[Scan]
initial_time=2016-01-28T16:45:39
final_time=2016-01-28T16:45:58
ip_count=19
run=1026
dataset=2
scan=143
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.0875E-4
ql1_vset=
ql1_vmon=-8.16131E-1
ql1_imon=1.37651E-8
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=2.05203E-9
ql3_vset=
ql3_vmon=-9.13174E0
ql3_imon=3.75438E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-6.15716E-11
mult1=-9.68851E-9
mult2=-2.74481E-9
rf_tmon=-5.49461E-3
rf_agc=3.23299E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.70456E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61447E0
bslens_imon=2.32867E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20001E1
lens5a_imon=1.99172E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.04794E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54107E1
cs_ef1b_imon=3.12674E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04658E2
lens23_imon=1.02283E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04622E1
cs_ea1_imon=1.23216E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42904E0
lens1_imon=2.91627E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64203E1
os_ef1alow_imon=2.97244E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03738E1
cs_ea2_imon=1.37888E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84701E1
cs_ef1a_imon=3.00824E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.27533E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11019E1
os_restr1_imon=4.29304E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15384E1
os_ea1_imon=2.42324E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64058E1
os_ef1bup_imon=3.07357E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20223E0
cs_ionrep_imon=9.416E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93629E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01659E1
cs_anode1_imon=2.05602E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.25598E-8
tplens_vset=1.4E-1
tplens_vmon=1.63122E0
tplens_imon=-5.15643E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26667E1
iondef3_imon=1.50686E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26885E1
iondef2_imon=1.56418E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98486E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=4.08385E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24188E0
ionrepsh_imon=9.17808E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3403E1
lens5b_imon=2.20333E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7482E1
cs_ef2b_imon=3.11736E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40471E0
os_ea2_imon=-8.36484E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00673E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70835E1
cs_ef2a_imon=3.20494E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10379E0
os_ef2alow_imon=-2.76225E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.36617E-1
os_ef2bup_imon=-5.45557E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11077E1
os_restr2_imon=3.40129E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23021E2
cs_ionfoca_imon=6.28486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01734E1
cs_anode2_imon=2.09181E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72845E1
iondef1_imon=1.12365E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68016E1
iondef4_imon=1.06175E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.39541E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.92856E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13825E0
cs_ionaccel_imon=-8.75184E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47011E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56295E1
einzel_imon=7.84075E-6
window_vset=0.0E0
window_vmon=1.96255E-1
window_imon=-1.20881E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39282E-4
mask2_vset=0.0E0
mask2_vmon=-1.86176E1
mask2_imon=-7.5355E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92601E3
multa_neg_imon=7.53422E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.1391E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.39002E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43164E0
defgridb_imon=6.66542E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33264E1
os_fil1_imon=9.40155E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07028E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62347E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30741E1
cs_fil1_imon=9.22322E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.38124E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65274E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18979E-2
os_fil2_imon=-2.63443E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01661E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.07065E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34771E-1
