[Scan]
initial_time=2016-01-28T16:51:52
final_time=2016-01-28T16:52:11
ip_count=19
run=1026
dataset=2
scan=157
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08841E-4
ql1_vset=
ql1_vmon=-8.1656E-1
ql1_imon=1.37253E-8
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=1.98511E-9
ql3_vset=
ql3_vmon=-9.13162E0
ql3_imon=3.76511E-10
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=-6.71148E-11
mult1=-1.04569E-8
mult2=-2.71542E-9
rf_tmon=-6.1258E-3
rf_agc=3.21175E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=1.71372E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65198E0
bslens_imon=2.27126E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19854E1
lens5a_imon=1.9986E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.04972E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53772E1
cs_ef1b_imon=3.10848E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04585E2
lens23_imon=1.02393E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05141E1
cs_ea1_imon=1.24711E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42521E0
lens1_imon=2.58346E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.98162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03874E1
cs_ea2_imon=1.38925E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.841E1
cs_ef1a_imon=3.00973E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.2746E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11081E1
os_restr1_imon=4.30608E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15385E1
os_ea1_imon=2.40593E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63539E1
os_ef1bup_imon=3.09334E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2221E0
cs_ionrep_imon=9.73474E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93534E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01953E1
cs_anode1_imon=2.04207E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=3.23664E-8
tplens_vset=1.4E-1
tplens_vmon=1.59613E0
tplens_imon=-4.9449E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.48953E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.56299E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98316E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=4.05534E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24047E0
ionrepsh_imon=9.46294E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33817E1
lens5b_imon=2.18555E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45227E0
os_ea2_imon=-6.78138E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00362E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71342E1
cs_ef2a_imon=3.17695E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06897E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90817E-1
os_ef2bup_imon=-5.38014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10895E1
os_restr2_imon=3.3968E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23093E2
cs_ionfoca_imon=6.30075E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.09685E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73222E1
iondef1_imon=1.06456E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67998E1
iondef4_imon=1.08882E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.44403E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.85681E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12173E0
cs_ionaccel_imon=-9.90511E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56231E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=1.85508E-1
window_imon=-1.08782E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39372E-4
mask2_vset=0.0E0
mask2_vmon=-1.86158E1
mask2_imon=-5.94074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.23344E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.40702E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.41709E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42194E0
defgridb_imon=6.24909E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33156E1
os_fil1_imon=9.43369E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06837E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62436E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30454E1
cs_fil1_imon=9.2398E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.37731E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64774E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.64795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.81833E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32241E-1
cs_fil2_imon=-2.17343E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2143E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21638E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.18104E-2
chamber_ion_pmon=2.15716E-9
