[Scan]
initial_time=2016-01-28T16:53:12
final_time=2016-01-28T16:53:31
ip_count=19
run=1026
dataset=2
scan=160
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09711E0
qbias_imon=-1.08844E-4
ql1_vset=
ql1_vmon=-8.16345E-1
ql1_imon=1.37967E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=1.97628E-9
ql3_vset=
ql3_vmon=-9.1321E0
ql3_imon=3.54433E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=-6.22869E-11
mult1=-9.6561E-9
mult2=-2.71661E-9
rf_tmon=-3.07044E-3
rf_agc=3.48176E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=1.71233E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65736E0
bslens_imon=2.5468E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19642E1
lens5a_imon=1.97554E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.05047E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53688E1
cs_ef1b_imon=3.10884E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04639E2
lens23_imon=1.0216E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04964E1
cs_ea1_imon=1.26058E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40618E0
lens1_imon=2.47601E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64368E1
os_ef1alow_imon=2.96901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03903E1
cs_ea2_imon=1.41844E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=3.0155E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.26466E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10811E1
os_restr1_imon=4.29418E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15123E1
os_ea1_imon=2.39177E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63491E1
os_ef1bup_imon=3.08722E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20727E0
cs_ionrep_imon=9.77073E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93278E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=2.05216E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.23678E-8
tplens_vset=1.4E-1
tplens_vmon=1.6261E0
tplens_imon=-1.89165E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25311E1
iondef3_imon=1.4917E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26897E1
iondef2_imon=1.58408E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98392E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.97776E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24974E0
ionrepsh_imon=9.29645E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3377E1
lens5b_imon=2.19321E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42317E0
os_ea2_imon=-7.69629E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.0058E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.18524E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07258E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98025E-1
os_ef2bup_imon=-5.32248E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10901E1
os_restr2_imon=3.39824E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.3099E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.09396E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73333E1
iondef1_imon=1.0829E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67956E1
iondef4_imon=1.09386E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.46337E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.83358E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12353E0
cs_ionaccel_imon=-1.14548E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56537E1
einzel_imon=7.6482E-6
window_vset=0.0E0
window_vmon=1.6989E-1
window_imon=-1.12386E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.86668E1
mask2_imon=-6.94985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92678E3
multa_neg_imon=7.61523E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.74454E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.06308E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38489E0
defgridb_imon=5.98356E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33181E1
os_fil1_imon=9.41922E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07377E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62161E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30512E1
cs_fil1_imon=9.23541E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34728E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64781E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39521E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.07334E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32241E-1
cs_fil2_imon=-2.65996E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21692E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29067E-3
