[Scan]
initial_time=2016-01-28T16:49:39
final_time=2016-01-28T16:49:58
ip_count=19
run=1026
dataset=2
scan=152
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08829E-4
ql1_vset=
ql1_vmon=-8.16369E-1
ql1_imon=1.36489E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=2.05287E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=3.71051E-10
ql4_vset=
ql4_vmon=-9.14171E0
ql4_imon=-5.94735E-11
mult1=-1.04322E-8
mult2=-2.73413E-9
rf_tmon=-4.86442E-3
rf_agc=3.37201E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=1.68897E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63967E0
bslens_imon=2.55742E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1973E1
lens5a_imon=1.98191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53607E1
cs_ef1b_imon=3.11902E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04959E1
cs_ea1_imon=1.24147E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40323E0
lens1_imon=2.71315E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64859E1
os_ef1alow_imon=2.96332E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03802E1
cs_ea2_imon=1.42658E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84014E1
cs_ef1a_imon=3.00579E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.27588E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.28387E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14975E1
os_ea1_imon=2.40629E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63491E1
os_ef1bup_imon=3.08398E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24974E0
cs_ionrep_imon=9.58668E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93296E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0198E1
cs_anode1_imon=2.04156E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.24805E-8
tplens_vset=1.4E-1
tplens_vmon=1.61961E0
tplens_imon=-3.02427E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25923E1
iondef3_imon=1.5048E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2686E1
iondef2_imon=1.57417E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98307E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=3.97003E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26803E0
ionrepsh_imon=9.27167E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3351E1
lens5b_imon=2.16773E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74472E1
cs_ef2b_imon=3.1176E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47626E0
os_ea2_imon=-6.20973E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.00566E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71311E1
cs_ef2a_imon=3.19085E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04011E0
os_ef2alow_imon=-2.62317E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2239E-1
os_ef2bup_imon=-5.23454E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10958E1
os_restr2_imon=3.40811E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.31592E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01526E1
cs_anode2_imon=2.0957E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72843E1
iondef1_imon=1.08184E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6846E1
iondef4_imon=1.08087E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.4237E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.91542E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13368E0
cs_ionaccel_imon=-9.91952E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47138E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56281E1
einzel_imon=7.70199E-6
window_vset=0.0E0
window_vmon=1.78889E-1
window_imon=-1.16887E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39229E-4
mask2_vset=0.0E0
mask2_vmon=-1.8658E1
mask2_imon=-7.51338E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.02061E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.65251E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.15157E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33469E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33219E1
os_fil1_imon=9.40686E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07424E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62631E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30574E1
cs_fil1_imon=9.23643E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30176E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64928E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17994E-2
os_fil2_imon=-2.69709E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.8616E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.73165E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33656E-1
