98512E-1	-9.13146E0	-9.14171E0	4.81606E-3	9.36508E-2	2.72997E1	-3.26374E1	-3.26699E1	2.67896E1	2.15716E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.17176E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.16798E-1	-7.9844E-1	-9.13112E0	-9.1418E0	5.03063E-3	9.32932E-2	2.72933E1	-3.26608E1	-3.26496E1	2.68046E1	2.15987E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.17633E-2