[Scan]
initial_time=2016-01-28T16:38:59
final_time=2016-01-28T16:39:18
ip_count=19
run=1026
dataset=2
scan=128
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08801E-4
ql1_vset=
ql1_vmon=-8.17251E-1
ql1_imon=1.38146E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=2.01665E-9
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=4.34554E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=-6.11067E-11
mult1=-1.04333E-8
mult2=-2.84084E-9
rf_tmon=-4.56847E-3
rf_agc=3.34861E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=1.64887E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65472E0
bslens_imon=2.5017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19634E1
lens5a_imon=1.97406E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05006E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53544E1
cs_ef1b_imon=3.09514E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04567E2
lens23_imon=1.02067E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05294E1
cs_ea1_imon=1.25703E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42844E0
lens1_imon=2.54857E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6456E1
os_ef1alow_imon=2.98955E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04003E1
cs_ea2_imon=1.42214E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=2.99459E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.27405E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11904E1
os_restr1_imon=4.32049E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=2.40593E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23287E0
cs_ionrep_imon=9.64672E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93341E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=2.06873E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.23426E-8
tplens_vset=1.4E-1
tplens_vmon=1.58556E0
tplens_imon=-1.83987E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25629E1
iondef3_imon=1.49712E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26549E1
iondef2_imon=1.59229E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98357E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.00976E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26892E0
ionrepsh_imon=9.37274E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34018E1
lens5b_imon=2.17774E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.11677E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3957E0
os_ea2_imon=-5.66113E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00338E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.20182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05996E0
os_ef2alow_imon=-2.91142E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89015E-1
os_ef2bup_imon=-5.35491E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11015E1
os_restr2_imon=3.4004E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23018E2
cs_ionfoca_imon=6.29568E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.11018E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73417E1
iondef1_imon=1.10851E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67878E1
iondef4_imon=1.07224E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.39533E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.8782E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10912E0
cs_ionaccel_imon=-9.58075E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02118E2
cs_ionfocb_imon=1.47179E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56075E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=1.81904E-1
window_imon=-1.05899E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-7.56253E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.04394E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.77357E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.36839E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26322E0
defgridb_imon=6.04898E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3326E1
os_fil1_imon=9.42162E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07053E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62341E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30676E1
cs_fil1_imon=9.22959E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28301E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64843E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31876E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03721E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.94046E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.67798E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.23872E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22034E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33388E-3
inlet_lpb_pmon=2.18926E-2
chamber_ion_pmon=2.15726E-9
chamber_cvt_pmon=2.52025E-3
foreline_cvt_pmon=2.52025E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.59893E-1
res40_imon=-2.37083E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16965E-1	-7.98631E-1	-9.1315E0	-9.14209E0	5.10216E-3	9.34362E-2	2.72909E1	-3.26738E1	-3.24591E1	2.68117E1	2.15987E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.18011E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.1718E-1	-7.98726E-1	-9.13155E0	-9.14204E0	4.95911E-3	9.33886E-2	2.72831E1	-3.26352E1	-3.24448E1	2.68119E1	2.15726E-9	2.52448E-3	2.52448E-3	6.32858E-3	2.17646E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.16965E-1	-7.98821E-1	-9.13165E0	-9.14216E0	4.95911E-3	9.32455E-2	2.73051E1	-3.26608E1	-3.26885E1	2.6792E1	2.156E-9	2.51915E-3	2.51915E-3	6.31858E-3	2.17722E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.16917E-1	-7.98321E-1	-9.13165E0	-9.14202E0	4.79221E-3	9.3317E-2	2.72986E1	-3.26425E1	-3.27003E1	2.6819E1	2.15894E-9	2.52318E-3	2.52318E-3	6.34588E-3	2.1839E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16607E-1	-7.98678E-1	-9.13155E0	-9.14207E0	4.69685E-3	9.31978E-2	2.72949E1	-3.26723E1	-3.26651E1	2.6816E1	2.15533E-9	2.51847E-3	2.51847E-3	6.34518E-3	2.17547E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16846E-1	-7.98631E-1	-9.13177E0	-9.14218E0	4.8399E-3	9.31263E-2	2.73111E1	-3.26386E1	-3.26266E1	2.68064E1	2.16081E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.16501E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.17013E-1	-7.98488E-1	-9.13155E0	-9.14202E0	4.95911E-3	9.33409E-2	2.73135E1	-3.26771E1	-3.25287E1	2.68064E1	2.15519E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.16125E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.16774E-1	-7.98702E-1	-9.13155E0	-9.14199E0	4.88758E-3	9.30071E-2	2.72715E1	-3.26735E1	-3.25942E1	2.68268E1	2.15716E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.16621E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.16941E-1	-7.98535E-1	-9.13157E0	-9.1419E0	4.98295E-3	9.34601E-2	2.72985E1	-3.26236E1	-3.26549E1	2.67966E1	2.15987E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.1575E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.17251E-1	-7.9844E-1	-9.13155E0	-9.14202E0	4.81606E-3	9.34839E-2	2.7311E1	-3.26756E1	-3.26874E1	2.67746E1	2.15613E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.18011E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.1718E-1	-7.98583E-1	-9.13143E0	-9.14211E0	4.69685E-3	9.31501E-2	2.73104E1	-3.26343E1	-3.25694E1	2.6801E1	2.159E-9	2.51954E-3	2.51954E-3	6.34518E-3	2.17361E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.17132E-1	-7.98702E-1	-9.13134E0	-9.14187E0	4.95911E-3	9.34124E-2	2.72444E1	-3.26302E1	-3.26446E1	2.68106E1	2.15441E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.17176E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.16989E-1	-7.98631E-1	-9.13122E0	-9.14214E0	4.43459E-3	9.33409E-2	2.73316E1	-3.26478E1	-3.25871E1	2.67966E1	2.158E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.16689E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16846E-1	-7.98702E-1	-9.13162E0	-9.14199E0	4.74453E-3	9.3317E-2	2.72996E1	-3.26738E1	-3.27044E1	2.67953E1	2.15987E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.17822E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.16846E-1	-7.98345E-1	-9.13165E0	-9.1423E0	4.74453E-3	9.30309E-2	2.72939E1	-3.26331E1	-3.26001E1	2.67864E1	2.15613E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.17822E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16751E-1	-7.98273E-1	-9.13122E0	-9.14185E0	4.95911E-3	9.31978E-2	2.72919E1	-3.2647E1	-3.26777E1	2.67764E1	2.16085E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.15699E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16846E-1	-7.98464E-1	-9.13143E0	-9.14209E0	4.76837E-3	9.33409E-2	2.73099E1	-3.26693E1	-3.26795E1	2.6804E1	2.15332E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.16313E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16822E-1	-7.9844E-1	-9.13136E0	-9.14211E0	4.95911E-3	9.33886E-2	2.73387E1	-3.26832E1	-3.26372E1	2.67926E1	2.158E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.17255E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.1687E-1	-7.98297E-1	-9.13138E0	-9.14197E0	4.93526E-3	9.29832E-2	2.72862E1	-3.26614E1	-3.2626E1	2.68007E1	2.15987E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.1858E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.17251E-1	-7.9844E-1	-9.13153E0	-9.14197E0	5.10216E-3	9.31263E-2	2.73417E1	-3.26549E1	-3.25629E1	2.67878E1	2.15726E-9	2.52025E-3	2.52025E-3	6.33388E-3	2.18926E-2