[Scan]
initial_time=2016-01-28T16:44:45
final_time=2016-01-28T16:45:05
ip_count=19
run=1026
dataset=2
scan=141
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.0878E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.37461E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=1.97587E-9
ql3_vset=
ql3_vmon=-9.13196E0
ql3_imon=3.63612E-10
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=-6.49452E-11
mult1=-1.01136E-8
mult2=-2.72859E-9
rf_tmon=-3.10048E-3
rf_agc=3.52622E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=1.6956E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67388E0
bslens_imon=2.57511E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20178E1
lens5a_imon=1.97908E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.04898E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53435E1
cs_ef1b_imon=3.11041E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05324E1
cs_ea1_imon=1.24607E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37374E0
lens1_imon=2.61051E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64713E1
os_ef1alow_imon=2.98148E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04162E1
cs_ea2_imon=1.39968E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84191E1
cs_ef1a_imon=3.00754E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.27798E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.29061E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14763E1
os_ea1_imon=2.41337E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63595E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24443E0
cs_ionrep_imon=9.68932E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93296E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01943E1
cs_anode1_imon=2.04907E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.25515E-8
tplens_vset=1.4E-1
tplens_vmon=1.65323E0
tplens_imon=-3.59057E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25329E1
iondef3_imon=1.51046E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26428E1
iondef2_imon=1.56249E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02883E2
lens6_imon=2.98452E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=3.96725E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30578E0
ionrepsh_imon=9.30353E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33333E1
lens5b_imon=2.18295E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74553E1
cs_ef2b_imon=3.12431E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45325E0
os_ea2_imon=-7.5901E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00456E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70991E1
cs_ef2a_imon=3.17053E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08004E0
os_ef2alow_imon=-2.54678E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9028E-1
os_ef2bup_imon=-5.36174E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10828E1
os_restr2_imon=3.39434E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.31804E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01908E1
cs_anode2_imon=2.10502E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72919E1
iondef1_imon=1.10909E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68196E1
iondef4_imon=1.08816E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.42198E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=7.91884E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11972E0
cs_ionaccel_imon=-1.12193E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47282E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56087E1
einzel_imon=7.58011E-6
window_vset=0.0E0
window_vmon=1.64978E-1
window_imon=-1.08717E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39143E-4
mask2_vset=0.0E0
mask2_vmon=-1.86784E1
mask2_imon=-6.73619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.3073E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.64189E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.22944E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44099E0
defgridb_imon=6.21716E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33265E1
os_fil1_imon=9.43312E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.073E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62893E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30702E1
cs_fil1_imon=9.24233E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30305E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6543E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24325E-2
os_fil2_imon=-2.61706E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99924E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.66584E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32773E-1
