[Scan]
initial_time=2016-01-28T16:40:19
final_time=2016-01-28T16:40:38
ip_count=19
run=1026
dataset=2
scan=131
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08795E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=1.38292E-8
ql2_vset=
ql2_vmon=-7.97915E-1
ql2_imon=2.04246E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=4.807E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=-7.77721E-11
mult1=-8.87347E-9
mult2=-2.68667E-9
rf_tmon=-3.68929E-3
rf_agc=3.37121E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=1.69712E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65352E0
bslens_imon=2.46565E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19412E1
lens5a_imon=1.97875E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12457E2
lens4a_imon=2.0497E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53688E1
cs_ef1b_imon=3.1074E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04796E1
cs_ea1_imon=1.25559E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44406E0
lens1_imon=2.78289E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.98414E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04141E1
cs_ea2_imon=1.41926E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84502E1
cs_ef1a_imon=3.00757E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.27498E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10973E1
os_restr1_imon=4.29166E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15456E1
os_ea1_imon=2.40377E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63497E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22506E0
cs_ionrep_imon=9.7801E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93294E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=2.04207E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=3.24418E-8
tplens_vset=1.4E-1
tplens_vmon=1.60899E0
tplens_imon=-1.58753E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26609E1
iondef3_imon=1.48306E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26621E1
iondef2_imon=1.56309E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02892E2
lens6_imon=2.98328E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.98088E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27132E0
ionrepsh_imon=9.44124E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33856E1
lens5b_imon=2.18711E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.11064E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44737E0
os_ea2_imon=-6.92286E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00583E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.19425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04915E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86612E-1
os_ef2bup_imon=-5.3405E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=3.40256E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.30325E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.10369E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72883E1
iondef1_imon=1.09121E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68034E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.44271E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.87159E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11452E0
cs_ionaccel_imon=-8.93203E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47251E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56273E1
einzel_imon=7.65901E-6
window_vset=0.0E0
window_vmon=1.83706E-1
window_imon=-1.12025E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39196E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-7.74273E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.91995E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.26167E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.23501E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33841E0
defgridb_imon=6.04537E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33223E1
os_fil1_imon=9.38978E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07329E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62585E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30677E1
cs_fil1_imon=9.24665E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32145E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65122E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37035E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.95206E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33407E-1
cs_fil2_imon=-2.25151E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37648E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22025E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.17444E-2