inlet_lpb_pmon=2.17915E-2
chamber_ion_pmon=2.15791E-9
chamber_cvt_pmon=2.52027E-3
foreline_cvt_pmon=2.52027E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.31061E-1
res40_imon=-2.45372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-8.16274E-1	-7.98035E-1	-9.13131E0	-9.14145E0	4.76837E-3	9.31263E-2	2.7288E1	-3.26991E1	-3.27173E1	2.67866E1	2.15533E-9	2.52169E-3	2.52169E-3	6.29665E-3	2.17918E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16226E-1	-7.98178E-1	-9.13086E0	-9.14176E0	4.76837E-3	9.32455E-2	2.72835E1	-3.26825E1	-3.25179E1	2.67872E1	2.15497E-9	2.52224E-3	2.52224E-3	6.31744E-3	2.17925E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16369E-1	-7.9844E-1	-9.13129E0	-9.14207E0	4.88758E-3	9.31501E-2	2.72964E1	-3.26553E1	-3.26441E1	2.67861E1	2.15332E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.17255E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.16321E-1	-7.9844E-1	-9.1315E0	-9.1419E0	4.76837E-3	9.33886E-2	2.73241E1	-3.2694E1	-3.27527E1	2.6819E1	2.15872E-9	2.51527E-3	2.51527E-3	6.33065E-3	2.18513E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.16369E-1	-7.98345E-1	-9.13143E0	-9.14178E0	4.62532E-3	9.36031E-2	2.73034E1	-3.26704E1	-3.263E1	2.68166E1	2.15706E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.17255E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.16369E-1	-7.98368E-1	-9.13148E0	-9.14185E0	4.76837E-3	9.34601E-2	2.72844E1	-3.26428E1	-3.25298E1	2.68104E1	2.16091E-9	2.51783E-3	2.51783E-3	6.3282E-3	2.1882E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16393E-1	-7.9844E-1	-9.13129E0	-9.14195E0	5.126E-3	9.33886E-2	2.72935E1	-3.26621E1	-3.2724E1	2.68176E1	2.15745E-9	2.52364E-3	2.52364E-3	6.3023E-3	2.18188E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.16154E-1	-7.98249E-1	-9.13136E0	-9.14197E0	4.36306E-3	9.3627E-2	2.73177E1	-3.26482E1	-3.2626E1	2.68094E1	2.15124E-9	2.51359E-3	2.51359E-3	6.32978E-3	2.17529E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.16131E-1	-7.98345E-1	-9.13143E0	-9.14197E0	5.00679E-3	9.34601E-2	2.72739E1	-3.26639E1	-3.26038E1	2.68124E1	2.15706E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.17255E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.16202E-1	-7.98392E-1	-9.1316E0	-9.14166E0	4.79221E-3	9.36747E-2	2.72837E1	-3.26695E1	-3.26926E1	2.67914E1	2.158E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.17444E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.16536E-1	-7.98249E-1	-9.13136E0	-9.14192E0	4.98295E-3	9.36508E-2	2.73101E1	-3.26613E1	-3.25287E1	2.68104E1	2.16088E-9	2.51814E-3	2.51814E-3	6.3074E-3	2.17464E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.1625E-1	-7.98535E-1	-9.13167E0	-9.14176E0	5.03063E-3	9.35078E-2	2.72884E1	-3.26066E1	-3.27155E1	2.67805E1	2.15745E-9	2.51549E-3	2.51549E-3	6.31761E-3	2.18011E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16488E-1	-7.98535E-1	-9.1315E0	-9.14187E0	4.62532E-3	9.3317E-2	2.73157E1	-3.26712E1	-3.25964E1	2.68223E1	2.15779E-9	2.51831E-3	2.51831E-3	6.32652E-3	2.17682E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.16369E-1	-7.98416E-1	-9.13167E0	-9.14185E0	4.79221E-3	9.35078E-2	2.72889E1	-3.26322E1	-3.25075E1	2.68082E1	2.15499E-9	2.51562E-3	2.51562E-3	6.33319E-3	2.16681E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09642E0	-8.16298E-1	-7.98392E-1	-9.13153E0	-9.14192E0	4.673E-3	9.34362E-2	2.72769E1	-3.2637E1	-3.2533E1	2.68196E1	2.15879E-9	2.51271E-3	2.51271E-3	6.33021E-3	2.18011E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.16274E-1	-7.98225E-1	-9.13184E0	-9.14173E0	4.8399E-3	9.35793E-2	2.73016E1	-3.26225E1	-3.25623E1	2.67908E1	2.15982E-9	2.52585E-3	2.52585E-3	6.3074E-3	2.17337E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.16035E-1	-7.98011E-1	-9.13179E0	-9.14152E0	4.93526E-3	9.35316E-2	2.72758E1	-3.26572E1	-3.28344E1	2.68007E1	2.15992E-9	2.52707E-3	2.52707E-3	6.32896E-3	2.17918E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.16393E-1	-7.98321E-1	-9.13184E0	-9.14187E0	5.03063E-3	9.35078E-2	2.7332E1	-3.26578E1	-3.26701E1	2.68132E1	2.15879E-9	2.51952E-3	2.51952E-3	6.3245E-3	2.17618E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09657E0	-8.16202E-1	-7.98559E-1	-9.1321E0	-9.14149E0	4.673E-3	9.35316E-2	2.72971E1	-3.26976E1	-3.27087E1	2.67866E1	2.16078E-9	2.5225E-3	2.5225E-3	6.32418E-3	2.16952E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09711E0	-8.16345E-1	-7.98321E-1	-9.1321E0	-9.14195E0	4.93526E-3	9.33886E-2	2.73333E1	-3.26897E1	-3.25311E1	2.67956E1	2.15791E-9	2.52027E-3	2.52027E-3	6.29067E-3	2.17915E-2