[Scan]
initial_time=2016-01-28T17:44:54
final_time=2016-01-28T17:45:14
ip_count=19
run=1026
dataset=3
scan=171
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.52559E-2
qbias_imon=-3.83172E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.87265E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.43054E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-1.80547E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.60645E-8
mult1=-1.04628E-8
mult2=-2.72061E-9
rf_tmon=-5.74412E-3
rf_agc=3.16993E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=5.65398E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64586E0
bslens_imon=2.57611E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20098E1
lens5a_imon=1.96995E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.0492E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53544E1
cs_ef1b_imon=3.10487E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04627E1
cs_ea1_imon=1.25115E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07818E0
lens1_imon=1.54401E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.645E1
os_ef1alow_imon=2.96252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03347E1
cs_ea2_imon=1.3944E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=3.00504E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.24364E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=4.27941E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15361E1
os_ea1_imon=2.43311E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63713E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25271E0
cs_ionrep_imon=9.60618E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93453E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=2.0518E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.93357E-8
tplens_vset=1.4E-1
tplens_vmon=1.60348E0
tplens_imon=-3.76954E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26152E1
iondef3_imon=1.47667E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26831E1
iondef2_imon=1.574E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98309E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=8.80039E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25516E0
ionrepsh_imon=9.33071E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33841E1
lens5b_imon=2.17527E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47799E0
os_ea2_imon=-8.47095E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00568E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.18092E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05156E0
os_ef2alow_imon=-2.65554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88414E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10931E1
os_restr2_imon=3.38634E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.29634E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.09865E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73087E1
iondef1_imon=1.08256E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68208E1
iondef4_imon=1.08521E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.38865E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.71218E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11512E0
cs_ionaccel_imon=-1.19594E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56153E1
einzel_imon=7.60134E-6
window_vset=0.0E0
window_vmon=1.57877E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39019E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-7.67065E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.51993E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93689E3
defgrida_imon=6.13155E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.42076E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34533E0
defgridb_imon=6.07278E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33299E1
os_fil1_imon=9.43465E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06783E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61896E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30866E1
cs_fil1_imon=9.24917E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.23976E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64839E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.09488E-2
os_fil2_imon=-2.61191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.10725E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.49778E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29239E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22221E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3131E-3
