[Scan]
initial_time=2016-01-28T16:51:25
final_time=2016-01-28T16:51:45
ip_count=19
run=1026
dataset=2
scan=156
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08815E-4
ql1_vset=
ql1_vmon=-8.16369E-1
ql1_imon=1.38087E-8
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=1.96462E-9
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=3.2872E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=-7.49588E-11
mult1=-9.73579E-9
mult2=-2.85456E-9
rf_tmon=-4.92831E-3
rf_agc=3.35451E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=1.6685E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66462E0
bslens_imon=2.43978E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19694E1
lens5a_imon=1.9727E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.04844E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53343E1
cs_ef1b_imon=3.1064E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04584E2
lens23_imon=1.02079E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04753E1
cs_ea1_imon=1.24976E-5
lens1_vset=-5.0E0
lens1_vmon=-5.412E0
lens1_imon=2.61536E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64827E1
os_ef1alow_imon=2.98626E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04097E1
cs_ea2_imon=1.43985E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84113E1
cs_ef1a_imon=2.99674E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.28083E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11248E1
os_restr1_imon=4.30889E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15179E1
os_ea1_imon=2.39486E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63535E1
os_ef1bup_imon=3.05438E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24955E0
cs_ionrep_imon=9.73409E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93264E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02214E1
cs_anode1_imon=2.07158E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.23426E-8
tplens_vset=1.4E-1
tplens_vmon=1.65352E0
tplens_imon=-1.8632E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25794E1
iondef3_imon=1.49023E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26856E1
iondef2_imon=1.57039E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98388E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.97422E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.289E0
ionrepsh_imon=9.25314E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3355E1
lens5b_imon=2.19371E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.10752E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46967E0
os_ea2_imon=-8.5048E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.0047E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71738E1
cs_ef2a_imon=3.20258E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09822E0
os_ef2alow_imon=-2.80261E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09483E-1
os_ef2bup_imon=-5.51224E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=3.38522E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.29279E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01927E1
cs_anode2_imon=2.09291E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72927E1
iondef1_imon=1.07761E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68169E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.45157E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82738E-1
olens1_imon=7.91472E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09646E0
cs_ionaccel_imon=-1.05483E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02111E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55925E1
einzel_imon=7.65041E-6
window_vset=0.0E0
window_vmon=1.46488E-1
window_imon=-9.65005E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82585E2
mask1_imon=2.39002E-4
mask2_vset=0.0E0
mask2_vmon=-1.86681E1
mask2_imon=-5.34609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.71489E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93756E3
defgrida_imon=6.55452E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50099E3
multb_neg_imon=6.94767E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.16574E0
defgridb_imon=6.13465E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33171E1
os_fil1_imon=9.4015E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06238E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62764E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30501E1
cs_fil1_imon=9.2057E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.24646E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65196E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30359E-2
os_fil2_imon=-2.62508E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00948E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.74393E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34223E-1
