[Scan]
initial_time=2016-01-28T16:46:05
final_time=2016-01-28T16:46:25
ip_count=19
run=1026
dataset=2
scan=144
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08787E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.37269E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=2.02906E-9
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=4.19712E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-7.68423E-11
mult1=-1.03665E-8
mult2=-2.63877E-9
rf_tmon=-4.04979E-3
rf_agc=3.45713E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=1.69201E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64893E0
bslens_imon=2.68483E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19415E1
lens5a_imon=1.96637E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.0503E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53632E1
cs_ef1b_imon=3.11116E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02055E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=1.23871E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39592E0
lens1_imon=2.55635E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64913E1
os_ef1alow_imon=2.97649E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0406E1
cs_ea2_imon=1.40962E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83888E1
cs_ef1a_imon=3.00957E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.27486E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10896E1
os_restr1_imon=4.28546E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14657E1
os_ea1_imon=2.38841E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63746E1
os_ef1bup_imon=3.08936E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2482E0
cs_ionrep_imon=9.83302E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.9326E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=2.05596E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.24814E-8
tplens_vset=1.4E-1
tplens_vmon=1.6596E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.24806E1
iondef3_imon=1.50384E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.58521E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02892E2
lens6_imon=2.98626E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=3.96444E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3092E0
ionrepsh_imon=9.36582E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33743E1
lens5b_imon=2.17545E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.1205E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48051E0
os_ea2_imon=-6.6734E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.00529E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7083E1
cs_ef2a_imon=3.17655E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06169E0
os_ef2alow_imon=-2.64228E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91369E-1
os_ef2bup_imon=-5.31239E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10851E1
os_restr2_imon=3.40775E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.29111E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01925E1
cs_anode2_imon=2.098E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72913E1
iondef1_imon=1.07557E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67944E1
iondef4_imon=1.08601E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.49146E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.90204E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13209E0
cs_ionaccel_imon=-1.08926E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47378E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56392E1
einzel_imon=7.59832E-6
window_vset=0.0E0
window_vmon=1.783E-1
window_imon=-1.08537E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.3917E-4
mask2_vset=0.0E0
mask2_vmon=-1.86526E1
mask2_imon=-6.84462E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.12325E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.61712E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=6.95195E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.17612E0
defgridb_imon=6.11098E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33232E1
os_fil1_imon=9.42972E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07212E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62947E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3068E1
cs_fil1_imon=9.23497E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29976E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65471E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.23312E-2
os_fil2_imon=-2.50956E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89521E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.72608E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34406E-1