chamber_ion_pmon=2.16081E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.19959E-1
res40_imon=-2.63392E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.16441E-1	-7.98011E-1	-9.13153E0	-9.14218E0	5.10216E-3	9.32932E-2	2.7308E1	-3.26422E1	-3.25872E1	2.68007E1	2.15519E-9	2.51662E-3	2.51662E-3	6.34037E-3	2.17633E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09634E0	-8.1656E-1	-7.98154E-1	-9.1315E0	-9.14228E0	5.36442E-3	9.35555E-2	2.73251E1	-3.26553E1	-3.26235E1	2.68157E1	2.15636E-9	2.51603E-3	2.51603E-3	6.30212E-3	2.17282E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16464E-1	-7.9813E-1	-9.13181E0	-9.1419E0	5.26905E-3	9.33886E-2	2.73257E1	-3.26767E1	-3.26178E1	2.67931E1	2.15879E-9	2.51838E-3	2.51838E-3	6.3074E-3	2.17226E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.16798E-1	-7.98321E-1	-9.13188E0	-9.14214E0	5.10216E-3	9.35078E-2	2.72709E1	-3.26705E1	-3.26795E1	2.67806E1	2.15546E-9	2.52131E-3	2.52131E-3	6.31269E-3	2.18011E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16917E-1	-7.98512E-1	-9.13157E0	-9.14209E0	5.00679E-3	9.36031E-2	2.73508E1	-3.26669E1	-3.25942E1	2.68232E1	2.158E-9	2.52757E-3	2.52757E-3	6.31837E-3	2.18011E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16774E-1	-7.98273E-1	-9.13172E0	-9.14202E0	5.07832E-3	9.33647E-2	2.73081E1	-3.26404E1	-3.26549E1	2.68202E1	2.15791E-9	2.52473E-3	2.52473E-3	6.32978E-3	2.17337E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.16798E-1	-7.98345E-1	-9.1315E0	-9.14199E0	5.24521E-3	9.2864E-2	2.72823E1	-3.26783E1	-3.26741E1	2.68106E1	2.16085E-9	2.51417E-3	2.51417E-3	6.32896E-3	2.17732E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.16941E-1	-7.98488E-1	-9.13143E0	-9.14204E0	4.98295E-3	9.35316E-2	2.73051E1	-3.26428E1	-3.26314E1	2.6813E1	2.15613E-9	2.52428E-3	2.52428E-3	6.29645E-3	2.17444E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.17013E-1	-7.98488E-1	-9.13112E0	-9.14197E0	4.57764E-3	9.33886E-2	2.72738E1	-3.26728E1	-3.26341E1	2.68277E1	2.15706E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.15563E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.17132E-1	-7.98392E-1	-9.13167E0	-9.14192E0	4.86374E-3	9.3174E-2	2.73191E1	-3.2612E1	-3.26113E1	2.67868E1	2.15693E-9	2.52572E-3	2.52572E-3	6.33436E-3	2.18127E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.17323E-1	-7.98488E-1	-9.13172E0	-9.14207E0	5.03063E-3	9.31263E-2	2.73191E1	-3.26769E1	-3.27461E1	2.68154E1	2.16039E-9	2.51498E-3	2.51498E-3	6.32087E-3	2.17547E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.17132E-1	-7.98416E-1	-9.13157E0	-9.14185E0	4.93526E-3	9.32693E-2	2.73213E1	-3.2647E1	-3.25521E1	2.68196E1	2.15987E-9	2.52154E-3	2.52154E-3	6.3074E-3	2.17444E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.17275E-1	-7.98583E-1	-9.13148E0	-9.14183E0	5.05447E-3	9.36985E-2	2.73249E1	-3.26711E1	-3.26945E1	2.67794E1	2.15992E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.17547E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.17037E-1	-7.98297E-1	-9.13143E0	-9.14199E0	4.81606E-3	9.34124E-2	2.73135E1	-3.26573E1	-3.25257E1	2.67728E1	2.15987E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.17444E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.17227E-1	-7.98297E-1	-9.13131E0	-9.14197E0	4.8399E-3	9.31978E-2	2.72781E1	-3.26567E1	-3.26308E1	2.68034E1	2.15505E-9	2.52027E-3	2.52027E-3	6.30182E-3	2.16952E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.17108E-1	-7.98178E-1	-9.13155E0	-9.14199E0	4.72069E-3	9.34362E-2	2.73111E1	-3.26518E1	-3.26639E1	2.68208E1	2.15624E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.16806E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.17084E-1	-7.98345E-1	-9.13172E0	-9.14187E0	4.64916E-3	9.32455E-2	2.72933E1	-3.26738E1	-3.26378E1	2.68169E1	2.15894E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.17255E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.17037E-1	-7.98297E-1	-9.13126E0	-9.14166E0	4.74453E-3	9.37462E-2	2.73027E1	-3.26801E1	-3.262E1	2.68268E1	2.15706E-9	2.51443E-3	2.51443E-3	6.34037E-3	2.17444E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16846E-1	-7.98321E-1	-9.13146E0	-9.14173E0	5.03063E-3	9.35078E-2	2.73153E1	-3.26609E1	-3.25683E1	2.68058E1	2.159E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.1829E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.16655E-1	-7.97915E-1	-9.1315E0	-9.1418E0	5.126E-3	9.35793E-2	2.72883E1	-3.26621E1	-3.26609E1	2.68034E1	2.16081E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.17444E-2