[Scan]
initial_time=2016-01-28T16:50:32
final_time=2016-01-28T16:50:52
ip_count=19
run=1026
dataset=2
scan=154
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08826E-4
ql1_vset=
ql1_vmon=-8.16011E-1
ql1_imon=1.37296E-8
ql2_vset=
ql2_vmon=-7.98273E-1
ql2_imon=2.0243E-9
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=3.97444E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-3.16262E-11
mult1=-9.93304E-9
mult2=-2.71462E-9
rf_tmon=-4.61457E-3
rf_agc=3.28109E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=1.71607E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64918E0
bslens_imon=2.55562E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19903E1
lens5a_imon=1.99064E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05142E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53699E1
cs_ef1b_imon=3.11188E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02214E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04725E1
cs_ea1_imon=1.24357E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40594E0
lens1_imon=2.75593E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64518E1
os_ef1alow_imon=2.97451E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03986E1
cs_ea2_imon=1.40466E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83865E1
cs_ef1a_imon=3.00599E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.28329E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10842E1
os_restr1_imon=4.28586E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15398E1
os_ea1_imon=2.39549E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63812E1
os_ef1bup_imon=3.08755E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24128E0
cs_ionrep_imon=9.73293E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91902E2
cs_nozzle_imon=1.93327E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01915E1
cs_anode1_imon=2.05381E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.24507E-8
tplens_vset=1.4E-1
tplens_vmon=1.60946E0
tplens_imon=-3.86962E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27227E1
iondef3_imon=1.50115E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26218E1
iondef2_imon=1.57733E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98343E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=3.97272E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2615E0
ionrepsh_imon=9.25049E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33586E1
lens5b_imon=2.18362E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.11932E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46981E0
os_ea2_imon=-7.96046E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00456E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71167E1
cs_ef2a_imon=3.18286E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07316E0
os_ef2alow_imon=-2.69826E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96788E-1
os_ef2bup_imon=-5.34845E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10885E1
os_restr2_imon=3.39751E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.28913E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.10218E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72799E1
iondef1_imon=1.08614E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.08932E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.41044E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.9305E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12108E0
cs_ionaccel_imon=-1.14421E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47123E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56229E1
einzel_imon=7.70501E-6
window_vset=0.0E0
window_vmon=1.8784E-1
window_imon=-9.41009E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39121E-4
mask2_vset=0.0E0
mask2_vmon=-1.86559E1
mask2_imon=-6.49088E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.67058E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.56746E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.30946E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49872E0
defgridb_imon=6.01732E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33184E1
os_fil1_imon=9.40817E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07205E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62259E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30556E1
cs_fil1_imon=9.22792E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31552E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65025E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.32437E-2
os_fil2_imon=-2.58912E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89941E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.91323E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34381E-1
