[Scan]
initial_time=2016-01-28T16:47:25
final_time=2016-01-28T16:47:45
ip_count=19
run=1026
dataset=2
scan=147
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08774E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=1.37576E-8
ql2_vset=
ql2_vmon=-7.98202E-1
ql2_imon=2.00447E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=3.62337E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-3.73125E-11
mult1=-9.34305E-9
mult2=-2.75654E-9
rf_tmon=-4.29012E-3
rf_agc=3.39705E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=1.69187E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64992E0
bslens_imon=2.54496E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19628E1
lens5a_imon=1.98559E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.04988E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53472E1
cs_ef1b_imon=3.11136E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02099E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0467E1
cs_ea1_imon=1.24658E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42964E0
lens1_imon=2.71439E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65047E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03871E1
cs_ea2_imon=1.4243E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85109E1
cs_ef1a_imon=3.04E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.28765E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11658E1
os_restr1_imon=4.28517E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15342E1
os_ea1_imon=2.40737E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63497E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23467E0
cs_ionrep_imon=9.67196E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=2.03702E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.25685E-8
tplens_vset=1.4E-1
tplens_vmon=1.62701E0
tplens_imon=-3.20976E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26434E1
iondef3_imon=1.4928E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26747E1
iondef2_imon=1.57427E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02901E2
lens6_imon=2.98414E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=3.96572E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23588E0
ionrepsh_imon=9.33309E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33544E1
lens5b_imon=2.17702E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.12181E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.475E0
os_ea2_imon=-5.80532E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.716E1
cs_ef2a_imon=3.17407E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06357E0
os_ef2alow_imon=-2.48976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87213E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=3.39824E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.31082E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01773E1
cs_anode2_imon=2.09612E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72751E1
iondef1_imon=1.10166E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6786E1
iondef4_imon=1.07981E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.34116E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.92981E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.01574E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47367E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56351E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=2.01725E-1
window_imon=-1.10584E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.86446E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.86227E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.7195E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5016E3
multb_neg_imon=7.28908E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=6.18957E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33241E1
os_fil1_imon=9.43501E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07684E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63033E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3065E1
cs_fil1_imon=9.23643E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.25598E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65478E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33166E-2
os_fil2_imon=-2.67197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.69942E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.1494E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2143E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21986E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.34665E-1
res40_imon=-2.38525E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.16417E-1	-7.98702E-1	-9.13186E0	-9.14195E0	5.26905E-3	9.36747E-2	2.72943E1	-3.26476E1	-3.27708E1	2.68238E1	2.16081E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.18011E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.1656E-1	-7.98607E-1	-9.13162E0	-9.14216E0	5.00679E-3	9.36985E-2	2.73516E1	-3.26597E1	-3.25764E1	2.67824E1	2.15706E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.17444E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.16488E-1	-7.98488E-1	-9.13155E0	-9.14207E0	4.98295E-3	9.37462E-2	2.7286E1	-3.26729E1	-3.26191E1	2.68001E1	2.15696E-9	2.51581E-3	2.51581E-3	6.34099E-3	2.16952E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16679E-1	-7.98702E-1	-9.13129E0	-9.14214E0	5.00679E-3	9.39608E-2	2.73033E1	-3.26422E1	-3.26182E1	2.67854E1	2.15275E-9	2.52553E-3	2.52553E-3	6.31269E-3	2.15831E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16679E-1	-7.98345E-1	-9.1315E0	-9.14187E0	5.26905E-3	9.36747E-2	2.73364E1	-3.26638E1	-3.26602E1	2.68154E1	2.15706E-9	2.52099E-3	2.52099E-3	6.28552E-3	2.17633E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.16584E-1	-7.98321E-1	-9.13131E0	-9.14164E0	5.03063E-3	9.35793E-2	2.72618E1	-3.26122E1	-3.25659E1	2.6813E1	2.15716E-9	2.5131E-3	2.5131E-3	6.33436E-3	2.17918E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.16631E-1	-7.98464E-1	-9.1315E0	-9.14209E0	4.95911E-3	9.37462E-2	2.72787E1	-3.26753E1	-3.26681E1	2.67734E1	2.15847E-9	2.5188E-3	2.5188E-3	6.31014E-3	2.17066E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16655E-1	-7.98464E-1	-9.13148E0	-9.14216E0	5.29289E-3	9.36508E-2	2.73093E1	-3.265E1	-3.26194E1	2.68151E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16345E-1	-7.98297E-1	-9.13134E0	-9.14197E0	5.26905E-3	9.35316E-2	2.72974E1	-3.26608E1	-3.2649E1	2.67794E1	2.15706E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.17255E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16607E-1	-7.98154E-1	-9.1315E0	-9.14187E0	5.50747E-3	9.3627E-2	2.731E1	-3.26327E1	-3.2536E1	2.68016E1	2.15441E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.17547E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.16464E-1	-7.98392E-1	-9.1316E0	-9.14187E0	5.53131E-3	9.3627E-2	2.73092E1	-3.26779E1	-3.26726E1	2.67866E1	2.156E-9	2.52027E-3	2.52027E-3	6.31299E-3	2.17145E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16584E-1	-7.98368E-1	-9.13162E0	-9.14195E0	5.67436E-3	9.38177E-2	2.72915E1	-3.26809E1	-3.25245E1	2.6825E1	2.15533E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.17361E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16464E-1	-7.98702E-1	-9.13157E0	-9.14183E0	4.93526E-3	9.377E-2	2.72835E1	-3.26609E1	-3.26795E1	2.68208E1	2.15257E-9	2.51847E-3	2.51847E-3	6.34518E-3	2.17918E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16274E-1	-7.98512E-1	-9.13172E0	-9.14209E0	4.98295E-3	9.33647E-2	2.72974E1	-3.26449E1	-3.26166E1	2.6814E1	2.158E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.18201E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09642E0	-8.16369E-1	-7.98821E-1	-9.13153E0	-9.14199E0	4.93526E-3	9.3627E-2	2.72955E1	-3.26651E1	-3.26302E1	2.6813E1	2.15257E-9	2.51203E-3	2.51203E-3	6.32356E-3	2.18104E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16393E-1	-7.98678E-1	-9.13146E0	-9.14209E0	4.8399E-3	9.37939E-2	2.73149E1	-3.26891E1	-3.26456E1	2.68412E1	2.15987E-9	2.51116E-3	2.51116E-3	6.31288E-3	2.17255E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.16369E-1	-7.98202E-1	-9.1316E0	-9.1419E0	5.26905E-3	9.35078E-2	2.72676E1	-3.26467E1	-3.26327E1	2.68192E1	2.15762E-9	2.52169E-3	2.52169E-3	6.31009E-3	2.17176E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.16464E-1	-7.98512E-1	-9.13181E0	-9.14173E0	5.07832E-3	9.36747E-2	2.7302E1	-3.26516E1	-3.25667E1	2.68119E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16464E-1	-7.9813E-1	-9.13138E0	-9.14178E0	4.98295E-3	9.33647E-2	2.73165E1	-3.26711E1	-3.2617E1	2.68146E1	2.15654E-9	2.52174E-3	2.52174E-3	6.30187E-3	2.172E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.16417E-1	-7.98202E-1	-9.13124E0	-9.14199E0	5.17368E-3	9.36747E-2	2.72751E1	-3.26747E1	-3.26434E1	2.6786E1