[Scan]
initial_time=2016-01-28T16:37:12
final_time=2016-01-28T16:37:32
ip_count=19
run=1026
dataset=2
scan=124
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08824E-4
ql1_vset=
ql1_vmon=-8.16488E-1
ql1_imon=1.37749E-8
ql2_vset=
ql2_vmon=-7.98845E-1
ql2_imon=2.02445E-9
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=4.62031E-10
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=-6.03437E-11
mult1=-1.1101E-8
mult2=-2.78049E-9
rf_tmon=-4.99909E-3
rf_agc=3.32314E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=1.67477E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64601E0
bslens_imon=2.61221E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19719E1
lens5a_imon=1.97654E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12451E2
lens4a_imon=2.04977E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5368E1
cs_ef1b_imon=3.12399E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02102E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05038E1
cs_ea1_imon=1.24654E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40064E0
lens1_imon=2.68708E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64496E1
os_ef1alow_imon=2.95744E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03803E1
cs_ea2_imon=1.40864E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=3.01471E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.27263E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10818E1
os_restr1_imon=4.28232E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15443E1
os_ea1_imon=2.39957E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63779E1
os_ef1bup_imon=3.09929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24586E0
cs_ionrep_imon=9.66891E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93278E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01846E1
cs_anode1_imon=2.04762E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.23596E-8
tplens_vset=1.4E-1
tplens_vmon=1.63956E0
tplens_imon=-2.77855E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25695E1
iondef3_imon=1.50335E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26428E1
iondef2_imon=1.56849E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.98439E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.00001E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26146E0
ionrepsh_imon=9.31326E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33564E1
lens5b_imon=2.18019E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12249E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42618E0
os_ea2_imon=-6.82164E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00698E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71202E1
cs_ef2a_imon=3.17826E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05581E0
os_ef2alow_imon=-2.54812E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.11355E-1
os_ef2bup_imon=-5.31763E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10861E1
os_restr2_imon=3.40655E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.31463E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01616E1
cs_anode2_imon=2.09066E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72883E1
iondef1_imon=1.0938E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6813E1
iondef4_imon=1.0884E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.42087E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=7.85093E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12453E0
cs_ionaccel_imon=-1.11471E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47256E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56118E1
einzel_imon=7.62796E-6
window_vset=0.0E0
window_vmon=1.81418E-1
window_imon=-1.08477E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39069E-4
mask2_vset=0.0E0
mask2_vmon=-1.86537E1
mask2_imon=-6.88055E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.80459E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.43069E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.22433E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39937E0
defgridb_imon=6.17238E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33223E1
os_fil1_imon=9.43456E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07123E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62351E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3069E1
cs_fil1_imon=9.22609E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31071E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64849E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30437E-2
os_fil2_imon=-2.70617E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85354E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.40762E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33013E-1