cs_fil2_imon=-2.71314E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12668E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21788E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.17337E-2
chamber_ion_pmon=2.156E-9
chamber_cvt_pmon=2.52473E-3
foreline_cvt_pmon=2.52473E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.54504E-1
res40_imon=-2.47216E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=283
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16107E-1	-7.98535E-1	-9.13124E0	-9.14199E0	5.22137E-3	9.36985E-2	2.7271E1	-3.26758E1	-3.26294E1	2.68065E1	2.15896E-9	2.52106E-3	2.52106E-3	6.34231E-3	2.17111E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.1594E-1	-7.98059E-1	-9.13126E0	-9.1418E0	5.55515E-3	9.32693E-2	2.73129E1	-3.26383E1	-3.25618E1	2.6787E1	2.15832E-9	2.51854E-3	2.51854E-3	6.31761E-3	2.17307E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.16011E-1	-7.98249E-1	-9.13141E0	-9.14168E0	5.50747E-3	9.33647E-2	2.73184E1	-3.26573E1	-3.26724E1	2.68082E1	2.1556E-9	2.52147E-3	2.52147E-3	6.32518E-3	2.17602E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16083E-1	-7.98297E-1	-9.1315E0	-9.14204E0	5.38826E-3	9.38177E-2	2.73106E1	-3.26346E1	-3.2544E1	2.67914E1	2.15455E-9	2.52236E-3	2.52236E-3	6.32328E-3	2.18011E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.16154E-1	-7.98082E-1	-9.13134E0	-9.14216E0	5.17368E-3	9.377E-2	2.72715E1	-3.26681E1	-3.27239E1	2.68166E1	2.158E-9	2.52209E-3	2.52209E-3	6.30466E-3	2.18106E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.16274E-1	-7.98011E-1	-9.13153E0	-9.14214E0	5.26905E-3	9.35078E-2	2.72612E1	-3.26735E1	-3.26543E1	2.68226E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16488E-1	-7.98345E-1	-9.13146E0	-9.14197E0	5.38826E-3	9.3317E-2	2.73039E1	-3.26645E1	-3.25293E1	2.67902E1	2.15706E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.18011E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16417E-1	-7.98345E-1	-9.13126E0	-9.14218E0	5.05447E-3	9.36747E-2	2.72793E1	-3.26597E1	-3.25996E1	2.67794E1	2.15696E-9	2.51915E-3	2.51915E-3	6.31299E-3	2.17529E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.16703E-1	-7.98464E-1	-9.13141E0	-9.14197E0	5.07832E-3	9.34601E-2	2.73016E1	-3.26602E1	-3.27446E1	2.68004E1	2.15808E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.19036E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16321E-1	-7.98321E-1	-9.13141E0	-9.14187E0	5.14984E-3	9.34839E-2	2.73241E1	-3.26842E1	-3.26303E1	2.6804E1	2.15894E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.18011E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0965E0	-8.16607E-1	-7.98464E-1	-9.13134E0	-9.14195E0	5.31673E-3	9.35793E-2	2.73183E1	-3.26585E1	-3.25539E1	2.67938E1	2.15613E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.16689E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.16107E-1	-7.98392E-1	-9.13129E0	-9.14176E0	5.126E-3	9.34601E-2	2.72945E1	-3.26537E1	-3.2485E1	2.68136E1	2.158E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.1839E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09634E0	-8.16131E-1	-7.9844E-1	-9.13141E0	-9.14171E0	5.03063E-3	9.35078E-2	2.72859E1	-3.26807E1	-3.27426E1	2.68028E1	2.15706E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.18011E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.1625E-1	-7.98368E-1	-9.13138E0	-9.14199E0	4.79221E-3	9.36985E-2	2.73034E1	-3.26942E1	-3.25809E1	2.67941E1	2.15706E-9	2.5188E-3	2.5188E-3	6.28006E-3	2.17822E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16131E-1	-7.98345E-1	-9.13131E0	-9.1419E0	4.81606E-3	9.34839E-2	2.73213E1	-3.26609E1	-3.26969E1	2.67848E1	2.15762E-9	2.51694E-3	2.51694E-3	6.31727E-3	2.1733E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.16202E-1	-7.98345E-1	-9.13134E0	-9.14197E0	4.98295E-3	9.37223E-2	2.7279E1	-3.26822E1	-3.27262E1	2.68221E1	2.15706E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.17822E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.15988E-1	-7.98488E-1	-9.13143E0	-9.1418E0	5.17368E-3	9.35316E-2	2.72751E1	-3.26464E1	-3.25653E1	2.68166E1	2.15716E-9	2.51847E-3	2.51847E-3	6.33977E-3	2.17732E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.16226E-1	-7.98249E-1	-9.13181E0	-9.14209E0	5.10216E-3	9.36031E-2	2.72966E1	-3.26459E1	-3.27632E1	2.67909E1	2.16175E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.17255E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.16035E-1	-7.9844E-1	-9.13169E0	-9.14209E0	5.38826E-3	9.34362E-2	2.73251E1	-3.26553E1	-3.25505E1	2.68425E1	2.15483E-9	2.51956E-3	2.51956E-3	6.32273E-3	2.17483E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16011E-1	-7.98273E-1	-9.13138E0	-9.14187E0	5.43594E-3	9.34601E-2	2.72799E1	-3.26218E1	-3.27227E1	2.68178E1	2.156E-9	2.52473E-3	2.52473E-3	6.3074E-3	2.17337E-2