cs_fil2_imon=-2.64602E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06092E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22083E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34588E-3
inlet_lpb_pmon=2.16878E-2
chamber_ion_pmon=2.158E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40017E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.50721E-1
res40_imon=-2.446E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=188
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.1656E-1	-7.98178E-1	-9.1316E0	-9.14185E0	4.95911E-3	9.37223E-2	2.73259E1	-3.26578E1	-3.26144E1	2.67845E1	2.15636E-9	2.52342E-3	2.52342E-3	6.31798E-3	2.17829E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.1656E-1	-7.98416E-1	-9.13165E0	-9.14173E0	4.93526E-3	9.34362E-2	2.73201E1	-3.2644E1	-3.25503E1	2.68124E1	2.15505E-9	2.51693E-3	2.51693E-3	6.27954E-3	2.17529E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.16536E-1	-7.98559E-1	-9.13141E0	-9.14156E0	4.8399E-3	9.34362E-2	2.73092E1	-3.26378E1	-3.26331E1	2.68163E1	2.15887E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.18881E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.16584E-1	-7.98702E-1	-9.13153E0	-9.14168E0	4.98295E-3	9.35316E-2	2.73454E1	-3.26657E1	-3.26759E1	2.6789E1	2.159E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.16621E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.16655E-1	-7.98202E-1	-9.13162E0	-9.14185E0	4.91142E-3	9.34124E-2	2.73057E1	-3.26425E1	-3.26006E1	2.68178E1	2.15533E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.18104E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.16512E-1	-7.98345E-1	-9.13169E0	-9.14207E0	5.17368E-3	9.36031E-2	2.72931E1	-3.26579E1	-3.2623E1	2.67836E1	2.15753E-9	2.51935E-3	2.51935E-3	6.30192E-3	2.18295E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16417E-1	-7.98702E-1	-9.13193E0	-9.14211E0	5.10216E-3	9.3317E-2	2.72871E1	-3.26236E1	-3.26909E1	2.68112E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.16083E-1	-7.98559E-1	-9.13177E0	-9.14228E0	5.126E-3	9.33886E-2	2.73147E1	-3.26512E1	-3.26422E1	2.67974E1	2.15706E-9	2.52592E-3	2.52592E-3	6.32661E-3	2.17349E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16321E-1	-7.98512E-1	-9.13172E0	-9.14192E0	5.03063E-3	9.33409E-2	2.72769E1	-3.26561E1	-3.25383E1	2.68016E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16178E-1	-7.98798E-1	-9.13143E0	-9.14183E0	5.29289E-3	9.34601E-2	2.73039E1	-3.26831E1	-3.26723E1	2.68118E1	2.15238E-9	2.53087E-3	2.53087E-3	6.30192E-3	2.17444E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16321E-1	-7.9875E-1	-9.13174E0	-9.14202E0	5.34058E-3	9.32455E-2	2.72769E1	-3.26506E1	-3.26452E1	2.67938E1	2.15349E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.1829E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16727E-1	-7.98774E-1	-9.13162E0	-9.14185E0	4.98295E-3	9.32455E-2	2.73123E1	-3.26975E1	-3.25557E1	2.68175E1	2.15519E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.16125E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.16679E-1	-7.98583E-1	-9.1315E0	-9.14187E0	4.60148E-3	9.32693E-2	2.73039E1	-3.26467E1	-3.27068E1	2.6843E1	2.15519E-9	2.5188E-3	2.5188E-3	6.28552E-3	2.17255E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.16488E-1	-7.98774E-1	-9.13146E0	-9.14192E0	4.88758E-3	9.33886E-2	2.73089E1	-3.26557E1	-3.26223E1	2.67992E1	2.16081E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.1839E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16965E-1	-7.98583E-1	-9.13155E0	-9.14173E0	4.98295E-3	9.33886E-2	2.72732E1	-3.26882E1	-3.26515E1	2.6803E1	2.1547E-9	2.52135E-3	2.52135E-3	6.31364E-3	2.17313E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16774E-1	-7.98345E-1	-9.13167E0	-9.14195E0	5.24521E-3	9.34839E-2	2.72737E1	-3.26422E1	-3.25287E1	2.68001E1	2.1602E-9	2.52151E-3	2.52151E-3	6.31711E-3	2.17091E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16822E-1	-7.98512E-1	-9.13177E0	-9.14185E0	4.98295E-3	9.34124E-2	2.73057E1	-3.26735E1	-3.2596E1	2.67902E1	2.15005E-9	2.52051E-3	2.52051E-3	6.28893E-3	2.18011E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.1656E-1	-7.98488E-1	-9.13167E0	-9.1418E0	4.79221E-3	9.32932E-2	2.73177E1	-3.26645E1	-3.26873E1	2.67595E1	2.15716E-9	2.5131E-3	2.5131E-3	6.3074E-3	2.16621E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.16512E-1	-7.98774E-1	-9.13177E0	-9.14202E0	4.86374E-3	9.32217E-2	2.73157E1	-3.26685E1	-3.24661E1	2.68286E1	2.15987E-9	2.52538E-3	2.52538E-3	6.3514E-3	2.18011E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16464E-1	-7.98655E-1	-9.13196E0	-9.14173E0	4.91142E-3	9.31978E-2	2.72919E1	-3.26428E1	-3.25329E1	2.68196E1	2.158E-9	2.5188E-3	2.5188E-3	6.34588E-3	2.16878E-2