[Scan]
initial_time=2016-01-28T17:47:07
final_time=2016-01-28T17:47:27
ip_count=19
run=1026
dataset=3
scan=176
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.39421E-2
qbias_imon=-3.81904E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.75845E-10
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=1.39619E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.7574E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.60948E-8
mult1=-1.40275E-8
mult2=-2.70558E-9
rf_tmon=-5.43738E-3
rf_agc=3.40881E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=5.47802E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67936E0
bslens_imon=2.5017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19646E1
lens5a_imon=1.97226E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05071E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=3.09623E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02074E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04688E1
cs_ea1_imon=1.24982E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06899E0
lens1_imon=1.52476E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.96901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.40195E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=2.99567E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.21942E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=4.30536E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15035E1
os_ea1_imon=2.41639E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24669E0
cs_ionrep_imon=9.8522E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93373E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01641E1
cs_anode1_imon=2.05252E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.92727E-8
tplens_vset=1.4E-1
tplens_vmon=1.60538E0
tplens_imon=-1.83987E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25406E1
iondef3_imon=1.48595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26613E1
iondef2_imon=1.5786E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98422E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=8.74984E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25811E0
ionrepsh_imon=9.25739E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3355E1
lens5b_imon=2.19216E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.11569E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44376E0
os_ea2_imon=-9.30213E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.19029E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07618E0
os_ef2alow_imon=-2.66275E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.73397E-1
os_ef2bup_imon=-5.41618E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10751E1
os_restr2_imon=3.36616E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.27513E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.09144E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72994E1
iondef1_imon=1.1049E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68377E1
iondef4_imon=1.09026E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.21659E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.59811E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-1.13107E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47136E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56099E1
einzel_imon=7.60855E-6
window_vset=0.0E0
window_vmon=1.54273E-1
window_imon=-9.32847E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.38926E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.60632E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.53204E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=6.99708E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44668E0
defgridb_imon=6.12468E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33309E1
os_fil1_imon=9.39837E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06602E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61947E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=9.24148E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30644E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63385E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33166E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.26142E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3263E-1
cs_fil2_imon=-2.55184E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22002E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.94731E-1
res40_imon=-2.40327E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.27E2	0.0E0	1.47E2	4.1E1	-7.47923E-2	-8.8002E1	-5.00679E-4	-8.80009E1	4.52995E-4	5.00679E-3	9.34124E-2	2.7308E1	-3.26596E1	-3.25499E1	2.6818E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00041E-1
2.0E0	9.241E3	1.4E1	3.16E2	1.6E2	-7.44059E-2	-8.80014E1	-1.66893E-4	-8.80009E1	4.52995E-4	4.93526E-3	9.37939E-2	2.73261E1	-3.26717E1	-3.2632E1	2.68176E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.97394E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.40967E-2	-8.80015E1	-3.09944E-4	-8.8001E1	3.33786E-4	4.95911E-3	9.35078E-2	2.72796E1	-3.26619E1	-3.27737E1	2.68319E1	1.19913E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.97704E-1
4.0E0	2.163E3	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80015E1	-3.33786E-4	-8.80009E1	1.90735E-4	4.93526E-3	9.377E-2	2.73111E1	-3.26585E1	-3.26512E1	2.67711E1	1.19697E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80023E1	-4.76837E-4	-8.80008E1	3.57628E-4	4.74453E-3	9.35793E-2	2.73075E1	-3.26366E1	-3.24779E1	2.68328E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40967E-2	-8.80017E1	-5.72205E-4	-8.80006E1	2.38419E-4	4.69685E-3	9.36985E-2	2.72967E1	-3.26615E1	-3.24782E1	2.68106E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.47149E-2	-8.80012E1	-6.4373E-4	-8.80006E1	0.0E0	4.57764E-3	9.36747E-2	2.73207E1	-3.26945E1	-3.2477E1	2.67986E1	1.20017E-7	2.51116E-3	2.51116E-3	6.29098E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.41738E-2	-8.80016E1	-7.62939E-4	-8.80003E1	-1.19209E-4	4.50611E-3	9.36747E-2	2.73099E1	-3.26476E1	-3.25239E1	2.6816E1	1.20069E-7	2.52209E-3	2.52209E-3	6.29645E-3	2.9926E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.36328E-2	-8.80015E1	-7.86781E-4	-8.80003E1	-4.76837E-5	4.86374E-3	9.36747E-2	2.73149E1	-3.26548E1	-3.25268E1	2.68094E1	1.19965E-7	2.51007E-3	2.51007E-3	6.32386E-3	2.9952E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80013E1	-8.10623E-4	-8.80007E1	9.53674E-5	4.72069E-3	9.40323E-2	2.73399E1	-3.26531E1	-3.25859E1	2.67962E1	1.19965E-7	2.51716E-3	2.51716E-3	6.30466E-3	2.9978E-1
1.4E1	3.07E2	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80013E1	-6.19888E-4	-8.80009E1	1.90735E-4	4.91142E-3	9.33886E-2	2.73057E1	-3.26358E1	-3.25562E1	2.68032E1					
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80013E1	-7.15256E-4	-8.80007E1	2.86102E-4	5.03063E-3	9.36031E-2	2.72845E1	-3.26862E1	-3.25446E1	2.67972E1	1.20017E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.02396E-1
1.6E1	3.3E1	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80015E1	-6.4373E-4	-8.80006E1	3.33786E-4	4.55379E-3	9.34124E-2	2.73237E1	-3.26597E1	-3.26416E1	2.68052E1	1.19809E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01871E-1
1.7E1	4.9E1	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80012E1	-5.72205E-4	-8.80004E1	1.90735E-4	5.03063E-3	9.377E-2	2.7285E1	-3.26744E1	-3.25092E1	2.6825E1	1.20217E-7	2.51268E-3	2.51268E-3	6.31555E-3	3.01284E-1
1.8E1	2.15E2	0.0E0	7.27E2	5.0E2	-7.40192E-2	-8.80014E1	-3.8147E-4	-8.80002E1	9.53674E-5	4.76837E-3	9.37462E-2	2.73063E1	-3.26705E1	-3.2614E1	2.6816E1					
1.9E1	3.16E2	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80015E1	-6.4373E-4	-8.80002E1	1.43051E-4	4.86374E-3	9.34601E-2	2.72799E1	-3.26609E1	-3.26579E1	2.68256E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01085E-1
2.0E1	2.277E3	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80015E1	-8.82149E-4	-8.80006E1	4.76837E-5	4.76837E-3	9.3317E-2	2.73535E1	-3.26313E1	-3.26354E1	2.68157E1	1.20106E-7	2.52169E-3	2.52169E-3	6.28056E-3	3.00453E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80015E1	-8.58307E-4	-8.80003E1	-7.15256E-5	4.76837E-3	9.35555E-2	2.73116E1	-3.26484E1	-3.26803E1	2.67896E1	1.20088E-7	2.51538E-3	2.51538E-3	6.32099E-3	3.01544E-1
2.2E1	1.91E2	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80013E1	-8.10623E-4	-8.80002E1	3.33786E-4	4.95911E-3	9.36031E-2	2.73111E1	-3.26597E1	-3.27119E1	2.68123E1	1.2026E-7	2.52169E-3	2.52169E-3	6.29128E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.39421E-2	-8.80015E1	-1.66893E-4	-8.80002E1	0.0E0	4.93526E-3	9.34362E-2	2.72994E1	-3.26613E1	-3.25406E1	2.68377E1