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.71906E-1
res40_imon=-2.46814E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=201
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.16417E-1	-7.98225E-1	-9.1316E0	-9.1419E0	4.8399E-3	9.35078E-2	2.73246E1	-3.26626E1	-3.26213E1	2.68308E1	2.15894E-9	2.52209E-3	2.52209E-3	6.34037E-3	2.18201E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16345E-1	-7.98368E-1	-9.13143E0	-9.14178E0	4.91142E-3	9.31978E-2	2.72943E1	-3.26633E1	-3.26332E1	2.68007E1	2.16085E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.16806E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.16607E-1	-7.98011E-1	-9.13122E0	-9.14178E0	5.29289E-3	9.35793E-2	2.73145E1	-3.26461E1	-3.26048E1	2.68296E1	2.16078E-9	2.51804E-3	2.51804E-3	6.31299E-3	2.17915E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.16226E-1	-7.98011E-1	-9.13129E0	-9.14185E0	5.126E-3	9.34124E-2	2.73309E1	-3.26374E1	-3.26494E1	2.68196E1	2.15365E-9	2.52025E-3	2.52025E-3	6.31798E-3	2.16918E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.1625E-1	-7.98321E-1	-9.13153E0	-9.14197E0	5.19753E-3	9.35555E-2	2.73204E1	-3.2652E1	-3.26319E1	2.67893E1	2.15894E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.18201E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.16226E-1	-7.98154E-1	-9.13122E0	-9.14209E0	5.126E-3	9.38892E-2	2.72871E1	-3.26945E1	-3.26422E1	2.68247E1	2.15624E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.17732E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09657E0	-8.16154E-1	-7.98416E-1	-9.13134E0	-9.14195E0	4.88758E-3	9.38892E-2	2.72708E1	-3.26689E1	-3.25972E1	2.67914E1	2.15519E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.17255E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0965E0	-8.1625E-1	-7.98154E-1	-9.13115E0	-9.14199E0	5.38826E-3	9.38177E-2	2.7301E1	-3.26691E1	-3.26207E1	2.68004E1	2.15791E-9	2.51693E-3	2.51693E-3	6.32418E-3	2.17915E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09627E0	-8.16011E-1	-7.97915E-1	-9.13122E0	-9.14176E0	5.34058E-3	9.36985E-2	2.72835E1	-3.26777E1	-3.26296E1	2.67752E1	2.15706E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.17444E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09634E0	-8.16154E-1	-7.98416E-1	-9.13126E0	-9.14192E0	5.45979E-3	9.35555E-2	2.72968E1	-3.26632E1	-3.25818E1	2.68058E1	2.159E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.18104E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-8.16488E-1	-7.98035E-1	-9.13119E0	-9.14211E0	5.17368E-3	9.31263E-2	2.73171E1	-3.26777E1	-3.26771E1	2.67974E1	2.15808E-9	2.52276E-3	2.52276E-3	6.35059E-3	2.17547E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09627E0	-8.1625E-1	-7.98297E-1	-9.13129E0	-9.14221E0	5.05447E-3	9.37223E-2	2.73135E1	-3.26404E1	-3.2647E1	2.68136E1	2.15706E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.17822E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0968E0	-8.16011E-1	-7.98154E-1	-9.13157E0	-9.14209E0	5.17368E-3	9.35078E-2	2.7285E1	-3.26614E1	-3.25959E1	2.67716E1	2.158E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.17633E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.16131E-1	-7.98249E-1	-9.13141E0	-9.1419E0	5.07832E-3	9.35078E-2	2.72919E1	-3.2641E1	-3.26134E1	2.68163E1	2.15894E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.18011E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0968E0	-8.16274E-1	-7.98559E-1	-9.13119E0	-9.14199E0	4.93526E-3	9.3627E-2	2.73039E1	-3.26681E1	-3.26044E1	2.68088E1	2.15441E-9	2.52599E-3	2.52599E-3	6.33977E-3	2.17361E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09688E0	-8.16321E-1	-7.98202E-1	-9.13146E0	-9.14195E0	4.93526E-3	9.36985E-2	2.73213E1	-3.26693E1	-3.26759E1	2.68166E1	2.15894E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.1858E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-8.16441E-1	-7.98059E-1	-9.13191E0	-9.14221E0	4.86374E-3	9.35793E-2	2.7311E1	-3.2629E1	-3.25157E1	2.68082E1	2.15987E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.18011E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.16441E-1	-7.98297E-1	-9.1316E0	-9.14214E0	5.24521E-3	9.33409E-2	2.72909E1	-3.26732E1	-3.26974E1	2.67926E1	2.15425E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.17633E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.16655E-1	-7.98249E-1	-9.13165E0	-9.14183E0	5.14984E-3	9.36508E-2	2.73446E1	-3.26419E1	-3.26608E1	2.68028E1	2.15817E-9	2.52025E-3	2.52025E-3	6.32328E-3	2.171E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.1656E-1	-7.98178E-1	-9.13162E0	-9.14173E0	5.14984E-3	9.35316E-2	2.73222E1	-3.26573E1	-3.2626E1	2.67998E1	2.15716E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.18104E-2