[Scan]
initial_time=2016-01-28T16:48:45
final_time=2016-01-28T16:49:05
ip_count=19
run=1026
dataset=2
scan=150
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=1.37569E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=1.9748E-9
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=3.57866E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-3.6931E-11
mult1=-9.5357E-9
mult2=-2.6707E-9
rf_tmon=-5.15531E-3
rf_agc=3.23542E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=1.64994E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64203E0
bslens_imon=2.57157E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=1.99359E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.04828E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5385E1
cs_ef1b_imon=3.10487E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02337E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04793E1
cs_ea1_imon=1.22165E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40205E0
lens1_imon=2.59635E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64428E1
os_ef1alow_imon=2.98234E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0372E1
cs_ea2_imon=1.4103E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83679E1
cs_ef1a_imon=3.00829E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.28262E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11147E1
os_restr1_imon=4.29923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15046E1
os_ea1_imon=2.42469E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63984E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22732E0
cs_ionrep_imon=9.63623E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01719E1
cs_anode1_imon=2.05288E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.25232E-8
tplens_vset=1.4E-1
tplens_vmon=1.62846E0
tplens_imon=-3.83833E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25653E1
iondef3_imon=1.52214E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.57382E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02899E2
lens6_imon=2.98445E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=4.08376E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2521E0
ionrepsh_imon=9.25398E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3341E1
lens5b_imon=2.20773E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74814E1
cs_ef2b_imon=3.13515E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46092E0
os_ea2_imon=-9.00587E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00502E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71029E1
cs_ef2a_imon=3.18128E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.093E0
os_ef2alow_imon=-2.74204E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89615E-1
os_ef2bup_imon=-5.53511E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=3.4022E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.29468E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.10802E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72835E1
iondef1_imon=1.0921E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68148E1
iondef4_imon=1.08737E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.42239E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.90324E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10672E0
cs_ionaccel_imon=-1.03376E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.4719E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56075E1
einzel_imon=7.74911E-6
window_vset=0.0E0
window_vmon=1.6989E-1
window_imon=-1.07701E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.86494E1
mask2_imon=-9.11223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.66478E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.3906E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.54444E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4026E0
defgridb_imon=6.35874E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33247E1
os_fil1_imon=9.39597E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07059E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62638E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30633E1
cs_fil1_imon=9.22791E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.25238E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65235E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.40787E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80896E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.82277E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3263E-1
cs_fil2_imon=-2.71402E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.44005E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21986E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.17361E-2
chamber_ion_pmon=2.15624E-9
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.05543E-1
res40_imon=-2.48976E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.1656E-1	-7.98607E-1	-9.13136E0	-9.14235E0	4.79221E-3	9.3627E-2	2.72898E1	-3.26655E1	-3.25363E1	2.67968E1	2.15613E-9	2.5188E-3	2.5188E-3	6.34037E-3	2.17255E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09619E0	-8.16321E-1	-7.98464E-1	-9.13136E0	-9.14211E0	5.126E-3	9.32217E-2	2.73143E1	-3.26964E1	-3.24815E1	2.67968E1	2.15716E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.1829E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16464E-1	-7.98154E-1	-9.13155E0	-9.14199E0	4.72069E-3	9.30548E-2	2.72538E1	-3.26555E1	-3.2462E1	2.67966E1	2.15409E-9	2.51581E-3	2.51581E-3	6.3074E-3	2.17915E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.16393E-1	-7.98297E-1	-9.13174E0	-9.14197E0	5.03063E-3	9.32217E-2	2.73045E1	-3.26756E1	-3.25145E1	2.68166E1	2.15455E-9	2.52131E-3	2.52131E-3	6.32328E-3	2.18377E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16321E-1	-7.98249E-1	-9.13148E0	-9.14199E0	5.07832E-3	9.32693E-2	2.73303E1	-3.26879E1	-3.26164E1	2.67986E1	2.15425E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.18201E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16417E-1	-7.98488E-1	-9.13131E0	-9.14183E0	4.74453E-3	9.32693E-2	2.73002E1	-3.26383E1	-3.26438E1	2.68064E1	2.15332E-9	2.52538E-3	2.52538E-3	6.30192E-3	2.17444E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.16369E-1	-7.98297E-1	-9.1316E0	-9.14216E0	4.93526E-3	9.3174E-2	2.73104E1	-3.26714E1	-3.26213E1	2.68076E1	2.15706E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.18011E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.16464E-1	-7.98535E-1	-9.13143E0	-9.14207E0	4.98295E-3	9.34124E-2	2.72829E1	-3.26549E1	-3.24482E1	2.68202E1	2.15613E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.17066E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.16488E-1	-7.98321E-1	-9.13115E0	-9.14221E0	4.86374E-3	9.33886E-2	2.73075E1	-3.26767E1	-3.25582E1	2.6822E1	2.15706E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.17822E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-8.16822E-1	-7.98392E-1	-9.13134E0	-9.14242E0	5.19753E-3	9.33409E-2	2.73045E1	-3.26759E1	-3.25419E1	2.68094E1	2.15257E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.17918E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16584E-1	-7.98154E-1	-9.13138E0	-9.14195E0	5.07832E-3	9.34124E-2	2.72805E1	-3.26693E1	-3.26609E1	2.67995E1	2.158E-9	2.52757E-3	2.52757E-3	6.32386E-3	2.18201E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.16631E-1	-7.9844E-1	-9.13141E0	-9.14209E0	4.98295E-3	9.36031E-2	2.73003E1	-3.26771E1	-3.26014E1	2.68052E1	2.15808E-9	2.52061E-3	2.52061E-3	6.33977E-3	2.17918E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.16512E-1	-7.98225E-1	-9.13122E0	-9.14202E0	5.03063E-3	9.34124E-2	2.73039E1	-3.26649E1	-3.2462E1	2.68587E1	2.15696E-9	2.52027E-3	2.52027E-3	6.31299E-3	2.17145E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.16226E-1	-7.97915E-1	-9.13174E0	-9.14176E0	5.31673E-3	9.33647E-2	2.73279E1	-3.26675E1	-3.26008E1	2.67794E1	2.15624E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.16621E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.1625E-1	-7.97987E-1	-9.13179E0	-9.14178E0	4.88758E-3	9.34839E-2	2.73057E1	-3.26849E1	-3.26398E1	2.68118E1	2.15519E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.18201E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16202E-1	-7.98035E-1	-9.13179E0	-9.14176E0	4.69685E-3	9.35316E-2	2.73129E1	-3.26789E1	-3.26056E1	2.67986E1	2.15425E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.15938E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.16011E-1	-7.97987E-1	-9.13141E0	-9.14183E0	4.8399E-3	9.34124E-2	2.73004E1	-3.2675E1	-3.25936E1	2.67656E1	2.158E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.16501E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.16011E-1	-7.97796E-1	-9.13153E0	-9.14176E0	4.72069E-3	9.32932E-2	2.73165E1	-3.26831E1	-3.24331E1	2.68215E1	2.15349E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.18477E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16369E-1	-7.98273E-1	-9.13136E0	-9.14154E0	4.98295E-3	9.35555E-2	2.73225E1	-3.2632E1	-3.25227E1	2.68004E1	2.15519E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.15938E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16417E-1	-7.98321E-1	-9.13134E0	-9.14176E0	4.95911E-3	9.35078E-2	2.72835E1	-3.26554E1	-3.25653E1	2.68148E1	2.15624E-9	2.51203E-3	2.51203E-3	6.32896E-3	2.17361E-2