[Scan]
initial_time=2016-01-28T17:42:14
final_time=2016-01-28T17:42:34
ip_count=19
run=1026
dataset=3
scan=165
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.83047E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-7.01022E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.44714E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.89471E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.60594E-8
mult1=-1.05712E-8
mult2=-2.62879E-9
rf_tmon=-5.07119E-3
rf_agc=3.24564E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=5.63455E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65472E0
bslens_imon=2.56299E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20175E1
lens5a_imon=1.99028E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.04884E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53652E1
cs_ef1b_imon=3.09406E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0458E2
lens23_imon=1.02009E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04994E1
cs_ea1_imon=1.23937E-5
lens1_vset=-2.7E0
lens1_vmon=-3.11105E0
lens1_imon=1.34091E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64855E1
os_ef1alow_imon=2.96216E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03858E1
cs_ea2_imon=1.40628E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84604E1
cs_ef1a_imon=3.00577E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.26302E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11033E1
os_restr1_imon=4.2913E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15228E1
os_ea1_imon=2.41242E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.06811E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23347E0
cs_ionrep_imon=9.75847E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93334E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=2.04783E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.95827E-8
tplens_vset=1.4E-1
tplens_vmon=1.59036E0
tplens_imon=-4.36334E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25677E1
iondef3_imon=1.48775E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.57679E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0289E2
lens6_imon=2.98472E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=8.9705E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29416E0
ionrepsh_imon=9.52055E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33874E1
lens5b_imon=2.19036E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48282E0
os_ea2_imon=-7.8962E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00576E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.17623E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05276E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94421E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=3.38166E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23023E2
cs_ionfoca_imon=6.29856E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01671E1
cs_anode2_imon=2.10261E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73478E1
iondef1_imon=1.08544E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.42254E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.75224E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12834E0
cs_ionaccel_imon=-1.05178E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47241E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56231E1
einzel_imon=7.66261E-6
window_vset=0.0E0
window_vmon=1.74696E-1
window_imon=-1.00493E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39016E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92668E3
multa_neg_imon=7.24222E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.58251E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=7.11244E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40758E0
defgridb_imon=6.11026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33278E1
os_fil1_imon=9.39999E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07059E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62578E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30816E1
cs_fil1_imon=9.25271E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32506E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65076E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31876E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.8309E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.44973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22632E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22225E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00852E-1
chamber_ion_pmon=1.1969E-7
