[Scan]
initial_time=2016-01-28T17:41:49
final_time=2016-01-28T17:42:08
ip_count=19
run=1026
dataset=3
scan=164
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.79543E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-7.04086E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.41516E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.8568E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.61166E-8
mult1=-9.79437E-9
mult2=-2.75369E-9
rf_tmon=-4.4304E-3
rf_agc=3.39125E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=5.32496E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64085E0
bslens_imon=2.20347E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=1.99182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.05146E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53454E1
cs_ef1b_imon=3.12181E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04587E2
lens23_imon=1.01994E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04687E1
cs_ea1_imon=1.23616E-5
lens1_vset=-2.7E0
lens1_vmon=-3.13211E0
lens1_imon=1.45312E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.9445E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04257E1
cs_ea2_imon=1.39932E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84815E1
cs_ef1a_imon=3.00324E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.26415E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1188E1
os_restr1_imon=4.26211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15075E1
os_ea1_imon=2.39142E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63425E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25859E0
cs_ionrep_imon=9.85214E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93452E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01707E1
cs_anode1_imon=2.0536E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.95015E-8
tplens_vset=1.4E-1
tplens_vmon=1.58775E0
tplens_imon=-5.8204E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26187E1
iondef3_imon=1.49453E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2665E1
iondef2_imon=1.57453E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98102E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=8.49986E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24502E0
ionrepsh_imon=9.37432E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34265E1
lens5b_imon=2.18826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.15028E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48216E0
os_ea2_imon=-7.87326E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06064E2
lens4b_imon=2.00191E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.16542E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08099E0
os_ef2alow_imon=-2.706E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80605E-1
os_ef2bup_imon=-5.36933E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10571E1
os_restr2_imon=3.40004E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.30813E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02001E1
cs_anode2_imon=2.08748E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73109E1
iondef1_imon=1.08432E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68068E1
iondef4_imon=1.09098E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.34804E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=7.79868E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0959E0
cs_ionaccel_imon=-1.03015E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.47349E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56075E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=1.41659E-1
window_imon=-1.18512E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39041E-4
mask2_vset=0.0E0
mask2_vmon=-1.86981E1
mask2_imon=-8.78788E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92672E3
multa_neg_imon=8.45407E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.80117E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=7.0914E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52662E0
defgridb_imon=6.17469E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33295E1
os_fil1_imon=9.41615E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07065E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62459E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30813E1
cs_fil1_imon=9.24773E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.3617E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64559E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15461E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.95312E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.43171E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.13972E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2237E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33341E-3