cs_fil2_imon=-2.50032E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19859E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21929E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.45038E-1
res40_imon=-2.46204E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16846E-1	-7.98607E-1	-9.13153E0	-9.1419E0	5.38826E-3	9.34124E-2	2.73381E1	-3.26443E1	-3.27528E1	2.68274E1	2.15782E-9	2.51725E-3	2.51725E-3	6.3245E-3	2.18602E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16751E-1	-7.98893E-1	-9.13146E0	-9.14207E0	5.10216E-3	9.34601E-2	2.731E1	-3.2667E1	-3.27907E1	2.67926E1	2.15624E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.17361E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.16917E-1	-7.9875E-1	-9.13153E0	-9.14221E0	5.14984E-3	9.31978E-2	2.72945E1	-3.26773E1	-3.2849E1	2.68238E1	2.15706E-9	2.52318E-3	2.52318E-3	6.34037E-3	2.1839E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.16965E-1	-7.98559E-1	-9.13146E0	-9.14159E0	4.95911E-3	9.33409E-2	2.73051E1	-3.26396E1	-3.27989E1	2.68065E1	2.15425E-9	2.52867E-3	2.52867E-3	6.33486E-3	2.16125E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16679E-1	-7.98249E-1	-9.13129E0	-9.14161E0	5.31673E-3	9.31978E-2	2.72853E1	-3.26579E1	-3.26543E1	2.68004E1	2.15533E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.17918E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.16846E-1	-7.98297E-1	-9.1315E0	-9.14171E0	5.19753E-3	9.34124E-2	2.73045E1	-3.26549E1	-3.26945E1	2.6789E1	2.15706E-9	2.52647E-3	2.52647E-3	6.28552E-3	2.17633E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.16822E-1	-7.98178E-1	-9.13155E0	-9.1419E0	5.29289E-3	9.36985E-2	2.72775E1	-3.26326E1	-3.25149E1	2.6834E1	2.15624E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.16621E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.16822E-1	-7.98416E-1	-9.13165E0	-9.14195E0	5.50747E-3	9.34362E-2	2.72847E1	-3.26561E1	-3.26789E1	2.68292E1	2.15696E-9	2.51915E-3	2.51915E-3	6.30182E-3	2.16569E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-8.16679E-1	-7.98225E-1	-9.1315E0	-9.14197E0	4.93526E-3	9.34362E-2	2.72921E1	-3.26549E1	-3.26189E1	2.68142E1	2.15894E-9	2.52099E-3	2.52099E-3	6.3514E-3	2.17255E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.1656E-1	-7.98321E-1	-9.13131E0	-9.1418E0	5.126E-3	9.32932E-2	2.73141E1	-3.26308E1	-3.25707E1	2.68094E1	2.15716E-9	2.51739E-3	2.51739E-3	6.33436E-3	2.17732E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.1687E-1	-7.98512E-1	-9.13141E0	-9.14168E0	4.91142E-3	9.3317E-2	2.73321E1	-3.26687E1	-3.259E1	2.68136E1	2.158E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.18011E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.16965E-1	-7.98321E-1	-9.1316E0	-9.14192E0	5.14984E-3	9.33886E-2	2.72811E1	-3.26374E1	-3.2733E1	2.67968E1	2.15425E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.17255E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.17013E-1	-7.98321E-1	-9.13141E0	-9.14221E0	4.95911E-3	9.32217E-2	2.73269E1	-3.26655E1	-3.25806E1	2.68123E1	2.15624E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.18104E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16894E-1	-7.98512E-1	-9.1316E0	-9.1418E0	4.72069E-3	9.33647E-2	2.73093E1	-3.26675E1	-3.27618E1	2.6807E1	2.15519E-9	2.52867E-3	2.52867E-3	6.29645E-3	2.17444E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16989E-1	-7.98488E-1	-9.13143E0	-9.14171E0	4.88758E-3	9.33409E-2	2.72833E1	-3.26632E1	-3.25074E1	2.68124E1	2.15706E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.18011E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16989E-1	-7.98345E-1	-9.13134E0	-9.14185E0	4.74453E-3	9.33409E-2	2.72892E1	-3.26703E1	-3.26608E1	2.68198E1	2.15624E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.1829E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.17513E-1	-7.98583E-1	-9.13169E0	-9.14185E0	5.14984E-3	9.32693E-2	2.7352E1	-3.26897E1	-3.26639E1	2.67878E1	2.15441E-9	2.52923E-3	2.52923E-3	6.32356E-3	2.17918E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.17132E-1	-7.99012E-1	-9.13167E0	-9.1419E0	5.07832E-3	9.33647E-2	2.73252E1	-3.26526E1	-3.26254E1	2.68106E1	2.15613E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.17255E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.16727E-1	-7.98678E-1	-9.13148E0	-9.14192E0	5.07832E-3	9.34839E-2	2.72895E1	-3.26957E1	-3.26825E1	2.68124E1	2.15711E-9	2.5246E-3	2.5246E-3	6.31012E-3	2.18058E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.16488E-1	-7.98845E-1	-9.13153E0	-9.14168E0	4.98295E-3	9.3174E-2	2.72883E1	-3.26428E1	-3.25695E1	2.6813E1