inlet_lpb_pmon=2.99981E-1
chamber_ion_pmon=1.19883E-7
chamber_cvt_pmon=2.51838E-3
foreline_cvt_pmon=2.51838E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.63497E-1
res40_imon=-2.56544E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.54E2	0.0E0	1.47E2	4.1E1	-7.286E-2	-8.80015E1	-1.16825E-3	-8.8E1	2.14577E-4	4.48227E-3	9.3627E-2	2.73341E1	-3.26567E1	-3.27946E1	2.68118E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.03185E-1
2.0E0	9.423E3	1.1E1	3.16E2	1.6E2	-7.25507E-2	-8.80013E1	-1.0252E-3	-8.80005E1	3.33786E-4	4.52995E-3	9.34839E-2	2.7302E1	-3.26805E1	-3.27582E1	2.67758E1	1.19902E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00197E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80014E1	-1.14441E-3	-8.8E1	9.53674E-5	4.55379E-3	9.38177E-2	2.73145E1	-3.26484E1	-3.27965E1	2.68028E1	1.19713E-7	2.5147E-3	2.5147E-3	6.30182E-3	2.98819E-1
4.0E0	2.187E3	2.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80013E1	-9.29832E-4	-8.80003E1	1.90735E-4	4.50611E-3	9.36985E-2	2.72817E1	-3.26639E1	-3.27516E1	2.67962E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.98665E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80017E1	-6.91414E-4	-8.80003E1	7.15256E-5	4.62532E-3	9.35555E-2	2.72892E1	-3.26431E1	-3.2534E1	2.67868E1	1.19757E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.97704E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80016E1	-1.07288E-3	-8.80004E1	0.0E0	4.74453E-3	9.34124E-2	2.73285E1	-3.26753E1	-3.2653E1	2.67914E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80014E1	-1.26362E-3	-8.80002E1	2.14577E-4	4.76837E-3	9.35555E-2	2.72961E1	-3.26506E1	-3.273E1	2.68064E1	1.19757E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80016E1	-9.29832E-4	-8.80003E1	2.38419E-4	4.673E-3	9.33409E-2	2.73153E1	-3.26434E1	-3.25113E1	2.68136E1	1.19953E-7	2.51525E-3	2.51525E-3	6.35601E-3	3.03286E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80016E1	-9.77516E-4	-8.80005E1	9.53674E-5	4.93526E-3	9.31501E-2	2.73293E1	-3.26921E1	-3.25045E1	2.68316E1	1.20122E-7	2.51662E-3	2.51662E-3	6.34588E-3	3.00824E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80017E1	-1.19209E-3	-8.80007E1	0.0E0	4.76837E-3	9.35316E-2	2.73045E1	-3.26819E1	-3.26212E1	2.67836E1	1.20122E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00302E-1
1.4E1	2.91E2	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80016E1	-9.29832E-4	-8.80001E1	-1.66893E-4	4.8399E-3	9.33886E-2	2.73284E1	-3.26817E1	-3.24534E1	2.6819E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9952E-1
1.5E1	8.0E0	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80012E1	-9.77516E-4	-8.80006E1	0.0E0	4.88758E-3	9.35316E-2	2.72225E1	-3.25871E1	-3.2475E1	2.68112E1	1.20031E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.0201E-1
1.6E1	2.8E1	0.0E0	6.47E2	4.41E2	-7.45602E-2	-8.80015E1	-8.82149E-4	-8.80006E1	-4.76837E-5	4.8399E-3	9.33409E-2	2.72913E1	-3.26627E1	-3.25563E1	2.67972E1	1.19697E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00966E-1
1.7E1	5.8E1	1.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80011E1	-8.10623E-4	-8.80006E1	-1.43051E-4	5.00679E-3	9.35316E-2	2.72957E1	-3.26419E1	-3.26797E1	2.67998E1	1.19749E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.00966E-1
1.8E1	2.18E2	0.0E0	7.27E2	5.0E2	-7.36328E-2	-8.80015E1	-7.62939E-4	-8.80006E1	2.86102E-4	4.60148E-3	9.33886E-2	2.73161E1	-3.26556E1	-3.27042E1	2.67902E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
1.9E1	3.53E2	0.0E0	7.68E2	5.29E2	-7.40967E-2	-8.80013E1	-6.4373E-4	-8.80004E1	-2.38419E-5	4.8399E-3	9.35793E-2	2.73146E1	-3.26387E1	-3.25191E1	2.67834E1	1.19841E-7	2.51182E-3	2.51182E-3	6.31269E-3	3.006E-1
2.0E1	2.32E3	2.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80013E1	-5.96046E-4	-8.80006E1	7.15256E-5	4.93526E-3	9.35793E-2	2.72918E1	-3.26542E1	-3.2509E1	2.68204E1	1.19613E-7	2.51498E-3	2.51498E-3	6.34164E-3	3.02426E-1
2.1E1	6.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80012E1	-4.76837E-4	-8.80006E1	9.53674E-5	4.98295E-3	9.38654E-2	2.73115E1	-3.26998E1	-3.26699E1	2.68088E1	1.19795E-7	2.51377E-3	2.51377E-3	6.31225E-3	3.0103E-1
2.2E1	1.74E2	0.0E0	8.89E2	6.17E2	-7.44059E-2	-8.80011E1	-2.6226E-4	-8.80006E1	1.90735E-4	5.17368E-3	9.38416E-2	2.72982E1	-3.26491E1	-3.26709E1	2.68494E1	1.19851E-7	2.52029E-3	2.52029E-3	6.31925E-3	3.02743E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.52559E-2	-8.80012E1	-7.86781E-4	-8.80007E1	3.57628E-4	4.76837E-3	9.35555E-2	2.73087E1	-3.26831E1	-3.26152E1	2.68208E1	1.19883E-7	2.51838E-3	2.51838E-3	6.3131E-3	2.99981E-1