inlet_lpb_pmon=3.02479E-1
chamber_ion_pmon=1.20177E-7
chamber_cvt_pmon=2.51575E-3
foreline_cvt_pmon=2.51575E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.98045E-1
res40_imon=-2.36723E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.24E2	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80011E1	-7.39098E-4	-8.80003E1	3.09944E-4	5.4121E-3	9.39131E-2	2.72673E1	-3.26549E1	-3.2816E1	2.67937E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.01223E-1
2.0E0	9.598E3	1.1E1	3.16E2	1.6E2	-7.27828E-2	-8.80013E1	-5.48363E-4	-8.80006E1	4.29153E-4	5.17368E-3	9.38892E-2	2.73153E1	-3.26573E1	-3.27894E1	2.67734E1	1.19991E-7	2.52659E-3	2.52659E-3	6.29684E-3	2.99343E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80011E1	-6.91414E-4	-8.80003E1	9.53674E-5	4.673E-3	9.38654E-2	2.73145E1	-3.26632E1	-3.25287E1	2.68328E1	1.20174E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00824E-1
4.0E0	2.199E3	4.0E0	6.55E2	3.98E2	-7.27053E-2	-8.8001E1	-5.24521E-4	-8.80004E1	2.38419E-4	4.52995E-3	9.37223E-2	2.73021E1	-3.26449E1	-3.25157E1	2.68233E1	1.19953E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80013E1	-5.72205E-4	-8.80005E1	5.72205E-4	4.74453E-3	9.35793E-2	2.73057E1	-3.26603E1	-3.245E1	2.68004E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80011E1	-5.24521E-4	-8.80006E1	3.09944E-4	4.93526E-3	9.35793E-2	2.72961E1	-3.26476E1	-3.25245E1	2.68148E1	1.19809E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.03712E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80011E1	-4.29153E-4	-8.80004E1	4.05312E-4	4.8399E-3	9.35316E-2	2.73104E1	-3.26561E1	-3.279E1	2.68196E1	1.20209E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.03286E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.8001E1	-4.05312E-4	-8.80005E1	5.96046E-4	4.60148E-3	9.33886E-2	2.72444E1	-3.26621E1	-3.26567E1	2.68328E1	1.20004E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.9892E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.39421E-2	-8.80015E1	-4.76837E-4	-8.80003E1	5.48363E-4	4.76837E-3	9.36508E-2	2.72793E1	-3.2641E1	-3.24782E1	2.67893E1	1.20174E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9978E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80016E1	-9.05991E-4	-8.80005E1	2.6226E-4	4.79221E-3	9.377E-2	2.73141E1	-3.26627E1	-3.25347E1	2.6796E1	1.20017E-7	2.51552E-3	2.51552E-3	6.28006E-3	2.98222E-1
1.4E1	2.82E2	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80016E1	-9.05991E-4	-8.80004E1	5.48363E-4	4.74453E-3	9.36031E-2	2.73081E1	-3.26801E1	-3.26392E1	2.68226E1	1.19913E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.9926E-1
1.5E1	8.0E0	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80012E1	-9.05991E-4	-8.80003E1	2.38419E-4	4.86374E-3	9.37223E-2	2.72732E1	-3.2652E1	-3.27788E1	2.67902E1	1.20137E-7	2.52139E-3	2.52139E-3	6.3074E-3	3.00942E-1
1.6E1	2.9E1	0.0E0	6.47E2	4.41E2	-7.42513E-2	-8.80013E1	-7.62939E-4	-8.80002E1	1.66893E-4	4.88758E-3	9.35316E-2	2.73235E1	-3.26872E1	-3.27258E1	2.68369E1	1.20311E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01738E-1
1.7E1	3.3E1	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80016E1	-3.33786E-4	-8.80003E1	2.14577E-4	4.93526E-3	9.37939E-2	2.73021E1	-3.26801E1	-3.26398E1	2.68153E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02659E-1
1.8E1	2.12E2	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80016E1	-5.24521E-4	-8.80004E1	7.15256E-5	5.24521E-3	9.39131E-2	2.73016E1	-3.26437E1	-3.25257E1	2.67964E1	1.20226E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.02659E-1
1.9E1	3.87E2	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80015E1	-4.05312E-4	-8.80004E1	2.86102E-4	4.79221E-3	9.35078E-2	2.73117E1	-3.26512E1	-3.27714E1	2.67938E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01871E-1
2.0E1	2.321E3	1.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80012E1	-5.48363E-4	-8.80002E1	-1.90735E-4	4.64916E-3	9.33409E-2	2.73086E1	-3.26644E1	-3.2695E1	2.68394E1	1.20122E-7	2.51552E-3	2.51552E-3	6.28552E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.8001E1	-7.15256E-4	-8.80004E1	1.66893E-4	4.64916E-3	9.36031E-2	2.73328E1	-3.26573E1	-3.2547E1	2.67474E1	1.20243E-7	2.51814E-3	2.51814E-3	6.3074E-3	2.98592E-1
2.2E1	1.52E2	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80009E1	-8.58307E-4	-8.80003E1	3.57628E-4	5.126E-3	9.38892E-2	2.72988E1	-3.26499E1	-3.27507E1	2.68204E1	1.19913E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.01347E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80011E1	-7.86781E-4	-8.80002E1	-2.38419E-5	5.05447E-3	9.35555E-2	2.73109E1	-3.2665E1	-3.26187E1	2.68068E1	1.20177E-7	2.51575E-3	2.51575E-3	6.33341E-3	3.02479E-1