[Scan]
initial_time=2016-01-28T16:45:12
final_time=2016-01-28T16:45:32
ip_count=19
run=1026
dataset=2
scan=142
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.0878E-4
ql1_vset=
ql1_vmon=-8.16774E-1
ql1_imon=1.38038E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=1.99146E-9
ql3_vset=
ql3_vmon=-9.13167E0
ql3_imon=3.83234E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-7.39336E-11
mult1=-9.78855E-9
mult2=-2.88828E-9
rf_tmon=-6.05054E-3
rf_agc=3.18375E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=1.66814E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65052E0
bslens_imon=2.4981E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20061E1
lens5a_imon=1.99317E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.04808E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53724E1
cs_ef1b_imon=3.10271E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02348E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05138E1
cs_ea1_imon=1.26172E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41161E0
lens1_imon=2.76486E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.43187E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=3.01297E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.28867E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.30427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15354E1
os_ea1_imon=2.39476E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24489E0
cs_ionrep_imon=9.63591E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.9351E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=2.04999E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.24525E-8
tplens_vset=1.4E-1
tplens_vmon=1.63302E0
tplens_imon=-3.13766E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27918E1
iondef3_imon=1.48775E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26927E1
iondef2_imon=1.55733E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02885E2
lens6_imon=2.98555E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.99936E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31278E0
ionrepsh_imon=9.46647E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33429E1
lens5b_imon=2.17089E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.13263E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44977E0
os_ea2_imon=-6.56236E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.18885E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07318E0
os_ef2alow_imon=-2.6123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0283E-1
os_ef2bup_imon=-5.38375E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10901E1
os_restr2_imon=3.39355E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.3137E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.10225E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72558E1
iondef1_imon=1.084E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6798E1
iondef4_imon=1.07909E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.53335E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.95503E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13975E0
cs_ionaccel_imon=-1.00132E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.4714E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=1.77098E-1
window_imon=-1.12746E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.86368E1
mask2_imon=-7.45441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.71447E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.46715E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.11244E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44668E0
defgridb_imon=5.9192E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3328E1
os_fil1_imon=9.41819E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07642E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62404E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30666E1
cs_fil1_imon=9.23902E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29442E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65165E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15109E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.08741E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.46775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05813E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22006E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.17918E-2
chamber_ion_pmon=2.15533E-9
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.665E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.16369E-1	-7.98225E-1	-9.1316E0	-9.14223E0	4.93526E-3	9.30548E-2	2.73149E1	-3.27077E1	-3.26289E1	2.6774E1	2.15716E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.17918E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.16369E-1	-7.98345E-1	-9.13153E0	-9.14216E0	4.95911E-3	9.32455E-2	2.7307E1	-3.26547E1	-3.26341E1	2.68126E1	2.15165E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.16436E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16584E-1	-7.98178E-1	-9.13174E0	-9.14216E0	5.126E-3	9.35078E-2	2.72738E1	-3.26333E1	-3.26881E1	2.6816E1	2.15791E-9	2.51359E-3	2.51359E-3	6.34661E-3	2.18108E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16345E-1	-7.98345E-1	-9.13188E0	-9.14254E0	4.86374E-3	9.33409E-2	2.72931E1	-3.26945E1	-3.25113E1	2.6795E1	2.15736E-9	2.52197E-3	2.52197E-3	6.3282E-3	2.1864E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.16512E-1	-7.9813E-1	-9.13181E0	-9.14235E0	5.03063E-3	9.3174E-2	2.72979E1	-3.26573E1	-3.27119E1	2.68058E1	2.15572E-9	2.51918E-3	2.51918E-3	6.31283E-3	2.17496E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.16512E-1	-7.98225E-1	-9.13196E0	-9.14199E0	4.98295E-3	9.36985E-2	2.72883E1	-3.26416E1	-3.25317E1	2.68184E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.16321E-1	-7.98202E-1	-9.1315E0	-9.14214E0	5.17368E-3	9.36031E-2	2.73045E1	-3.26458E1	-3.26026E1	2.681E1	2.15791E-9	2.51804E-3	2.51804E-3	6.31858E-3	2.17529E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16655E-1	-7.97939E-1	-9.13157E0	-9.14209E0	4.93526E-3	9.34601E-2	2.73257E1	-3.26756E1	-3.26655E1	2.68111E1	2.15716E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.16067E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.16536E-1	-7.98178E-1	-9.13181E0	-9.14209E0	4.673E-3	9.33886E-2	2.73375E1	-3.26378E1	-3.25092E1	2.6833E1	2.15533E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.18104E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.16464E-1	-7.98059E-1	-9.13179E0	-9.14192E0	4.60148E-3	9.34601E-2	2.73306E1	-3.2666E1	-3.27199E1	2.6781E1	2.15613E-9	2.53087E-3	2.53087E-3	6.30192E-3	2.17822E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16655E-1	-7.98011E-1	-9.13181E0	-9.14207E0	4.86374E-3	9.38654E-2	2.73045E1	-3.2682E1	-3.25401E1	2.67914E1	2.15847E-9	2.52428E-3	2.52428E-3	6.31014E-3	2.17255E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.1718E-1	-7.98011E-1	-9.13148E0	-9.14221E0	4.74453E-3	9.36985E-2	2.72426E1	-3.26478E1	-3.27316E1	2.6798E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.16965E-1	-7.98392E-1	-9.13155E0	-9.14214E0	4.81606E-3	9.34124E-2	2.7357E1	-3.2659E1	-3.2593E1	2.68018E1	2.15706E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.18201E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.1687E-1	-7.98368E-1	-9.13143E0	-9.14185E0	4.79221E-3	9.36747E-2	2.72672E1	-3.26705E1	-3.26981E1	2.68013E1	2.15726E-9	2.51498E-3	2.51498E-3	6.34982E-3	2.17829E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.16584E-1	-7.98631E-1	-9.13179E0	-9.14192E0	4.76837E-3	9.37462E-2	2.72986E1	-3.26313E1	-3.26573E1	2.68123E1	2.15706E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.17633E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.16798E-1	-7.98321E-1	-9.13198E0	-9.14159E0	5.00679E-3	9.3627E-2	2.73225E1	-3.26278E1	-3.25809E1	2.68124E1	2.15706E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.17822E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.16631E-1	-7.98583E-1	-9.13169E0	-9.14166E0	4.88758E-3	9.35793E-2	2.72567E1	-3.26838E1	-3.24142E1	2.68118E1	2.159E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.17547E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.16703E-1	-7.98631E-1	-9.13136E0	-9.14187E0	5.10216E-3	9.3627E-2	2.73322E1	-3.26602E1	-3.2472E1	2.67885E1	2.15706E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.17444E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.1687E-1	-7.98607E-1	-9.13143E0	-9.14185E0	4.98295E-3	9.35316E-2	2.72702E1	-3.26416E1	-3.26957E1	2.68094E1	2.15716E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.18104E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16774E-1	-7.98464E-1	-9.13167E0	-9.14204E0	5.14984E-3	9.32693E-2	2.72558E1	-3.26927E1	-3.27918E1	2.6798E1	2.15533E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.17918E-2