[Scan]
initial_time=2016-01-28T16:41:12
final_time=2016-01-28T16:41:31
ip_count=19
run=1026
dataset=2
scan=133
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09348E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.16536E-1
ql1_imon=1.37882E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=1.976E-9
ql3_vset=
ql3_vmon=-9.13191E0
ql3_imon=4.30989E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-7.34568E-11
mult1=-9.7001E-9
mult2=-2.72329E-9
rf_tmon=-5.64798E-3
rf_agc=3.32106E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=1.68333E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63964E0
bslens_imon=2.52423E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20066E1
lens5a_imon=1.98462E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12457E2
lens4a_imon=2.05083E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53389E1
cs_ef1b_imon=3.10902E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02118E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05133E1
cs_ea1_imon=1.25427E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40443E0
lens1_imon=2.54162E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64232E1
os_ef1alow_imon=2.9641E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03766E1
cs_ea2_imon=1.40861E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84377E1
cs_ef1a_imon=3.01901E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.27452E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10973E1
os_restr1_imon=4.29756E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1523E1
os_ea1_imon=2.40524E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.08226E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25963E0
cs_ionrep_imon=9.76169E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93323E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01769E1
cs_anode1_imon=2.04142E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.243E-8
tplens_vset=1.4E-1
tplens_vmon=1.62753E0
tplens_imon=-3.15826E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27446E1
iondef3_imon=1.47813E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.56608E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02884E2
lens6_imon=2.98461E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=3.98484E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27064E0
ionrepsh_imon=9.41755E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33466E1
lens5b_imon=2.17407E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74542E1
cs_ef2b_imon=3.10589E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42707E0
os_ea2_imon=-6.25208E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00498E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71709E1
cs_ef2a_imon=3.19277E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0841E0
os_ef2alow_imon=-2.58501E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0534E-1
os_ef2bup_imon=-5.25053E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1095E1
os_restr2_imon=3.38739E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.29754E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01722E1
cs_anode2_imon=2.09703E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7312E1
iondef1_imon=1.06898E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68157E1
iondef4_imon=1.07044E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.40742E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=7.89893E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11682E0
cs_ionaccel_imon=-1.27484E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56272E1
einzel_imon=7.65656E-6
window_vset=0.0E0
window_vmon=1.66136E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39154E-4
mask2_vset=0.0E0
mask2_vmon=-1.86419E1
mask2_imon=-6.8752E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.41525E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.46973E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.10935E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.392E0
defgridb_imon=6.00391E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33246E1
os_fil1_imon=9.41667E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07016E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62467E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3068E1
cs_fil1_imon=9.23544E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31637E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65206E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.23262E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0282E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.83481E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34271E-1