cs_fil2_imon=-2.74309E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24001E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22042E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.16991E-2
chamber_ion_pmon=2.15808E-9
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.70414E-1
res40_imon=-2.45545E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=230
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.16393E-1	-7.98583E-1	-9.13179E0	-9.1419E0	4.8399E-3	9.33647E-2	2.72901E1	-3.26777E1	-3.259E1	2.6792E1	2.15673E-9	2.51758E-3	2.51758E-3	6.32483E-3	2.18111E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.16441E-1	-7.98321E-1	-9.13157E0	-9.14211E0	5.26905E-3	9.35078E-2	2.72886E1	-3.26915E1	-3.26364E1	2.68101E1	2.158E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.17822E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.16369E-1	-7.98082E-1	-9.13177E0	-9.14176E0	4.95911E-3	9.34601E-2	2.72868E1	-3.26992E1	-3.26844E1	2.67926E1	2.15701E-9	2.51843E-3	2.51843E-3	6.31847E-3	2.17772E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.1625E-1	-7.98297E-1	-9.13148E0	-9.14214E0	5.00679E-3	9.3317E-2	2.72822E1	-3.26299E1	-3.25488E1	2.68166E1					
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.16822E-1	-7.98225E-1	-9.13153E0	-9.14168E0	4.8399E-3	9.32693E-2	2.73E1	-3.26693E1	-3.24841E1	2.68163E1	2.15571E-9	2.51956E-3	2.51956E-3	6.3023E-3	2.15731E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.16822E-1	-7.98082E-1	-9.1316E0	-9.14209E0	4.673E-3	9.35078E-2	2.72973E1	-3.26506E1	-3.27149E1	2.6798E1	2.1549E-9	2.51725E-3	2.51725E-3	6.33021E-3	2.17618E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16703E-1	-7.97987E-1	-9.13162E0	-9.14183E0	4.8399E-3	9.32932E-2	2.73027E1	-3.26602E1	-3.26744E1	2.6837E1	2.16175E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.1877E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16846E-1	-7.98202E-1	-9.1315E0	-9.14211E0	4.88758E-3	9.35078E-2	2.72528E1	-3.26807E1	-3.25719E1	2.68059E1	2.15716E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.17918E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.1687E-1	-7.97987E-1	-9.13172E0	-9.14207E0	5.03063E-3	9.38892E-2	2.72941E1	-3.26621E1	-3.26603E1	2.67932E1	2.15987E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.17066E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.1656E-1	-7.98059E-1	-9.13172E0	-9.14214E0	5.4121E-3	9.35793E-2	2.73122E1	-3.26638E1	-3.2557E1	2.67929E1	2.15791E-9	2.52362E-3	2.52362E-3	6.32418E-3	2.16377E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.16655E-1	-7.98059E-1	-9.13179E0	-9.14209E0	5.34058E-3	9.35793E-2	2.73039E1	-3.26663E1	-3.2629E1	2.67947E1	2.15624E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.17176E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.16536E-1	-7.98154E-1	-9.13177E0	-9.14209E0	5.45979E-3	9.36031E-2	2.73075E1	-3.26119E1	-3.25672E1	2.67986E1	2.15696E-9	2.51915E-3	2.51915E-3	6.29067E-3	2.17529E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.16464E-1	-7.98297E-1	-9.13172E0	-9.14195E0	4.98295E-3	9.35793E-2	2.72823E1	-3.26482E1	-3.27059E1	2.67938E1	2.15519E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.16313E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.16441E-1	-7.98416E-1	-9.13172E0	-9.14187E0	5.07832E-3	9.37223E-2	2.73747E1	-3.26714E1	-3.2636E1	2.68256E1	2.15332E-9	2.51771E-3	2.51771E-3	6.34588E-3	2.16689E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09364E0	-8.16751E-1	-7.98464E-1	-9.13198E0	-9.14176E0	4.98295E-3	9.33886E-2	2.73382E1	-3.26493E1	-3.25109E1	2.68178E1	2.15519E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.15563E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.16536E-1	-7.98273E-1	-9.13181E0	-9.14164E0	5.17368E-3	9.37223E-2	2.73207E1	-3.26515E1	-3.25101E1	2.6803E1	2.15613E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.17066E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.16679E-1	-7.98297E-1	-9.13186E0	-9.1418E0	5.31673E-3	9.34839E-2	2.73157E1	-3.26602E1	-3.24998E1	2.68196E1	2.16269E-9	2.51814E-3	2.51814E-3	6.31269E-3	2.18377E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.16679E-1	-7.98059E-1	-9.13179E0	-9.14192E0	5.22137E-3	9.35078E-2	2.72991E1	-3.26482E1	-3.26002E1	2.68178E1	2.15613E-9	2.52538E-3	2.52538E-3	6.29098E-3	2.18011E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-8.16417E-1	-7.98202E-1	-9.13148E0	-9.14199E0	5.34058E-3	9.38416E-2	2.73287E1	-3.26708E1	-3.26679E1	2.68192E1	2.15808E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.17918E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.16464E-1	-7.9844E-1	-9.13141E0	-9.1419E0	5.24521E-3	9.35555E-2	2.72913E1	-3.26609E1	-3.24806E1	2.67944E1	2.15808E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.16991E-2