[Scan]
initial_time=2016-01-28T17:46:14
final_time=2016-01-28T17:46:34
ip_count=19
run=1026
dataset=3
scan=174
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.7982E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.44696E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=1.45662E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.76946E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.61238E-8
mult1=-9.23468E-9
mult2=-2.69266E-9
rf_tmon=-4.45835E-3
rf_agc=3.40666E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=5.37026E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67488E0
bslens_imon=2.38115E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20109E1
lens5a_imon=1.97727E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1244E2
lens4a_imon=2.05135E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53665E1
cs_ef1b_imon=3.08664E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02102E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05189E1
cs_ea1_imon=1.24182E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07224E0
lens1_imon=1.42339E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.97727E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03846E1
cs_ea2_imon=1.3995E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83739E1
cs_ef1a_imon=2.99789E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.22548E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11318E1
os_restr1_imon=4.2987E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15124E1
os_ea1_imon=2.41372E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63421E1
os_ef1bup_imon=3.07924E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24236E0
cs_ionrep_imon=9.57606E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93459E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0212E1
cs_anode1_imon=2.04195E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.92883E-8
tplens_vset=1.4E-1
tplens_vmon=1.58887E0
tplens_imon=-2.50751E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.28273E1
iondef3_imon=1.48866E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26783E1
iondef2_imon=1.56769E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02915E2
lens6_imon=2.98315E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=8.64208E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21381E0
ionrepsh_imon=9.36582E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33613E1
lens5b_imon=2.18245E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74547E1
cs_ef2b_imon=3.12556E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46364E0
os_ea2_imon=-7.68567E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00506E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71906E1
cs_ef2a_imon=3.18667E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04677E0
os_ef2alow_imon=-2.6345E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67367E-1
os_ef2bup_imon=-5.21119E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10974E1
os_restr2_imon=3.38751E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.295E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02068E1
cs_anode2_imon=2.10656E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72757E1
iondef1_imon=1.09582E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68004E1
iondef4_imon=1.08873E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.25587E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=7.60719E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1496E0
cs_ionaccel_imon=-1.10094E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47296E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56386E1
einzel_imon=7.61778E-6
window_vset=0.0E0
window_vmon=1.70515E-1
window_imon=-1.01531E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39002E-4
mask2_vset=0.0E0
mask2_vmon=-1.86571E1
mask2_imon=-5.32663E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.78512E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.52757E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.33739E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31254E0
defgridb_imon=5.97861E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33291E1
os_fil1_imon=9.44113E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07712E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62009E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30908E1
cs_fil1_imon=9.27629E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.22256E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6403E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44206E-2
os_fil2_imon=-2.82094E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.74601E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.95438E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33008E-1
