[Scan]
initial_time=2016-01-28T16:52:45
final_time=2016-01-28T16:53:05
ip_count=19
run=1026
dataset=2
scan=159
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08845E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=1.3768E-8
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=2.0069E-9
ql3_vset=
ql3_vmon=-9.13179E0
ql3_imon=3.5758E-10
ql4_vset=
ql4_vmon=-9.14166E0
ql4_imon=-6.96182E-11
mult1=-9.78196E-9
mult2=-2.70159E-9
rf_tmon=-4.62567E-3
rf_agc=3.2655E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.74646E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6532E0
bslens_imon=2.42552E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20233E1
lens5a_imon=1.97656E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.04858E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=3.10524E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.0218E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04841E1
cs_ea1_imon=1.25482E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43745E0
lens1_imon=2.78915E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.4168E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=3.00541E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.26545E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11382E1
os_restr1_imon=4.29599E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15563E1
os_ea1_imon=2.39932E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.08758E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23741E0
cs_ionrep_imon=9.64658E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91857E2
cs_nozzle_imon=1.93365E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=2.03486E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.24184E-8
tplens_vset=1.4E-1
tplens_vmon=1.59185E0
tplens_imon=-2.484E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25991E1
iondef3_imon=1.49173E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26389E1
iondef2_imon=1.58135E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02895E2
lens6_imon=2.98482E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=3.97791E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27597E0
ionrepsh_imon=9.30133E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33493E1
lens5b_imon=2.18188E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47064E0
os_ea2_imon=-7.84654E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.00494E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.18813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06237E0
os_ef2alow_imon=-2.70239E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09437E-1
os_ef2bup_imon=-5.35491E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11057E1
os_restr2_imon=3.39247E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.29377E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01641E1
cs_anode2_imon=2.10081E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7318E1
iondef1_imon=1.08734E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68346E1
iondef4_imon=1.07512E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.44636E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.83524E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10732E0
cs_ionaccel_imon=-1.06259E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56027E1
einzel_imon=7.66261E-6
window_vset=0.0E0
window_vmon=1.70491E-1
window_imon=-1.1671E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.86428E1
mask2_imon=-5.94074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.43546E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.88818E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.09387E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53838E0
defgridb_imon=5.89648E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33179E1
os_fil1_imon=9.39159E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07816E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62013E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30493E1
cs_fil1_imon=9.23049E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.2734E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64333E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4891E-2
os_fil2_imon=-2.5999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.28061E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.44973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.2176E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21621E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.17918E-2
chamber_ion_pmon=2.15992E-9
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.78824E-1
