[Scan]
initial_time=2016-01-28T16:48:19
final_time=2016-01-28T16:48:38
ip_count=19
run=1026
dataset=2
scan=149
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08739E-4
ql1_vset=
ql1_vmon=-8.16321E-1
ql1_imon=1.37872E-8
ql2_vset=
ql2_vmon=-7.9813E-1
ql2_imon=1.99677E-9
ql3_vset=
ql3_vmon=-9.13167E0
ql3_imon=3.4821E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-7.53641E-11
mult1=-9.75243E-9
mult2=-2.71063E-9
rf_tmon=-4.72872E-3
rf_agc=3.31894E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=1.68356E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63495E0
bslens_imon=2.53618E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19759E1
lens5a_imon=1.9851E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05189E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53604E1
cs_ef1b_imon=3.10992E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.0204E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04917E1
cs_ea1_imon=1.2489E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38318E0
lens1_imon=2.61051E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03832E1
cs_ea2_imon=1.42233E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84929E1
cs_ef1a_imon=3.01333E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.28166E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.29022E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14775E1
os_ea1_imon=2.42363E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24974E0
cs_ionrep_imon=9.57252E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91853E2
cs_nozzle_imon=1.93243E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=2.05864E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.24577E-8
tplens_vset=1.4E-1
tplens_vmon=1.59424E0
tplens_imon=-2.91808E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2486E1
iondef3_imon=1.50657E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26386E1
iondef2_imon=1.59718E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98551E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.99046E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25033E0
ionrepsh_imon=9.31769E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33781E1
lens5b_imon=2.17304E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45148E0
os_ea2_imon=-6.77604E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00474E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71005E1
cs_ef2a_imon=3.18488E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06837E0
os_ef2alow_imon=-2.62311E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94421E-1
os_ef2bup_imon=-5.47745E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=3.39824E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.30848E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.09757E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72895E1
iondef1_imon=1.07087E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.08089E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.50941E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.90015E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11032E0
cs_ionaccel_imon=-1.22837E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47241E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=1.68088E-1
window_imon=-9.32847E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.38987E-4
mask2_vset=0.0E0
mask2_vmon=-1.8641E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=6.99583E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.46138E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.42764E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.14866E0
defgridb_imon=6.11806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33268E1
os_fil1_imon=9.44504E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07257E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62424E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30641E1
cs_fil1_imon=9.23661E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.2698E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65276E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31923E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.7549E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.96198E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.86419E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.80044E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22046E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.16621E-2
chamber_ion_pmon=2.15808E-9
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.95332E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09371E0	-8.16011E-1	-7.98774E-1	-9.13162E0	-9.14183E0	5.00679E-3	9.37939E-2	2.72951E1	-3.26756E1	-3.24756E1	2.68036E1	2.15706E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.17633E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.16274E-1	-7.98702E-1	-9.1316E0	-9.14185E0	5.05447E-3	9.39846E-2	2.72855E1	-3.26493E1	-3.25917E1	2.67968E1	2.15349E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.1885E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.16035E-1	-7.98297E-1	-9.13124E0	-9.14202E0	5.03063E-3	9.35316E-2	2.73097E1	-3.26852E1	-3.26203E1	2.6825E1	2.15894E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.16689E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.16083E-1	-7.98249E-1	-9.13129E0	-9.14226E0	4.95911E-3	9.35793E-2	2.73273E1	-3.26669E1	-3.26338E1	2.6822E1	2.15997E-9	2.51603E-3	2.51603E-3	6.32328E-3	2.16736E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16441E-1	-7.98249E-1	-9.13138E0	-9.14202E0	4.8399E-3	9.34839E-2	2.73387E1	-3.26603E1	-3.26272E1	2.68106E1	2.15894E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.1858E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-8.16011E-1	-7.98225E-1	-9.13165E0	-9.14187E0	4.86374E-3	9.34839E-2	2.72889E1	-3.2653E1	-3.25846E1	2.68004E1	2.15425E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.18011E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.16011E-1	-7.98368E-1	-9.1316E0	-9.14166E0	4.98295E-3	9.35316E-2	2.72961E1	-3.26765E1	-3.2584E1	2.68274E1	2.15706E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.17822E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.15964E-1	-7.98655E-1	-9.1315E0	-9.1418E0	4.88758E-3	9.34839E-2	2.72977E1	-3.26742E1	-3.25356E1	2.68136E1	2.15894E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.17822E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16178E-1	-7.98297E-1	-9.13141E0	-9.1418E0	5.03063E-3	9.35316E-2	2.73411E1	-3.26808E1	-3.24796E1	2.68153E1	2.15808E-9	2.52079E-3	2.52079E-3	6.32536E-3	2.18166E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16131E-1	-7.98678E-1	-9.13131E0	-9.14209E0	5.03063E-3	9.34601E-2	2.7303E1	-3.26585E1	-3.24313E1	2.68142E1	2.16159E-9	2.5169E-3	2.5169E-3	6.3074E-3	2.1646E-2
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.1625E-1	-7.98249E-1	-9.13148E0	-9.1418E0	4.88758E-3	9.35078E-2	2.72934E1	-3.26551E1	-3.24588E1	2.67836E1	2.15736E-9	2.52042E-3	2.52042E-3	6.323E-3	2.17071E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16417E-1	-7.98225E-1	-9.13122E0	-9.14218E0	5.14984E-3	9.33886E-2	2.73248E1	-3.26534E1	-3.24619E1	2.67516E1	2.16007E-9	2.52262E-3	2.52262E-3	6.29721E-3	2.18188E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.16298E-1	-7.98392E-1	-9.13162E0	-9.14187E0	5.05447E-3	9.33409E-2	2.72797E1	-3.26337E1	-3.26225E1	2.68188E1	2.15872E-9	2.51758E-3	2.51758E-3	6.28423E-3	2.17711E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16488E-1	-7.98655E-1	-9.13172E0	-9.14183E0	4.8399E-3	9.35078E-2	2.72949E1	-3.27046E1	-3.2675E1	2.68117E1	2.15716E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.17732E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.1656E-1	-7.98488E-1	-9.13148E0	-9.1419E0	4.60148E-3	9.36508E-2	2.73126E1	-3.26609E1	-3.26497E1	2.68126E1	2.15647E-9	2.52821E-3	2.52821E-3	6.3126E-3	2.17563E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.1625E-1	-7.98392E-1	-9.13148E0	-9.14223E0	4.86374E-3	9.34124E-2	2.73249E1	-3.27089E1	-3.2653E1	2.68112E1	2.15782E-9	2.52407E-3	2.52407E-3	6.3131E-3	2.17618E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09634E0	-8.16488E-1	-7.98297E-1	-9.13172E0	-9.14187E0	4.98295E-3	9.34362E-2	2.72915E1	-3.26673E1	-3.26874E1	2.67908E1	2.15425E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.17822E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16441E-1	-7.98416E-1	-9.13157E0	-9.14168E0	5.22137E-3	9.35555E-2	2.72971E1	-3.26891E1	-3.24919E1	2.68046E1	2.15808E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.17176E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.16178E-1	-7.98106E-1	-9.13179E0	-9.14187E0	5.14984E-3	9.35078E-2	2.736E1	-3.27027E1	-3.2472E1	2.68076E1	2.15791E-9	2.52473E-3	2.52473E-3	6.30182E-3	2.15803E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.16321E-1	-7.9813E-1	-9.13167E0	-9.14192E0	5.05447E-3	9.35793E-2	2.72895E1	-3.26386E1	-3.2486E1	2.68178E1	2.15808E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.16621E-2