cs_fil2_imon=-2.76196E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.18012E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21961E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.56005E-1
res40_imon=-2.53471E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=309
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.16298E-1	-7.98273E-1	-9.13129E0	-9.14159E0	5.00679E-3	9.35555E-2	2.73002E1	-3.26915E1	-3.26291E1	2.68106E1	2.15726E-9	2.52025E-3	2.52025E-3	6.29684E-3	2.17646E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16345E-1	-7.98082E-1	-9.13143E0	-9.1418E0	4.76837E-3	9.35793E-2	2.7302E1	-3.26522E1	-3.2689E1	2.67998E1	2.15505E-9	2.51804E-3	2.51804E-3	6.27954E-3	2.15612E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.16488E-1	-7.98297E-1	-9.13141E0	-9.14197E0	4.86374E-3	9.3627E-2	2.7334E1	-3.26714E1	-3.27664E1	2.6814E1	2.15673E-9	2.51874E-3	2.51874E-3	6.31321E-3	2.16313E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16512E-1	-7.98178E-1	-9.13143E0	-9.14178E0	4.93526E-3	9.39369E-2	2.73213E1	-3.26561E1	-3.25737E1	2.68328E1	2.15907E-9	2.51919E-3	2.51919E-3	6.33388E-3	2.16918E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.16393E-1	-7.98702E-1	-9.13143E0	-9.1418E0	5.05447E-3	9.37462E-2	2.72582E1	-3.26464E1	-3.24824E1	2.68166E1	2.15706E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.15938E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16274E-1	-7.98512E-1	-9.1316E0	-9.14204E0	5.17368E-3	9.35555E-2	2.73287E1	-3.2662E1	-3.25723E1	2.68028E1	2.15613E-9	2.51334E-3	2.51334E-3	6.32386E-3	2.16313E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16464E-1	-7.98583E-1	-9.13146E0	-9.14199E0	4.95911E-3	9.39846E-2	2.73288E1	-3.26946E1	-3.2646E1	2.68076E1	2.15987E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.16125E-2
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.16274E-1	-7.98059E-1	-9.13148E0	-9.14202E0	4.95911E-3	9.38177E-2	2.72662E1	-3.26974E1	-3.25942E1	2.67938E1	2.15982E-9	2.51915E-3	2.51915E-3	6.31858E-3	2.16569E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16202E-1	-7.98249E-1	-9.13153E0	-9.1418E0	4.76837E-3	9.39131E-2	2.72709E1	-3.26915E1	-3.26188E1	2.68743E1	2.159E-9	2.51954E-3	2.51954E-3	6.29665E-3	2.17732E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.16107E-1	-7.98368E-1	-9.13157E0	-9.14176E0	4.95911E-3	9.33886E-2	2.73237E1	-3.26182E1	-3.25527E1	2.6789E1	2.15887E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.18301E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.15988E-1	-7.98202E-1	-9.13162E0	-9.14187E0	5.10216E-3	9.3317E-2	2.73135E1	-3.26404E1	-3.25401E1	2.68196E1	2.15987E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.17066E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.1625E-1	-7.98321E-1	-9.13186E0	-9.14161E0	5.05447E-3	9.377E-2	2.72546E1	-3.26879E1	-3.24392E1	2.6804E1	2.15519E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.17633E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.16202E-1	-7.98535E-1	-9.13143E0	-9.14183E0	5.03063E-3	9.3627E-2	2.72889E1	-3.26813E1	-3.25611E1	2.68058E1	2.15441E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.17547E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.16321E-1	-7.98464E-1	-9.13157E0	-9.14207E0	4.95911E-3	9.34362E-2	2.73087E1	-3.26633E1	-3.28411E1	2.6807E1	2.15696E-9	2.52027E-3	2.52027E-3	6.3074E-3	2.1676E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16822E-1	-7.98535E-1	-9.13167E0	-9.14202E0	4.88758E-3	9.32693E-2	2.72918E1	-3.26845E1	-3.27135E1	2.67868E1	2.15349E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.16991E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16727E-1	-7.98392E-1	-9.13155E0	-9.14202E0	4.79221E-3	9.33886E-2	2.72961E1	-3.26597E1	-3.26681E1	2.6822E1	2.159E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.17547E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.16131E-1	-7.98249E-1	-9.13162E0	-9.14199E0	5.05447E-3	9.33886E-2	2.72967E1	-3.26524E1	-3.27738E1	2.68028E1	2.15894E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.1839E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16441E-1	-7.98273E-1	-9.13186E0	-9.14226E0	5.05447E-3	9.33647E-2	2.73346E1	-3.2675E1	-3.2672E1	2.67926E1	2.15533E-9	2.51739E-3	2.51739E-3	6.33436E-3	2.17176E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.16345E-1	-7.98416E-1	-9.13188E0	-9.14197E0	5.19753E-3	9.32932E-2	2.72856E1	-3.26897E1	-3.26467E1	2.6813E1	2.15572E-9	2.52026E-3	2.52026E-3	6.32099E-3	2.17496E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16369E-1	-7.98249E-1	-9.1315E0	-9.14171E0	5.00679E-3	9.36031E-2	2.72843E1	-3.2686E1	-3.25923E1	2.6846E1