cs_fil2_imon=-2.46914E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.85354E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21731E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.1839E-2
chamber_ion_pmon=2.15987E-9
chamber_cvt_pmon=2.53087E-3
foreline_cvt_pmon=2.53087E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.11157E-1
res40_imon=-2.26742E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09673E0	-8.16202E-1	-7.9844E-1	-9.13153E0	-9.14197E0	4.95911E-3	9.31025E-2	2.72898E1	-3.26543E1	-3.2764E1	2.67962E1	2.1549E-9	2.51611E-3	2.51611E-3	6.3245E-3	2.16834E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09627E0	-8.16369E-1	-7.98225E-1	-9.1316E0	-9.14202E0	5.26905E-3	9.37939E-2	2.73057E1	-3.26625E1	-3.25536E1	2.67646E1	2.15332E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.17633E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.16321E-1	-7.98082E-1	-9.13146E0	-9.14202E0	5.34058E-3	9.33647E-2	2.73213E1	-3.26347E1	-3.28317E1	2.67914E1	2.15736E-9	2.52717E-3	2.52717E-3	6.3126E-3	2.18281E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09665E0	-8.15892E-1	-7.98225E-1	-9.13124E0	-9.1419E0	4.673E-3	9.38177E-2	2.73155E1	-3.26621E1	-3.27031E1	2.67901E1	2.15997E-9	2.52131E-3	2.52131E-3	6.3074E-3	2.17282E-2
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.15916E-1	-7.98321E-1	-9.13138E0	-9.14223E0	5.07832E-3	9.37462E-2	2.72901E1	-3.26536E1	-3.26885E1	2.68322E1	2.15696E-9	2.52027E-3	2.52027E-3	6.34661E-3	2.17529E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.15701E-1	-7.98106E-1	-9.13143E0	-9.14185E0	5.24521E-3	9.35078E-2	2.73039E1	-3.2653E1	-3.25491E1	2.6786E1	2.15982E-9	2.5225E-3	2.5225E-3	6.3074E-3	2.18301E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09627E0	-8.16226E-1	-7.98082E-1	-9.13136E0	-9.14223E0	5.29289E-3	9.37223E-2	2.72953E1	-3.2637E1	-3.25948E1	2.6822E1	2.159E-9	2.51417E-3	2.51417E-3	6.32896E-3	2.17732E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09673E0	-8.16345E-1	-7.98035E-1	-9.13143E0	-9.14187E0	5.24521E-3	9.36508E-2	2.72998E1	-3.26632E1	-3.26933E1	2.67698E1	2.15887E-9	2.52139E-3	2.52139E-3	6.30182E-3	2.18301E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09696E0	-8.16226E-1	-7.98202E-1	-9.13126E0	-9.14204E0	4.88758E-3	9.37462E-2	2.72709E1	-3.26506E1	-3.25431E1	2.68232E1	2.16081E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.1877E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0968E0	-8.16154E-1	-7.97963E-1	-9.13165E0	-9.14226E0	5.03063E-3	9.33886E-2	2.73216E1	-3.26685E1	-3.26343E1	2.68196E1	2.15624E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.19036E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16131E-1	-7.98106E-1	-9.13162E0	-9.14197E0	4.88758E-3	9.35316E-2	2.72985E1	-3.26789E1	-3.2757E1	2.6774E1	2.15425E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.17255E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.16417E-1	-7.98821E-1	-9.13112E0	-9.1419E0	5.03063E-3	9.35793E-2	2.72576E1	-3.26494E1	-3.25984E1	2.67864E1	2.15441E-9	2.5131E-3	2.5131E-3	6.3074E-3	2.1885E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09719E0	-8.16011E-1	-7.98368E-1	-9.13122E0	-9.14199E0	5.14984E-3	9.34362E-2	2.73022E1	-3.26522E1	-3.25435E1	2.68121E1	2.15858E-9	2.52469E-3	2.52469E-3	6.32075E-3	2.17321E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09673E0	-8.16154E-1	-7.98178E-1	-9.13146E0	-9.14187E0	5.26905E-3	9.36747E-2	2.73019E1	-3.26636E1	-3.26928E1	2.68264E1					
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09696E0	-8.16131E-1	-7.97939E-1	-9.13155E0	-9.14207E0	4.95911E-3	9.36031E-2	2.73243E1	-3.265E1	-3.25485E1	2.67998E1	2.15546E-9	2.5207E-3	2.5207E-3	6.31344E-3	2.17282E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.16488E-1	-7.97939E-1	-9.13143E0	-9.14211E0	5.22137E-3	9.36985E-2	2.73311E1	-3.26502E1	-3.27051E1	2.68292E1	2.15716E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.17732E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.16274E-1	-7.98273E-1	-9.13126E0	-9.14185E0	5.07832E-3	9.37223E-2	2.73249E1	-3.26969E1	-3.25617E1	2.681E1	2.158E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.17822E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09727E0	-8.16226E-1	-7.98225E-1	-9.13126E0	-9.14221E0	5.43594E-3	9.36985E-2	2.73092E1	-3.26626E1	-3.26472E1	2.68157E1	2.15808E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.17361E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09673E0	-8.16369E-1	-7.98321E-1	-9.13115E0	-9.14192E0	5.19753E-3	9.34124E-2	2.73315E1	-3.26567E1	-3.2742E1	2.68058E1	2.15624E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.1885E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.16369E-1	-7.98297E-1	-9.13131E0	-9.14195E0	5.26905E-3	9.32693E-2	2.72927E1	-3.26856E1	-3.25794E1	2.68169E1	2.15987E-9	2.53087E-3	2.53087E-3	6.32936E-3	2.1839E-2