[Scan]
initial_time=2016-01-28T16:43:52
final_time=2016-01-28T16:44:11
ip_count=19
run=1026
dataset=2
scan=139
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08793E-4
ql1_vset=
ql1_vmon=-8.16798E-1
ql1_imon=1.37783E-8
ql2_vset=
ql2_vmon=-7.98702E-1
ql2_imon=1.97552E-9
ql3_vset=
ql3_vmon=-9.13162E0
ql3_imon=3.61395E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-6.25014E-11
mult1=-9.74516E-9
mult2=-2.80328E-9
rf_tmon=-1.02759E-2
rf_agc=2.67231E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=1.70038E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66193E0
bslens_imon=2.6459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20391E1
lens5a_imon=1.99317E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5376E1
cs_ef1b_imon=3.11425E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05102E1
cs_ea1_imon=1.2473E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42063E0
lens1_imon=2.71439E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64554E1
os_ef1alow_imon=2.96901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0366E1
cs_ea2_imon=1.42142E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=2.99928E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.27381E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10877E1
os_restr1_imon=4.29743E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1554E1
os_ea1_imon=2.40593E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23527E0
cs_ionrep_imon=9.53497E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93341E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.05035E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.2471E-8
tplens_vset=1.4E-1
tplens_vmon=1.60839E0
tplens_imon=-1.29913E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26474E1
iondef3_imon=1.49316E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2667E1
iondef2_imon=1.57824E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98425E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=3.94057E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2539E0
ionrepsh_imon=9.42682E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33898E1
lens5b_imon=2.18819E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43775E0
os_ea2_imon=-6.88681E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00561E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.18416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07018E0
os_ef2alow_imon=-2.62311E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18447E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11093E1
os_restr2_imon=3.40725E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23004E2
cs_ionfoca_imon=6.30793E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02001E1
cs_anode2_imon=2.10081E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72861E1
iondef1_imon=1.09445E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67836E1
iondef4_imon=1.08413E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.45301E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=7.89954E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-1.08421E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47295E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56225E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=1.74095E-1
window_imon=-1.08421E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.86536E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.56306E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.51762E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.67842E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42562E0
defgridb_imon=6.09945E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33276E1
os_fil1_imon=9.44078E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07461E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62612E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30652E1
cs_fil1_imon=9.23716E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30884E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65323E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33166E-2
os_fil2_imon=-2.64194E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.96753E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.4197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.41853E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22117E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.16621E-2
chamber_ion_pmon=2.15992E-9
