[Scan]
initial_time=2016-01-28T16:46:59
final_time=2016-01-28T16:47:18
ip_count=19
run=1026
dataset=2
scan=146
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08794E-4
ql1_vset=
ql1_vmon=-8.16441E-1
ql1_imon=1.37505E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=2.05244E-9
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=3.88837E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-6.81996E-11
mult1=-9.34568E-9
mult2=-2.75657E-9
rf_tmon=-6.30867E-3
rf_agc=3.26366E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=1.70541E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64814E0
bslens_imon=2.49905E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19587E1
lens5a_imon=1.97186E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.04981E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53703E1
cs_ef1b_imon=3.1159E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04576E2
lens23_imon=1.0223E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05495E1
cs_ea1_imon=1.24749E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40159E0
lens1_imon=2.47172E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64547E1
os_ef1alow_imon=2.979E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03895E1
cs_ea2_imon=1.41074E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84702E1
cs_ef1a_imon=3.01087E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.28155E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1071E1
os_restr1_imon=4.29533E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15385E1
os_ea1_imon=2.37998E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63881E1
os_ef1bup_imon=3.08067E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27031E0
cs_ionrep_imon=9.85884E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93068E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=2.06062E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.2604E-8
tplens_vset=1.4E-1
tplens_vmon=1.60785E0
tplens_imon=-9.99351E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.25564E1
iondef3_imon=1.48348E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26449E1
iondef2_imon=1.60404E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02908E2
lens6_imon=2.98295E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=3.99004E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26291E0
ionrepsh_imon=9.42853E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33851E1
lens5b_imon=2.16311E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.11523E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45417E0
os_ea2_imon=-7.21505E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00688E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.19173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06407E0
os_ef2alow_imon=-2.64349E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76359E-1
os_ef2bup_imon=-5.31776E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10956E1
os_restr2_imon=3.40648E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23012E2
cs_ionfoca_imon=6.29348E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01748E1
cs_anode2_imon=2.10827E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7288E1
iondef1_imon=1.08663E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68124E1
iondef4_imon=1.07077E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.42897E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=7.92946E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12343E0
cs_ionaccel_imon=-1.01276E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47159E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56277E1
einzel_imon=7.83548E-6
window_vset=0.0E0
window_vmon=1.74944E-1
window_imon=-1.25435E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39168E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-8.28208E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.22912E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.76807E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.08569E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.17948E0
defgridb_imon=6.24896E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33247E1
os_fil1_imon=9.42672E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07698E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62294E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30715E1
cs_fil1_imon=9.24457E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.27976E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65431E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28346E-2
os_fil2_imon=-2.70574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90237E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.85742E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34233E-1