res40_imon=-2.38164E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=188
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.16512E-1	-7.98345E-1	-9.13167E0	-9.14187E0	5.19753E-3	9.32217E-2	2.72997E1	-3.26476E1	-3.28063E1	2.68112E1	2.15613E-9	2.51662E-3	2.51662E-3	6.34588E-3	2.17822E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.16059E-1	-7.9813E-1	-9.13169E0	-9.14168E0	5.31673E-3	9.34839E-2	2.73155E1	-3.26585E1	-3.26958E1	2.6792E1	2.15894E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.17633E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.15916E-1	-7.97915E-1	-9.1315E0	-9.14197E0	5.50747E-3	9.32217E-2	2.72981E1	-3.2666E1	-3.2681E1	2.67914E1	2.15982E-9	2.52139E-3	2.52139E-3	6.31299E-3	2.17722E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.16154E-1	-7.97939E-1	-9.13141E0	-9.14178E0	5.34058E-3	9.35793E-2	2.72947E1	-3.26725E1	-3.26995E1	2.6816E1	2.15636E-9	2.52025E-3	2.52025E-3	6.31798E-3	2.18926E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.16512E-1	-7.98345E-1	-9.13119E0	-9.14202E0	5.24521E-3	9.35316E-2	2.73222E1	-3.26278E1	-3.26573E1	2.68172E1	2.15887E-9	2.5225E-3	2.5225E-3	6.3074E-3	2.17529E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.16321E-1	-7.97987E-1	-9.13155E0	-9.14173E0	4.88758E-3	9.37223E-2	2.72823E1	-3.26579E1	-3.25094E1	2.68204E1	2.15533E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.17361E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09665E0	-8.16274E-1	-7.98249E-1	-9.13143E0	-9.14226E0	4.8399E-3	9.35793E-2	2.73189E1	-3.26675E1	-3.25888E1	2.67938E1	2.15987E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.1877E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.16393E-1	-7.98178E-1	-9.13169E0	-9.14183E0	5.05447E-3	9.35793E-2	2.73063E1	-3.26449E1	-3.27145E1	2.6783E1	2.15894E-9	2.5199E-3	2.5199E-3	6.29098E-3	2.18011E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.16369E-1	-7.97725E-1	-9.13146E0	-9.14171E0	5.00679E-3	9.36747E-2	2.72769E1	-3.26831E1	-3.24698E1	2.68106E1	2.15992E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.17361E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.16321E-1	-7.98035E-1	-9.13157E0	-9.14164E0	4.98295E-3	9.377E-2	2.73141E1	-3.26639E1	-3.24416E1	2.67866E1	2.15894E-9	2.52538E-3	2.52538E-3	6.29098E-3	2.17822E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09657E0	-8.16417E-1	-7.9782E-1	-9.1315E0	-9.14171E0	4.81606E-3	9.33886E-2	2.72957E1	-3.2659E1	-3.26236E1	2.68166E1	2.15238E-9	2.52647E-3	2.52647E-3	6.31837E-3	2.17633E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.16274E-1	-7.98082E-1	-9.13134E0	-9.14199E0	5.05447E-3	9.33886E-2	2.73406E1	-3.26272E1	-3.26125E1	2.68166E1	2.158E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.1839E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09634E0	-8.16345E-1	-7.9813E-1	-9.13167E0	-9.14211E0	4.98295E-3	9.31978E-2	2.73183E1	-3.26669E1	-3.26675E1	2.68124E1	2.15706E-9	2.52538E-3	2.52538E-3	6.30192E-3	2.18201E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0968E0	-8.16369E-1	-7.98178E-1	-9.13167E0	-9.14204E0	4.93526E-3	9.30071E-2	2.7349E1	-3.26585E1	-3.26615E1	2.68046E1	2.16081E-9	2.52977E-3	2.52977E-3	6.34037E-3	2.17633E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0968E0	-8.16393E-1	-7.98368E-1	-9.13153E0	-9.14173E0	5.17368E-3	9.31501E-2	2.73189E1	-3.26723E1	-3.25143E1	2.67992E1	2.15425E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.18201E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09665E0	-8.16298E-1	-7.98416E-1	-9.13153E0	-9.14223E0	5.07832E-3	9.34601E-2	2.72868E1	-3.2662E1	-3.27115E1	2.68105E1	2.15613E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.17444E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0968E0	-8.16321E-1	-7.98202E-1	-9.1315E0	-9.1418E0	4.74453E-3	9.33647E-2	2.72915E1	-3.26661E1	-3.25511E1	2.6804E1	2.15716E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.18104E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09711E0	-8.16607E-1	-7.9813E-1	-9.13143E0	-9.14192E0	4.57764E-3	9.29832E-2	2.72856E1	-3.26467E1	-3.26844E1	2.6807E1	2.15257E-9	2.52492E-3	2.52492E-3	6.31817E-3	2.18104E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09619E0	-8.16512E-1	-7.98202E-1	-9.1316E0	-9.14183E0	5.00679E-3	9.32217E-2	2.73252E1	-3.26838E1	-3.25989E1	2.68273E1	2.159E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.17732E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16655E-1	-7.98392E-1	-9.13179E0	-9.14166E0	4.673E-3	9.32932E-2	2.7318E1	-3.26389E1	-3.25991E1	2.68346E1	2.15992E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.17918E-2