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.70104E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.16822E-1	-7.98512E-1	-9.13153E0	-9.14185E0	4.91142E-3	9.32932E-2	2.73104E1	-3.26756E1	-3.26107E1	2.67891E1	2.158E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.18201E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16727E-1	-7.98345E-1	-9.1315E0	-9.14195E0	4.74453E-3	9.34601E-2	2.73014E1	-3.26621E1	-3.27105E1	2.68132E1	2.15716E-9	2.52599E-3	2.52599E-3	6.31278E-3	2.17918E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.1656E-1	-7.98321E-1	-9.13141E0	-9.14214E0	4.98295E-3	9.34839E-2	2.72727E1	-3.26631E1	-3.2564E1	2.67833E1	2.15696E-9	2.52139E-3	2.52139E-3	6.3074E-3	2.17722E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.16798E-1	-7.98392E-1	-9.13131E0	-9.14202E0	4.95911E-3	9.33647E-2	2.72865E1	-3.2638E1	-3.2644E1	2.68076E1	2.15636E-9	2.52131E-3	2.52131E-3	6.32858E-3	2.1565E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.16655E-1	-7.98702E-1	-9.13122E0	-9.14207E0	4.98295E-3	9.37939E-2	2.73279E1	-3.2629E1	-3.25936E1	2.6798E1	2.15706E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.16501E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.16298E-1	-7.98368E-1	-9.13119E0	-9.14214E0	5.19753E-3	9.35555E-2	2.72853E1	-3.26705E1	-3.25882E1	2.68268E1	2.15894E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.17066E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09627E0	-8.16631E-1	-7.98583E-1	-9.13115E0	-9.14192E0	5.07832E-3	9.34601E-2	2.73123E1	-3.26512E1	-3.25058E1	2.68172E1	2.15519E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.1839E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.16679E-1	-7.98368E-1	-9.13136E0	-9.14218E0	5.14984E-3	9.34839E-2	2.72823E1	-3.26711E1	-3.24247E1	2.68018E1	2.15613E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.18201E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.16751E-1	-7.98535E-1	-9.13126E0	-9.14185E0	5.19753E-3	9.34839E-2	2.72833E1	-3.27157E1	-3.26691E1	2.678E1	2.16085E-9	2.52169E-3	2.52169E-3	6.29665E-3	2.17547E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.16822E-1	-7.98821E-1	-9.13119E0	-9.1419E0	4.98295E-3	9.32693E-2	2.72859E1	-3.26687E1	-3.27185E1	2.6813E1	2.15987E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.16125E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16727E-1	-7.98392E-1	-9.13126E0	-9.14211E0	4.98295E-3	9.32932E-2	2.73081E1	-3.26663E1	-3.26801E1	2.6795E1	2.15992E-9	2.52276E-3	2.52276E-3	6.32896E-3	2.17176E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09619E0	-8.16631E-1	-7.98559E-1	-9.13148E0	-9.14202E0	4.8399E-3	9.36508E-2	2.73104E1	-3.26496E1	-3.25688E1	2.68178E1	2.15505E-9	2.52139E-3	2.52139E-3	6.31858E-3	2.17529E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.16584E-1	-7.98416E-1	-9.13153E0	-9.14195E0	5.126E-3	9.37939E-2	2.72947E1	-3.26927E1	-3.24705E1	2.6807E1	2.15808E-9	2.51739E-3	2.51739E-3	6.33436E-3	2.17918E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16464E-1	-7.98631E-1	-9.13136E0	-9.14168E0	5.31673E-3	9.35078E-2	2.72949E1	-3.26651E1	-3.25347E1	2.68268E1	2.15505E-9	2.52585E-3	2.52585E-3	6.30182E-3	2.17722E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16679E-1	-7.98583E-1	-9.13136E0	-9.1419E0	5.48363E-3	9.32693E-2	2.73087E1	-3.26933E1	-3.27029E1	2.68196E1	2.16175E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.17633E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.16417E-1	-7.98488E-1	-9.13138E0	-9.14216E0	5.38826E-3	9.32455E-2	2.72951E1	-3.26644E1	-3.26042E1	2.68334E1	2.16085E-9	2.51954E-3	2.51954E-3	6.29128E-3	2.17361E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09364E0	-8.16584E-1	-7.98345E-1	-9.13169E0	-9.14183E0	4.86374E-3	9.35555E-2	2.73472E1	-3.26464E1	-3.25527E1	2.68004E1	2.15613E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.16878E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.16894E-1	-7.98488E-1	-9.13138E0	-9.14204E0	4.8399E-3	9.377E-2	2.73039E1	-3.26425E1	-3.27381E1	2.68001E1	2.16081E-9	2.51662E-3	2.51662E-3	6.29645E-3	2.17633E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.1687E-1	-7.98535E-1	-9.13167E0	-9.14178E0	5.26905E-3	9.38416E-2	2.73322E1	-3.26874E1	-3.2649E1	2.6801E1	2.159E-9	2.52276E-3	2.52276E-3	6.29128E-3	2.16806E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.16798E-1	-7.98702E-1	-9.13162E0	-9.14187E0	5.07832E-3	9.36985E-2	2.72861E1	-3.2667E1	-3.26474E1	2.67836E1	2.15992E-9	2.52492E-3	2.52492E-3	6.31817E-3	2.16621E-2