cs_fil2_imon=-2.34483E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.4432E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22067E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.18011E-2
chamber_ion_pmon=2.158E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.98013E-1
res40_imon=-2.57111E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16393E-1	-7.98345E-1	-9.13169E0	-9.14245E0	5.24521E-3	9.35555E-2	2.72886E1	-3.26667E1	-3.25399E1	2.68142E1	2.159E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.1829E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.1625E-1	-7.97987E-1	-9.13165E0	-9.14202E0	4.74453E-3	9.39131E-2	2.7318E1	-3.26578E1	-3.25232E1	2.67695E1	2.15425E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.16689E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.16441E-1	-7.98106E-1	-9.13148E0	-9.14235E0	4.60148E-3	9.34601E-2	2.72827E1	-3.27039E1	-3.2577E1	2.68528E1	2.15526E-9	2.51809E-3	2.51809E-3	6.32099E-3	2.1834E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.16512E-1	-7.98297E-1	-9.13165E0	-9.14228E0	4.93526E-3	9.36747E-2	2.72925E1	-3.26867E1	-3.26296E1	2.6795E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.16345E-1	-7.98368E-1	-9.13186E0	-9.14209E0	4.86374E-3	9.32693E-2	2.72895E1	-3.26783E1	-3.27948E1	2.68088E1	2.158E-9	2.5199E-3	2.5199E-3	6.3514E-3	2.17822E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16393E-1	-7.98106E-1	-9.13191E0	-9.14192E0	4.8399E-3	9.33886E-2	2.72986E1	-3.26549E1	-3.27611E1	2.67968E1	2.158E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.17633E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16345E-1	-7.98273E-1	-9.13143E0	-9.14223E0	4.88758E-3	9.32693E-2	2.73129E1	-3.26494E1	-3.26368E1	2.68135E1	2.15519E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.17255E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.16321E-1	-7.98678E-1	-9.1315E0	-9.14199E0	5.24521E-3	9.31978E-2	2.72809E1	-3.26467E1	-3.27233E1	2.682E1	2.15716E-9	2.52492E-3	2.52492E-3	6.32896E-3	2.17361E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16202E-1	-7.98464E-1	-9.13169E0	-9.14223E0	4.95911E-3	9.31501E-2	2.72727E1	-3.26681E1	-3.27456E1	2.68142E1	2.15808E-9	2.51739E-3	2.51739E-3	6.34518E-3	2.17547E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16226E-1	-7.98416E-1	-9.13208E0	-9.14223E0	5.00679E-3	9.31978E-2	2.72973E1	-3.26603E1	-3.27336E1	2.67884E1	2.15894E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.17633E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09356E0	-8.16345E-1	-7.98345E-1	-9.13186E0	-9.14211E0	5.19753E-3	9.31501E-2	2.73133E1	-3.26535E1	-3.25973E1	2.68074E1	2.15706E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.17066E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.16226E-1	-7.98416E-1	-9.13188E0	-9.14192E0	5.00679E-3	9.30548E-2	2.73075E1	-3.26561E1	-3.25428E1	2.68058E1	2.15628E-9	2.51815E-3	2.51815E-3	6.31115E-3	2.17817E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09371E0	-8.16226E-1	-7.98297E-1	-9.13177E0	-9.14187E0	5.19753E-3	9.36747E-2	2.72898E1	-3.26744E1	-3.25428E1	2.68382E1	2.15332E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.1858E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.16226E-1	-7.98225E-1	-9.13186E0	-9.14195E0	5.34058E-3	9.32217E-2	2.72985E1	-3.26476E1	-3.25455E1	2.67963E1	2.15238E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.17822E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.15988E-1	-7.98035E-1	-9.13184E0	-9.14221E0	5.36442E-3	9.35078E-2	2.72654E1	-3.26675E1	-3.24602E1	2.68232E1	2.158E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.17255E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16131E-1	-7.98202E-1	-9.13169E0	-9.14192E0	5.19753E-3	9.3317E-2	2.73297E1	-3.26422E1	-3.24392E1	2.67992E1	2.15791E-9	2.51915E-3	2.51915E-3	6.31299E-3	2.17337E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.16083E-1	-7.98154E-1	-9.13186E0	-9.14228E0	5.38826E-3	9.29117E-2	2.73375E1	-3.26566E1	-3.24228E1	2.67613E1	2.15894E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.16689E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.16393E-1	-7.98082E-1	-9.1315E0	-9.14221E0	5.26905E-3	9.3174E-2	2.73173E1	-3.26532E1	-3.26104E1	2.68128E1	2.158E-9	2.51225E-3	2.51225E-3	6.34588E-3	2.19151E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16154E-1	-7.98106E-1	-9.13172E0	-9.14202E0	4.98295E-3	9.36508E-2	2.73021E1	-3.26446E1	-3.27041E1	2.67932E1	2.15726E-9	2.52131E-3	2.52131E-3	6.33388E-3	2.17829E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.16131E-1	-7.98416E-1	-9.13174E0	-9.14199E0	4.72069E-3	9.36508E-2	2.72845E1	-3.26885E1	-3.26667E1	2.68016E1	2.158E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.18011E-2