cs_fil2_imon=-2.76186E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15938E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22051E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33297E-3
inlet_lpb_pmon=2.17835E-2
chamber_ion_pmon=2.15745E-9
chamber_cvt_pmon=2.5165E-3
foreline_cvt_pmon=2.5165E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.77741E-1
res40_imon=-2.44947E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0965E0	-8.16679E-1	-7.98702E-1	-9.1315E0	-9.14216E0	5.19753E-3	9.3174E-2	2.73117E1	-3.26573E1	-3.27077E1	2.68076E1	2.15726E-9	2.51919E-3	2.51919E-3	6.30212E-3	2.17829E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.16512E-1	-7.98893E-1	-9.13148E0	-9.14204E0	4.91142E-3	9.33647E-2	2.73057E1	-3.26734E1	-3.25437E1	2.68076E1	2.15519E-9	2.51225E-3	2.51225E-3	6.31288E-3	2.17633E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16536E-1	-7.98702E-1	-9.13184E0	-9.14202E0	5.17368E-3	9.35793E-2	2.72605E1	-3.26521E1	-3.2575E1	2.68211E1	2.15879E-9	2.52863E-3	2.52863E-3	6.29035E-3	2.18405E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16703E-1	-7.98655E-1	-9.13162E0	-9.14187E0	5.17368E-3	9.33409E-2	2.73104E1	-3.26897E1	-3.27428E1	2.67974E1	2.15275E-9	2.52025E-3	2.52025E-3	6.32328E-3	2.16374E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16488E-1	-7.98965E-1	-9.13148E0	-9.1418E0	5.03063E-3	9.3627E-2	2.72763E1	-3.2641E1	-3.25125E1	2.68142E1	2.15165E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.18477E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.16512E-1	-7.98726E-1	-9.13169E0	-9.14197E0	4.76837E-3	9.35316E-2	2.73381E1	-3.26561E1	-3.26974E1	2.68028E1	2.15987E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.17444E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16441E-1	-7.98965E-1	-9.13157E0	-9.14192E0	4.93526E-3	9.35793E-2	2.72971E1	-3.26646E1	-3.25372E1	2.6804E1	2.16085E-9	2.51525E-3	2.51525E-3	6.32896E-3	2.16991E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16727E-1	-7.98392E-1	-9.13181E0	-9.14195E0	4.76837E-3	9.34124E-2	2.72278E1	-3.26425E1	-3.26431E1	2.6807E1	2.15887E-9	2.51581E-3	2.51581E-3	6.29624E-3	2.17915E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16607E-1	-7.98512E-1	-9.13143E0	-9.14207E0	4.72069E-3	9.32932E-2	2.72979E1	-3.26591E1	-3.27534E1	2.67998E1	2.15073E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.17361E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16679E-1	-7.98416E-1	-9.13162E0	-9.1418E0	4.64916E-3	9.34124E-2	2.73351E1	-3.26663E1	-3.25371E1	2.6834E1	2.15409E-9	2.52362E-3	2.52362E-3	6.28511E-3	2.17529E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.16751E-1	-7.98059E-1	-9.13172E0	-9.14171E0	4.88758E-3	9.3627E-2	2.72823E1	-3.26524E1	-3.26831E1	2.68004E1	2.15624E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.16621E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16631E-1	-7.98297E-1	-9.13181E0	-9.14202E0	5.03063E-3	9.34124E-2	2.73155E1	-3.26637E1	-3.26028E1	2.68065E1	2.15894E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.1858E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.16345E-1	-7.98321E-1	-9.1316E0	-9.14207E0	4.88758E-3	9.35078E-2	2.7302E1	-3.2664E1	-3.25954E1	2.68034E1	2.15165E-9	2.52061E-3	2.52061E-3	6.34518E-3	2.17918E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.16369E-1	-7.98321E-1	-9.13148E0	-9.14223E0	4.57764E-3	9.35555E-2	2.73259E1	-3.26548E1	-3.26352E1	2.68207E1	2.15894E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.17444E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.16536E-1	-7.97915E-1	-9.1316E0	-9.14195E0	4.76837E-3	9.31501E-2	2.73243E1	-3.26747E1	-3.26645E1	2.68331E1	2.15887E-9	2.51581E-3	2.51581E-3	6.32418E-3	2.17722E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.16774E-1	-7.98464E-1	-9.13146E0	-9.14195E0	4.74453E-3	9.35316E-2	2.72769E1	-3.26867E1	-3.26284E1	2.68184E1	2.15894E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.17822E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.16369E-1	-7.9844E-1	-9.13136E0	-9.14171E0	5.10216E-3	9.33409E-2	2.73115E1	-3.26666E1	-3.25965E1	2.68154E1	2.15519E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.1839E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.16703E-1	-7.98655E-1	-9.1316E0	-9.14207E0	4.88758E-3	9.32932E-2	2.73016E1	-3.26756E1	-3.26732E1	2.6796E1	2.15455E-9	2.51709E-3	2.51709E-3	6.31269E-3	2.18194E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09348E0	-8.16607E-1	-7.98535E-1	-9.13179E0	-9.14216E0	5.126E-3	9.33886E-2	2.73454E1	-3.26557E1	-3.25673E1	2.67903E1	2.15992E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.17176E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09348E0	-8.16536E-1	-7.98583E-1	-9.13191E0	-9.14185E0	4.98295E-3	9.34362E-2	2.7312E1	-3.26585E1	-3.27446E1	2.68157E1	2.15745E-9	2.5165E-3	2.5165E-3	6.33297E-3	2.17835E-2