cs_fil2_imon=-2.76255E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.84809E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22256E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40041E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.08236E-1
res40_imon=-2.50994E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.02E2	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80014E1	-6.67572E-4	-8.80005E1	1.43051E-4	4.79221E-3	9.32932E-2	2.73346E1	-3.26472E1	-3.25487E1	2.67842E1	1.19963E-7	2.51321E-3	2.51321E-3	6.29558E-3	3.01609E-1
2.0E0	9.345E3	9.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80013E1	-6.4373E-4	-8.80004E1	3.8147E-4	4.91142E-3	9.38892E-2	2.73002E1	-3.26529E1	-3.2536E1	2.68094E1	1.19891E-7	2.51709E-3	2.51709E-3	6.2863E-3	3.01862E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.36328E-2	-8.80011E1	-5.48363E-4	-8.80002E1	1.66893E-4	4.74453E-3	9.34839E-2	2.72774E1	-3.26561E1	-3.25818E1	2.68124E1	1.19937E-7	2.51838E-3	2.51838E-3	6.3131E-3	2.989E-1
4.0E0	2.122E3	1.0E0	6.55E2	3.98E2	-7.36328E-2	-8.8001E1	-7.86781E-4	-8.80005E1	1.43051E-4	5.00679E-3	9.33886E-2	2.73129E1	-3.26561E1	-3.26687E1	2.67868E1	1.20106E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.9892E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80016E1	-5.96046E-4	-8.80001E1	-2.38419E-5	4.74453E-3	9.34839E-2	2.7308E1	-3.2652E1	-3.26862E1	2.6789E1	1.20004E-7	2.5131E-3	2.5131E-3	6.29128E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80017E1	-4.29153E-4	-8.80008E1	2.38419E-4	4.673E-3	9.34839E-2	2.72638E1	-3.26543E1	-3.25635E1	2.67944E1	1.19851E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.01995E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80021E1	-5.00679E-4	-8.80005E1	1.19209E-4	4.91142E-3	9.36031E-2	2.73021E1	-3.26663E1	-3.27227E1	2.68004E1	1.19913E-7	2.52318E-3	2.52318E-3	6.28552E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80017E1	-3.33786E-4	-8.80009E1	-7.15256E-5	4.52995E-3	9.3627E-2	2.72654E1	-3.26753E1	-3.25179E1	2.67812E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00041E-1
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80018E1	-4.29153E-4	-8.80006E1	-4.76837E-5	4.88758E-3	9.33647E-2	2.73478E1	-3.2644E1	-3.26518E1	2.68316E1	1.20122E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.9978E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80015E1	-4.76837E-4	-8.80008E1	7.15256E-5	4.95911E-3	9.32932E-2	2.72978E1	-3.26487E1	-3.27858E1	2.67956E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00302E-1
1.4E1	2.77E2	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80017E1	-5.48363E-4	-8.80008E1	-2.38419E-5	5.22137E-3	9.37223E-2	2.73039E1	-3.26703E1	-3.25947E1	2.67902E1	1.19861E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.00824E-1
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80017E1	-5.24521E-4	-8.80007E1	-2.38419E-5	5.4121E-3	9.35555E-2	2.73004E1	-3.26644E1	-3.26036E1	2.6804E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00966E-1
1.6E1	3.3E1	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80017E1	-3.09944E-4	-8.80005E1	-4.76837E-5	4.98295E-3	9.34124E-2	2.73261E1	-3.26609E1	-3.26603E1	2.67884E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00824E-1
1.7E1	5.7E1	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80016E1	-3.8147E-4	-8.80008E1	-2.38419E-5	4.98295E-3	9.36508E-2	2.72769E1	-3.26777E1	-3.26278E1	2.67998E1	1.20174E-7	2.52647E-3	2.52647E-3	6.32386E-3	3.00824E-1
1.8E1	2.15E2	0.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80015E1	-3.8147E-4	-8.80005E1	9.53674E-5	4.93526E-3	9.33886E-2	2.72805E1	-3.26512E1	-3.25197E1	2.67902E1	1.20226E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00041E-1
1.9E1	3.65E2	1.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80013E1	-2.86102E-4	-8.80003E1	1.19209E-4	5.19753E-3	9.33647E-2	2.73423E1	-3.26703E1	-3.26024E1	2.68064E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02922E-1
2.0E1	2.335E3	2.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80011E1	-3.09944E-4	-8.80004E1	4.05312E-4	5.17368E-3	9.33409E-2	2.72793E1	-3.26296E1	-3.27245E1	2.6816E1	1.20004E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.02769E-1
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80015E1	-6.67572E-4	-8.80004E1	4.29153E-4	5.38826E-3	9.34601E-2	2.73087E1	-3.26482E1	-3.26326E1	2.68106E1	1.198E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99686E-1
2.2E1	1.8E2	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80018E1	-6.19888E-4	-8.80002E1	2.6226E-4	5.55515E-3	9.34601E-2	2.73198E1	-3.26726E1	-3.25906E1	2.68111E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00302E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80017E1	-9.53674E-4	-8.80003E1	2.6226E-4	5.53131E-3	9.34362E-2	2.72757E1	-3.26783E1	-3.28273E1	2.68004E1	1.20004E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.0071E-1