cs_fil2_imon=-2.59948E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.26649E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22043E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.17822E-2
chamber_ion_pmon=2.15987E-9
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.09354E-1
res40_imon=-2.64684E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.16512E-1	-7.98249E-1	-9.13141E0	-9.14211E0	4.95911E-3	9.36747E-2	2.73013E1	-3.26858E1	-3.26222E1	2.67829E1	2.15571E-9	2.51956E-3	2.51956E-3	6.32273E-3	2.17131E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09634E0	-8.16703E-1	-7.98249E-1	-9.13131E0	-9.14218E0	5.48363E-3	9.36031E-2	2.73027E1	-3.2629E1	-3.265E1	2.68082E1	2.1607E-9	2.52222E-3	2.52222E-3	6.33648E-3	2.17711E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.1656E-1	-7.98392E-1	-9.13177E0	-9.14199E0	5.38826E-3	9.36985E-2	2.73458E1	-3.26673E1	-3.26537E1	2.68388E1	2.15519E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.17444E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.16774E-1	-7.9844E-1	-9.1316E0	-9.14207E0	5.26905E-3	9.35793E-2	2.72973E1	-3.26518E1	-3.26639E1	2.68028E1	2.15711E-9	2.5246E-3	2.5246E-3	6.31555E-3	2.18058E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.16965E-1	-7.98559E-1	-9.13153E0	-9.14187E0	4.98295E-3	9.35793E-2	2.73225E1	-3.2647E1	-3.25161E1	2.68046E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.1687E-1	-7.98488E-1	-9.13172E0	-9.14156E0	5.07832E-3	9.35793E-2	2.72696E1	-3.26199E1	-3.25495E1	2.67818E1	2.158E-9	2.52647E-3	2.52647E-3	6.31837E-3	2.18011E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09696E0	-8.16584E-1	-7.98631E-1	-9.13172E0	-9.14187E0	5.29289E-3	9.35555E-2	2.72919E1	-3.26512E1	-3.26284E1	2.6789E1	2.15505E-9	2.52362E-3	2.52362E-3	6.3074E-3	2.17915E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09673E0	-8.16679E-1	-7.98631E-1	-9.13179E0	-9.14185E0	5.05447E-3	9.34124E-2	2.73027E1	-3.26413E1	-3.27386E1	2.68322E1	2.15425E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.17822E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.16679E-1	-7.98488E-1	-9.13165E0	-9.14178E0	4.76837E-3	9.32455E-2	2.73033E1	-3.26738E1	-3.2511E1	2.67938E1	2.15505E-9	2.51693E-3	2.51693E-3	6.33538E-3	2.17915E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09634E0	-8.16751E-1	-7.98821E-1	-9.13181E0	-9.14218E0	5.03063E-3	9.33647E-2	2.72402E1	-3.26779E1	-3.26862E1	2.67926E1	2.15808E-9	2.52599E-3	2.52599E-3	6.33977E-3	2.17361E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.16989E-1	-7.98249E-1	-9.13138E0	-9.14202E0	5.07832E-3	9.31978E-2	2.72945E1	-3.26797E1	-3.26602E1	2.68053E1	2.15716E-9	2.52599E-3	2.52599E-3	6.31817E-3	2.16621E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.16941E-1	-7.9844E-1	-9.13165E0	-9.14197E0	5.17368E-3	9.35793E-2	2.72951E1	-3.26467E1	-3.25316E1	2.67956E1	2.16085E-9	2.52923E-3	2.52923E-3	6.32356E-3	2.16991E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.16941E-1	-7.98178E-1	-9.13157E0	-9.14173E0	5.14984E-3	9.36031E-2	2.73003E1	-3.26386E1	-3.26723E1	2.6849E1	2.15624E-9	2.51954E-3	2.51954E-3	6.33977E-3	2.18104E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.16703E-1	-7.98249E-1	-9.1315E0	-9.14176E0	5.10216E-3	9.34124E-2	2.73183E1	-3.26669E1	-3.25954E1	2.67938E1	2.15894E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.1896E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16774E-1	-7.98559E-1	-9.13172E0	-9.14173E0	5.07832E-3	9.34601E-2	2.731E1	-3.27013E1	-3.26866E1	2.67902E1	2.15613E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.17444E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.16584E-1	-7.98655E-1	-9.13172E0	-9.14192E0	4.95911E-3	9.33647E-2	2.73027E1	-3.26597E1	-3.25034E1	2.67986E1	2.15791E-9	2.5147E-3	2.5147E-3	6.32978E-3	2.17529E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-8.16417E-1	-7.98464E-1	-9.13112E0	-9.14199E0	5.29289E-3	9.35316E-2	2.7312E1	-3.26585E1	-3.24748E1	2.68175E1	2.15332E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.1839E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16607E-1	-7.98368E-1	-9.13136E0	-9.14216E0	5.26905E-3	9.35316E-2	2.72702E1	-3.26676E1	-3.2754E1	2.67982E1	2.15997E-9	2.52765E-3	2.52765E-3	6.33919E-3	2.171E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16655E-1	-7.98631E-1	-9.13146E0	-9.14223E0	5.14984E-3	9.34601E-2	2.73231E1	-3.26645E1	-3.26188E1	2.67943E1	2.15791E-9	2.52473E-3	2.52473E-3	6.31299E-3	2.17722E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.16441E-1	-7.98655E-1	-9.1316E0	-9.14202E0	5.17368E-3	9.36508E-2	2.7288E1	-3.26449E1	-3.25564E1	2.68124E1	2.15987E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.17822E-2