chamber_cvt_pmon=2.51603E-3
foreline_cvt_pmon=2.51603E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.0283E-1
res40_imon=-2.51138E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.61E2	1.0E0	1.47E2	4.1E1	-7.201E-2	-8.80012E1	-9.05991E-4	-8.80008E1	9.53674E-5	5.07832E-3	9.33647E-2	2.72744E1	-3.26508E1	-3.27617E1	2.67926E1	1.20226E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.98481E-1
2.0E0	9.525E3	1.3E1	3.16E2	1.6E2	-7.18554E-2	-8.80013E1	-8.58307E-4	-8.80007E1	3.8147E-4	4.8399E-3	9.33886E-2	2.73124E1	-3.26536E1	-3.26621E1	2.6828E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.16233E-2	-8.80013E1	-9.77516E-4	-8.80005E1	2.38419E-4	5.17368E-3	9.35555E-2	2.73196E1	-3.26568E1	-3.25852E1	2.68088E1	1.20122E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.02133E-1
4.0E0	2.208E3	2.0E0	6.55E2	3.98E2	-7.18554E-2	-8.8001E1	-8.82149E-4	-8.80005E1	2.38419E-5	5.43594E-3	9.34601E-2	2.73312E1	-3.26851E1	-3.26388E1	2.67984E1	1.20016E-7	2.5216E-3	2.5216E-3	6.32784E-3	3.00635E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80013E1	-7.86781E-4	-8.80004E1	3.57628E-4	4.62532E-3	9.36747E-2	2.72997E1	-3.26651E1	-3.26206E1	2.68082E1	1.20158E-7	2.52815E-3	2.52815E-3	6.31817E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.14689E-2	-8.80014E1	-7.15256E-4	-8.80006E1	5.00679E-4	4.93526E-3	9.34124E-2	2.72943E1	-3.26609E1	-3.2614E1	2.68508E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.13915E-2	-8.80013E1	-7.62939E-4	-8.80007E1	1.90735E-4	5.14984E-3	9.34124E-2	2.73225E1	-3.26621E1	-3.26308E1	2.6828E1	1.19697E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.01738E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80008E1	-8.10623E-4	-8.80007E1	3.33786E-4	5.10216E-3	9.35078E-2	2.72835E1	-3.27047E1	-3.26146E1	2.67812E1	1.20174E-7	2.51443E-3	2.51443E-3	6.34588E-3	3.00824E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80012E1	-6.91414E-4	-8.80007E1	2.14577E-4	5.05447E-3	9.35555E-2	2.73081E1	-3.2632E1	-3.2587E1	2.67806E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00041E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80014E1	-7.39098E-4	-8.80007E1	3.57628E-4	4.81606E-3	9.35555E-2	2.73099E1	-3.26615E1	-3.26026E1	2.67914E1	1.2033E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.00041E-1
1.4E1	3.18E2	1.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80012E1	-5.48363E-4	-8.80005E1	1.90735E-4	5.17368E-3	9.37223E-2	2.73243E1	-3.26771E1	-3.27233E1	2.6789E1	1.20278E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00563E-1
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80013E1	-7.15256E-4	-8.80003E1	1.66893E-4	4.79221E-3	9.34839E-2	2.73285E1	-3.26404E1	-3.25731E1	2.6816E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00563E-1
1.6E1	3.5E1	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80016E1	-1.12057E-3	-8.80002E1	3.09944E-4	4.86374E-3	9.34601E-2	2.72703E1	-3.26738E1	-3.26301E1	2.68123E1	1.20017E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.02133E-1
1.7E1	4.1E1	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80015E1	-6.4373E-4	-8.80006E1	3.33786E-4	4.81606E-3	9.36747E-2	2.73448E1	-3.26609E1	-3.26711E1	2.6816E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00824E-1
1.8E1	1.96E2	0.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80014E1	-5.72205E-4	-8.80004E1	1.66893E-4	5.14984E-3	9.36747E-2	2.72684E1	-3.2647E1	-3.25695E1	2.68358E1	1.20122E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.9874E-1
1.9E1	3.61E2	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80016E1	-6.4373E-4	-8.80003E1	0.0E0	5.05447E-3	9.35078E-2	2.73309E1	-3.26849E1	-3.26951E1	2.67782E1	1.19953E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.00453E-1
2.0E1	2.32E3	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80016E1	-5.00679E-4	-8.80007E1	5.00679E-4	4.72069E-3	9.34839E-2	2.72426E1	-3.26903E1	-3.25605E1	2.68106E1	1.19978E-7	2.51581E-3	2.51581E-3	6.29067E-3	3.0041E-1
2.1E1	7.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80015E1	-3.57628E-4	-8.80004E1	2.38419E-4	4.8399E-3	9.34362E-2	2.73273E1	-3.26699E1	-3.26711E1	2.68046E1	1.20055E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.01223E-1
2.2E1	1.5E2	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80015E1	-4.05312E-4	-8.80005E1	-2.38419E-5	5.07832E-3	9.30786E-2	2.72709E1	-3.26543E1	-3.26354E1	2.68136E1	1.20137E-7	2.51804E-3	2.51804E-3	6.29067E-3	2.99613E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80012E1	-6.19888E-4	-8.80005E1	1.43051E-4	4.3869E-3	9.35316E-2	2.73478E1	-3.26657E1	-3.25677E1	2.68142E1	1.1969E-7	2.51603E-3	2.51603E-3	6.3074E-3	3.00852E-1